Claims
- 1. A wafer inspection apparatus comprising:a setting surface on which a cassette member is mounted, the cassette member storing wafers; an observation system that inspects each of the wafers in the cassette member at a predetermined observation position; and a first convey system having a first arm portion that individually conveys wafers from the cassette member to a first position and having a second arm portion that individually conveys wafers from a second position to the cassette member; a second convey system that conveys the wafers from the first position to the predetermined observation position and conveys the wafers from the predetermined observation position to the second position; wherein the first position and the second position are separated from each other along a vertical axis perpendicular to a surface of each wafer in the first and second positions, and wherein wafers positioned at said first and second positions overlie one another.
- 2. An apparatus according to claim 1, wherein the first convey system includes:a support portion that holds the first and second arm portions spaced apart from each other by a predetermined height.
- 3. An apparatus according to claim 2, wherein the support portion includes a height correction mechanism that vertically moves the first and second arm portions.
- 4. An apparatus according to claim 1, wherein the second convey system includes:a plurality of rotary arm portions each adapted to hold a wafer extracted from the cassette member; a vertically extending support shaft that supports the plurality of rotary arm portions at a distal end portion thereof; and a driving mechanism that concurrently rotates the plurality of rotary arm portions by rotating the support shaft at a predetermined timing.
- 5. An apparatus according to claim 4, wherein the driving mechanism of the second convey system includes:a first cam mechanism that rotates the support shaft at the predetermined timing; and a second cam mechanism that vertically moves at least a selected one of the plurality of rotary arm portions.
- 6. An apparatus according to claim 1, wherein each of the first and second arm portions includes:an arm head that holds a wafer extracted from the cassette member; a support arm that holds the arm head while being supported by a support portion; and a driving mechanism provided in the support arm, the driving mechanism moving the arm head in parallel with respect to a wafer convey reference surface of the after inspection apparatus.
Priority Claims (4)
Number |
Date |
Country |
Kind |
7-295075 |
Nov 1995 |
JP |
|
7-302407 |
Nov 1995 |
JP |
|
7-302408 |
Nov 1995 |
JP |
|
7-302409 |
Nov 1995 |
JP |
|
Parent Case Info
This application is a continuation of application Ser. No. 08/739,679, filed Oct. 29, 1996 now abandoned.
US Referenced Citations (10)
Foreign Referenced Citations (2)
Number |
Date |
Country |
8203981 |
Mar 1997 |
JP |
09086655 |
Mar 1997 |
JP |
Continuations (1)
|
Number |
Date |
Country |
Parent |
08/739679 |
Oct 1996 |
US |
Child |
09/323113 |
|
US |