Claims
- 1. An apparatus for laser annealing, comprising:
- an enclosure having top and bottom sides, the top side including a laser transparent window having an inside surface;
- a moveable laser beam having a rectangular cross-section of a first length and a first width;
- a shutter, including an insert of optical quality quartz that has a second length and a second width, positioned inside the enclosure a distance below said inside surface;
- means for positioning the laser beam and moving it together with the shutter, whereby the beam shines through the window and the insert at all times; and
- means for positioning and moving an annealable layer inside the enclosure whereby, through relative motion of the beam and the layer, the beam is caused to shine on all parts of the layer.
- 2. The apparatus of claim 1 wherein the shutter is glass or soda lime glass.
- 3. The apparatus of claim 1 wherein said distance of the shutter below said inside surface is between about 0.1 and 150 mm.
- 4. The apparatus of claim 1 wherein, for the quartz insert, the length is between about 0.01 and 20 cm. and the width is between about 0.01 and 20 mm.
- 5. An apparatus for laser annealing, comprising:
- an enclosure having top and bottom sides, the top side including a laser transparent window having an inside surface;
- a moveable laser beam having a rectangular cross-section of a first length and a first width;
- a shutter, having a thickness, including a rectangular slit having a second length and a second width, positioned inside the enclosure a distance below said inside surface;
- means for positioning the laser beam and moving it together with the shutter, whereby the beam shines through the window and the slit at all times; and
- means for positioning and moving an annealable layer inside the enclosure whereby, through relative motion of the beam and the layer, the beam is caused to shine on all parts of the layer.
- 6. The apparatus of claim 5 wherein the laser beam is an excimer laser beam.
- 7. The apparatus of claim 5 wherein the shutter is glass or soda lime glass.
- 8. The apparatus of claim 5 wherein said distance of the shutter below said inside surface is between about 0.1 and 150 mm.
- 9. The apparatus of claim 5 wherein, for the slit, the length is between about 0.01 and 20 cm. and the width is between about 0.01 and 20 mm.
Parent Case Info
This is a division of patent application Ser. No. 09/017,133, filing date Feb. 2, 1998, now U.S. Pat. No. 5,008,144 A Window Shutter For Laser Annealing, assigned to the same assignee as the present invention.
US Referenced Citations (11)
Divisions (1)
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Number |
Date |
Country |
Parent |
017133 |
Feb 1998 |
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