Number | Name | Date | Kind |
---|---|---|---|
5821036 | Ficner et al. | Oct 1998 | |
5985968 | Lassila et al. | Nov 1999 |
Number | Date | Country |
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3-062034 | Mar 1991 | JPX |
Entry |
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Microlithography, Science and Technology edited by James R. Sheats and Bruce w. Smith, Marcel Dekker, Inc. 1998, pp. 551-553. |
Maekawa et al., Dissolution Inhibitory Effect of Urea Additives on a Carboxyl Polymer Through a Supramolecular Structure, Journal of Photopolymer Science and Technology, vol. 11, 3 (1998) 533-536. |