Number | Name | Date | Kind |
---|---|---|---|
4520041 | Aoyama et al. | May 1985 | |
4592802 | Deleonibus et al. | Jun 1986 | |
5035768 | Mu et al. | Jul 1991 | |
5210053 | Yamagata | May 1993 | |
5286675 | Chen et al. | Feb 1994 |
Number | Date | Country |
---|---|---|
5-47706 | Feb 1993 | JPX |
Entry |
---|
Higelin, G., et al., "A Contact Filling Process With CVD-Tungsten . . . " V-MIC Conf., IEEE, Jun. 9-10, 1986, pp. 443-449. |
Bollinger, C. A., et al., "An Advanced Four Level . . . ", V-MIC Conf., IEEE, Jun. 12-13, 1990, pp. 21-27. |
Wolf, S., et al., Silicon Processing, vol. 1, 1986, Lattice Press, pp. 168-173, 348-353, 547-551. |