Number | Name | Date | Kind |
---|---|---|---|
4325776 | Menzel | Apr 1982 | |
4440108 | Little et al. | Apr 1984 | |
4443488 | Little et al. | Apr 1984 | |
4539278 | Williams et al. | Sep 1985 | |
4543266 | Matsuo et al. | Sep 1985 |
Entry |
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A. C. Adams et al., "The Chemical Deposition of Boron-Nitrogen Films," J. Electro Chem. Soc. 127, Feb. 1980, pp. 399-405. |
A. R. Shimkunas, "Advances in X-ray Mask Technology," Solid State Technology, Sep. 1984, pp. 192-199. |