Claims
- 1. A method for use during manufacture of a flat-panel display from a glass substrate comprising:
providing a vacuum processing system having:
a transfer chamber adapted to transfer the substrate under vacuum conditions, the transfer chamber having a sidewall with a plurality of facets formed therein; a domed lid mounted on the transfer chamber and adapted to form an airtight seal with the transfer chamber; at least a first process chamber coupled to the transfer chamber via a first of the plurality of facets, wherein the first facet is adapted to provide access to and isolation between the transfer chamber and the first process chamber; and at least a first load lock chamber coupled to the transfer chamber via a second one of the plurality of facets, wherein the second facet provides access to and isolation between the transfer chamber and the first load lock chamber; and employing the vacuum processing system during manufacture a flat-panel display from the substrate.
- 2. The method of claim 1 wherein employing the vacuum processing system during manufacture of a flat-panel display includes:
loading the substrate into the first load lock chamber; reducing the pressure in the first load lock chamber to substantially match a pressure in the transfer chamber; and transferring the substrate from the load lock chamber to the first processing chamber.
- 3. The method of claim 2 further comprising cooling the substrate in the transfer chamber.
- 4. The method of claim 1 further comprising viewing the substrate via one or more windows formed within the domed lid.
- 5. The method of claim 4 wherein the one or more windows are oriented perpendicularly relative to the substrate.
- 6. The method of claim 1 further comprising:
coupling a sensor internally on the lid; and employing the sensor to determine a position of the substrate within the transfer chamber.
- 7. The method of claim 6 further comprising correcting the position of the substrate.
Parent Case Info
[0001] The present application is a continuation of U.S. patent application Ser. No. 09/523,366, field Mar. 10, 2000, which is hereby incorporated by reference herein in its entirety.
Continuations (1)
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Number |
Date |
Country |
Parent |
09523366 |
Mar 2000 |
US |
Child |
10719301 |
Nov 2003 |
US |