Number | Name | Date | Kind |
---|---|---|---|
3717761 | Koike et al. | Feb 1973 | |
3930181 | Pfeiffer | Dec 1975 | |
3984687 | Loeffler et al. | Oct 1976 | |
4251728 | Pfeiffer et al. | Feb 1981 | |
4310764 | Iijima | Jan 1982 | |
4330709 | de Chambost | May 1982 | |
4376249 | Pfeiffer et al. | Mar 1983 |
Number | Date | Country |
---|---|---|
56-91426 | Jul 1981 | JPX |
Entry |
---|
Journal of Vacuum Science & Technology, vol. 19, No. 4 Nov./Dec. 1981, "Advanced Deflection Concept for Large Area, High Resolution E-Beam Lithography", H. C. Pfeiffer & G. O. Langner, pp. 1058-1063. |