Number | Date | Country | Kind |
---|---|---|---|
62-120803 | May 1987 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4408213 | Bell | Oct 1983 | |
4527173 | Gupta et al. | Jul 1985 | |
4539572 | Robbins et al. | Sep 1985 |
Entry |
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Double Exposure Stabilization of Positive Photoresist, Journal App. Polymer Science, vol. 30, 547-555 (1985) Yanazawa et al. |