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6015760 | Becker et al. | Jan 2000 | A |
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6277700 | Yu et al. | Aug 2001 | B1 |
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6355524 | Tuan et al. | Mar 2002 | B1 |
Entry |
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http://www.lamrc.com/inside/products/9400dfm.html., Silicon Etch DFM, TCP® 9400DFM Poly Etch System, Mar. 22, 2002, one page. |