Number | Name | Date | Kind |
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4832789 | Cochran et al. | May 1989 | |
4902377 | Berglund et al. | Feb 1990 | |
5110712 | Kessler et al. | May 1992 | |
5126231 | Levy | Jun 1992 | |
5591675 | Kim et al. | Jan 1997 | |
5639345 | Huang et al. | Jun 1997 | |
5891799 | Tsui | Apr 1999 | |
5933761 | Lee | Aug 1999 | |
5935762 | Dai et al. | Aug 1999 |
Entry |
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Wolf Stanley and Tauber Richard N. "Silicon Processing For The VLSI Era Vol. 1--Process Technology", pp. 531-534, 1986. |