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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing member, deposition apparatus including the same,...
Patent number
9,963,783
Issue date
May 8, 2018
ASM Genitech Korea Ltd.
Ki Jong Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Lateral flow atomic layer deposition apparatus and atomic layer dep...
Patent number
9,879,342
Issue date
Jan 30, 2018
ASM Genitech Korea Ltd.
Woo Chan Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing member, deposition apparatus including the same,...
Patent number
9,371,583
Issue date
Jun 21, 2016
ASM Genitech Korea Ltd.
Ki Jong Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Lateral flow atomic layer deposition device
Patent number
9,145,609
Issue date
Sep 29, 2015
ASM Genitech Korea Ltd.
Young-Seok Choi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Lateral flow atomic layer deposition apparatus and atomic layer dep...
Patent number
9,062,375
Issue date
Jun 23, 2015
ASM Genitech Korea Ltd.
Woo Chan Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Lateral-flow deposition apparatus and method of depositing film by...
Patent number
8,778,083
Issue date
Jul 15, 2014
ASM Genitech Korea Ltd.
Ki Jong Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition apparatus
Patent number
8,747,948
Issue date
Jun 10, 2014
ASM Genitech Korea Ltd.
Hyung Sang Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Atomic layer deposition apparatus
Patent number
8,545,940
Issue date
Oct 1, 2013
ASM Genitech Korea Ltd.
Seung Woo Choi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Thin film deposition apparatus and method thereof
Patent number
8,347,813
Issue date
Jan 8, 2013
ASM Genitech Korea Ltd.
Ki Jong Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Atomic layer deposition apparatus
Patent number
8,282,735
Issue date
Oct 9, 2012
ASM Genitech Korea Ltd
Seung Woo Choi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods of depositing a ruthenium film
Patent number
8,273,408
Issue date
Sep 25, 2012
ASM Genitech Korea Ltd.
Jong Su Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Thin film deposition apparatus and method of maintaining the same
Patent number
8,273,178
Issue date
Sep 25, 2012
ASM Genitech Korea Ltd
Se Yong Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming semiconductor patterns
Patent number
8,252,691
Issue date
Aug 28, 2012
ASM Genitech Korea Ltd.
Julien Beynet
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Atomic layer deposition apparatus
Patent number
8,215,264
Issue date
Jul 10, 2012
ASM Genitech Korea Ltd.
Kyung Il Hong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition apparatus
Patent number
8,092,606
Issue date
Jan 10, 2012
ASM Genitech Korea Ltd.
Hyung Sang Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods of forming an amorphous silicon thin film
Patent number
8,076,242
Issue date
Dec 13, 2011
ASM Genitech Korea Ltd.
Jong Su Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Atomic layer deposition apparatus
Patent number
7,976,898
Issue date
Jul 12, 2011
ASM Genitech Korea Ltd.
Kyung Il Hong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate support for a semiconductor deposition apparatus
Patent number
D614593
Issue date
Apr 27, 2010
ASM Genitech Korea Ltd
Jeong Ho Lee
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
Plasma inducing plate for semiconductor deposition apparatus
Patent number
D606952
Issue date
Dec 29, 2009
ASM Genitech Korea Ltd.
Jeong Ho Lee
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
Method of depositing Ru films having high density
Patent number
7,541,284
Issue date
Jun 2, 2009
ASM Genitech Korea Ltd.
Hyung-Sang Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Thin film forming method
Patent number
7,485,349
Issue date
Feb 3, 2009
ASM Genitech Korea Ltd.
Won-yong Koh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Thin film forming method
Patent number
7,141,278
Issue date
Nov 28, 2006
ASM Genitech Korea Ltd.
Won-yong Koh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma enhanced atomic layer deposition (PEALD) equipment and metho...
Patent number
7,138,336
Issue date
Nov 21, 2006
ASM Genitech Korea Ltd.
Chun Soo Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING MEMBER, DEPOSITION APPARATUS INCLUDING THE SAME,...
Publication number
20160258062
Publication date
Sep 8, 2016
ASM GENITECH KOREA LTD.
Ki Jong KIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LATERAL FLOW ATOMIC LAYER DEPOSITION APPARATUS AND ATOMIC LAYER DEP...
Publication number
20150225851
Publication date
Aug 13, 2015
ASM GENITECH KOREA LTD.
Woo Chan KIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ATOMIC LAYER DEPOSITION APPARATUS
Publication number
20130052348
Publication date
Feb 28, 2013
ASM Genitech Korea Ltd.
Seung Woo Choi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LATERAL FLOW ATOMIC LAYER DEPOSITION APPARATUS AND ATOMIC LAYER DEP...
Publication number
20130045331
Publication date
Feb 21, 2013
ASM Genitech Korea Ltd.
Woo Chan KIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LATERAL FLOW ATOMIC LAYER DEPOSITION DEVICE
Publication number
20120272900
Publication date
Nov 1, 2012
ASM GENITECH KOREA LTD.
Young-Seok CHOI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION APPARATUS
Publication number
20120114856
Publication date
May 10, 2012
ASM Genitech Korea Ltd.
Hyung Sang Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ATOMIC LAYER DEPOSITION APPARATUS
Publication number
20110308460
Publication date
Dec 22, 2011
ASM GENITECH KOREA LTD.
Kyung Il Hong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING SEMICONDUCTOR PATTERNS
Publication number
20110256727
Publication date
Oct 20, 2011
ASM Genitech Korea Ltd.
Julien Beynet
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LATERAL-FLOW DEPOSITION APPARATUS AND METHOD OF DEPOSITING FILM BY...
Publication number
20110020545
Publication date
Jan 27, 2011
ASM Genitech Korea Ltd.
Ki Jong Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION APPARATUS
Publication number
20100275844
Publication date
Nov 4, 2010
ASM Genitech Korea Ltd.
Jeon-Ho Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING MEMBER, DEPOSITION APPARATUS INCLUDING THE SAME,...
Publication number
20100089320
Publication date
Apr 15, 2010
ASM Genitech Korea Ltd.
Ki Jong KIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS OF FORMING AN AMORPHOUS SILICON THIN FILM
Publication number
20090278224
Publication date
Nov 12, 2009
ASM Genitech Korea Ltd.
Jong Su Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THIN FILM DEPOSITION APPARATUS AND METHOD OF MAINTAINING THE SAME
Publication number
20090217871
Publication date
Sep 3, 2009
ASM Genitech Korea Ltd.
Se Yong Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS OF DEPOSITING A RUTHENIUM FILM
Publication number
20090163024
Publication date
Jun 25, 2009
ASM Genitech Korea Ltd.
Jeon Ho Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS OF DEPOSITING A SILICON NITRIDE FILM
Publication number
20090155606
Publication date
Jun 18, 2009
ASM Genitech Korea Ltd.
Tae Ho Yoon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
THIN FILM DEPOSITION APPARATUS AND METHOD THEREOF
Publication number
20090155452
Publication date
Jun 18, 2009
ASM Genitech Korea Ltd.
Ki Jong Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION APPARATUS
Publication number
20090156015
Publication date
Jun 18, 2009
ASM Genitech Korea Ltd.
Hyung Sang Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ATOMIC LAYER DEPOSITION APPARATUS
Publication number
20090136665
Publication date
May 28, 2009
ASM Genitech Korea Ltd.
Seung Woo Choi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS OF DEPOSITING A RUTHENIUM FILM
Publication number
20090104777
Publication date
Apr 23, 2009
ASM Genitech Korea Ltd.
Jong Su Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION APPARATUS
Publication number
20090047426
Publication date
Feb 19, 2009
ASM Genitech Korea Ltd.
Hyung Sang PARK
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF DEPOSITING SILICON OXIDE FILMS
Publication number
20090041952
Publication date
Feb 12, 2009
ASM Genitech Korea Ltd.
Tae Ho Yoon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LATERAL FLOW DEPOSITION APPARATUS AND METHOD OF DEPOSITING FILM BY...
Publication number
20080241384
Publication date
Oct 2, 2008
ASM Genitech Korea Ltd.
Sang Jin Jeong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS OF DEPOSITING A RUTHENIUM FILM
Publication number
20080171436
Publication date
Jul 17, 2008
ASM Genitech Korea Ltd.
Wonyong Koh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ATOMIC LAYER DEPOSITION APPARATUS
Publication number
20080110399
Publication date
May 15, 2008
ASM Genitech Korea Ltd.
Hyung-Sang Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ALD APPARATUS AND METHOD FOR DEPOSITING MULTIPLE LAYERS USING THE SAME
Publication number
20080075858
Publication date
Mar 27, 2008
ASM Genitech Korea Ltd.
Wonyong Koh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ATOMIC LAYER DEPOSITION APPARATUS
Publication number
20080069955
Publication date
Mar 20, 2008
ASM GENITECH KOREA LTD.
Kyung Il Hong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
THIN FILM FORMING METHOD
Publication number
20070048455
Publication date
Mar 1, 2007
ASM GENITECH KOREA LTD.
Won-yong Koh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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