The present invention relates to a vacuum isolation device, and more particularly to a vacuum isolation device for the prevention of gas leak.
Gas is a substance without a fixed form, capable of penetrating many tiny positions because of its characteristics, and therefore, requiring much attention and concern on control management so as to achieve gas isolation.
In the current world's highly developed technologies, various different fields, such as semiconductor, medical treatment, might utilize negative pressure space, in which a negative pressure state is formed through a vacuum generating device, thereby preventing outside gas from mixing with gas in a vacuum chamber body, and ensuring the quality of workpieces in the vacuum chamber body.
An opening for opening and closing a hermetical vacuum chamber body would be configured on one face of the vacuum chamber body; workpieces are placed in the vacuum chamber body via the opening, and a door plate element sealing the opening is combined together, thereby achieving the isolation of the inside from outside.
However, the conventional vacuum isolation devices mentioned above has the following problems and deficits indeed upon use:
In the conventional vacuum isolation device, outer join methods are mostly used to perform an action of allowing door plate elements to cover shielding an opening disposed on a vacuum chamber body, and buckling elements or other means are used to retain it. But, it only can retain and couple the door plate elements to the vacuum chamber body, but cannot ensure that gas does not leak.
The main object of the present invention is to provide a vacuum isolation device, allowing a gas passageway to be formed between a seal band set and door plate element by configuring the seal band set on a frame seat and mounting the door plate element thereon, then keeping a negative pressure state in the gas passageway through a gas hole portion. Whereby, the issue existing in the conventional vacuum isolation devices that the door plate element is only fixed and covered on the opening of the vacuum chamber body but whether gas leaks or not cannot be ensured can be broke through, achieving the prevention of gas leak.
To obtain the above object, a vacuum isolation device according to the present invention includes: a frame seat; at least one gas hole portion, formed on one side of the frame seat: and an seal band set, configured on one side of the frame seat. The seal band set is adapted to allow a door plate element to be mounted thereon, a gas passageway is formed between the door plate element and the seal band set, and the gas hole portion is in communication with the gas passageway, where the gas hole portion is in connection with a vacuum generating device.
A vacuum negative-pressure state is formed in the gas passageway through the gas hole portion when the vacuum generating device is in action by means of the above structure, thereby allowing the door plate element to be attached and coupled onto the seal band set. Therefore, if gas leaks from the outside or inside, it enters the gas passageway, and will be drawn out by the vacuum generating device, achieving a protecting isolation effect, thereby to prevent the gas leak.
Referring to
At least one gas hole portion 11 is formed on one side of the frame seat 1, and a first groove portion 12 and second groove portion 13 are configured on one side thereof, where the gas hole portion 11 is positioned between the first groove 12 and second groove portion 13.
The seal band set 2 is configured on one side of the frame seat 1, and includes a first seal band 21 and a second seal band 22, where the first seal band 21 is configured on the first groove portion 12, and the second seal band 22 the second groove portion 13.
The door plate element 3 is mounted on the seal band set 2, a gas passageway 5 is formed between the door plate element 3 and the seal band set 2, and the gas hole portion 11 is in communication with the gas passageway 5.
The vacuum generating device 4 is connected with the gas hole portion 11, a pressure sensing device 41 adapted to detect gas pressure is configured on the vacuum generating device 4, and the vacuum generating device 4 is operated jointly with the pressure sensing device 41.
Furthermore, the seal band set 2 is a hollow silicone gel band set or solid silicone gel band set. At least one handle set 31 allowing a user to grasp is configured on the door plate element 3. A connector connected with a flexible pipe is disposed on the gas hole portion 11, where one end of the flexible pipe is connected with the vacuum generating device 4.
Referring again to
Referring to
Therefore, the key points that a vacuum isolation device of the present invention can improve prior arts are:
Regardless the gas leaks from the first seal band 21 or second seal band 33, the leaking gas will first enter the gas passageway 5, and is then drawn out through the gas hole portion 11 by matching the gas hole portion 11 and seal band set 2 with the vacuum generating device 4, thereby achieving the prevention of gas leak.
The door plate element 3 can be attached and coupled onto the gas passageway 5 by means of the negative-pressure adsorption of the gas passageway 5 without the necessity to add a structure coupling the door plate element 3 to the frame seat 1, thereby reducing the equipment cost.