ASM Genitech Korea Ltd.

Organization

  • Cheonan-Si, KR

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING MEMBER, DEPOSITION APPARATUS INCLUDING THE SAME,...

    • Publication number 20160258062
    • Publication date Sep 8, 2016
    • ASM GENITECH KOREA LTD.
    • Ki Jong KIM
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    LATERAL FLOW ATOMIC LAYER DEPOSITION APPARATUS AND ATOMIC LAYER DEP...

    • Publication number 20150225851
    • Publication date Aug 13, 2015
    • ASM GENITECH KOREA LTD.
    • Woo Chan KIM
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ATOMIC LAYER DEPOSITION APPARATUS

    • Publication number 20130052348
    • Publication date Feb 28, 2013
    • ASM Genitech Korea Ltd.
    • Seung Woo Choi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    LATERAL FLOW ATOMIC LAYER DEPOSITION APPARATUS AND ATOMIC LAYER DEP...

    • Publication number 20130045331
    • Publication date Feb 21, 2013
    • ASM Genitech Korea Ltd.
    • Woo Chan KIM
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    LATERAL FLOW ATOMIC LAYER DEPOSITION DEVICE

    • Publication number 20120272900
    • Publication date Nov 1, 2012
    • ASM GENITECH KOREA LTD.
    • Young-Seok CHOI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION APPARATUS

    • Publication number 20120114856
    • Publication date May 10, 2012
    • ASM Genitech Korea Ltd.
    • Hyung Sang Park
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ATOMIC LAYER DEPOSITION APPARATUS

    • Publication number 20110308460
    • Publication date Dec 22, 2011
    • ASM GENITECH KOREA LTD.
    • Kyung Il Hong
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF FORMING SEMICONDUCTOR PATTERNS

    • Publication number 20110256727
    • Publication date Oct 20, 2011
    • ASM Genitech Korea Ltd.
    • Julien Beynet
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    LATERAL-FLOW DEPOSITION APPARATUS AND METHOD OF DEPOSITING FILM BY...

    • Publication number 20110020545
    • Publication date Jan 27, 2011
    • ASM Genitech Korea Ltd.
    • Ki Jong Kim
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION APPARATUS

    • Publication number 20100275844
    • Publication date Nov 4, 2010
    • ASM Genitech Korea Ltd.
    • Jeon-Ho Kim
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING MEMBER, DEPOSITION APPARATUS INCLUDING THE SAME,...

    • Publication number 20100089320
    • Publication date Apr 15, 2010
    • ASM Genitech Korea Ltd.
    • Ki Jong KIM
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS OF FORMING AN AMORPHOUS SILICON THIN FILM

    • Publication number 20090278224
    • Publication date Nov 12, 2009
    • ASM Genitech Korea Ltd.
    • Jong Su Kim
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    THIN FILM DEPOSITION APPARATUS AND METHOD OF MAINTAINING THE SAME

    • Publication number 20090217871
    • Publication date Sep 3, 2009
    • ASM Genitech Korea Ltd.
    • Se Yong Kim
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS OF DEPOSITING A RUTHENIUM FILM

    • Publication number 20090163024
    • Publication date Jun 25, 2009
    • ASM Genitech Korea Ltd.
    • Jeon Ho Kim
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS OF DEPOSITING A SILICON NITRIDE FILM

    • Publication number 20090155606
    • Publication date Jun 18, 2009
    • ASM Genitech Korea Ltd.
    • Tae Ho Yoon
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    THIN FILM DEPOSITION APPARATUS AND METHOD THEREOF

    • Publication number 20090155452
    • Publication date Jun 18, 2009
    • ASM Genitech Korea Ltd.
    • Ki Jong Kim
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION APPARATUS

    • Publication number 20090156015
    • Publication date Jun 18, 2009
    • ASM Genitech Korea Ltd.
    • Hyung Sang Park
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ATOMIC LAYER DEPOSITION APPARATUS

    • Publication number 20090136665
    • Publication date May 28, 2009
    • ASM Genitech Korea Ltd.
    • Seung Woo Choi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS OF DEPOSITING A RUTHENIUM FILM

    • Publication number 20090104777
    • Publication date Apr 23, 2009
    • ASM Genitech Korea Ltd.
    • Jong Su Kim
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION APPARATUS

    • Publication number 20090047426
    • Publication date Feb 19, 2009
    • ASM Genitech Korea Ltd.
    • Hyung Sang PARK
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF DEPOSITING SILICON OXIDE FILMS

    • Publication number 20090041952
    • Publication date Feb 12, 2009
    • ASM Genitech Korea Ltd.
    • Tae Ho Yoon
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    LATERAL FLOW DEPOSITION APPARATUS AND METHOD OF DEPOSITING FILM BY...

    • Publication number 20080241384
    • Publication date Oct 2, 2008
    • ASM Genitech Korea Ltd.
    • Sang Jin Jeong
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS OF DEPOSITING A RUTHENIUM FILM

    • Publication number 20080171436
    • Publication date Jul 17, 2008
    • ASM Genitech Korea Ltd.
    • Wonyong Koh
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ATOMIC LAYER DEPOSITION APPARATUS

    • Publication number 20080110399
    • Publication date May 15, 2008
    • ASM Genitech Korea Ltd.
    • Hyung-Sang Park
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ALD APPARATUS AND METHOD FOR DEPOSITING MULTIPLE LAYERS USING THE SAME

    • Publication number 20080075858
    • Publication date Mar 27, 2008
    • ASM Genitech Korea Ltd.
    • Wonyong Koh
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ATOMIC LAYER DEPOSITION APPARATUS

    • Publication number 20080069955
    • Publication date Mar 20, 2008
    • ASM GENITECH KOREA LTD.
    • Kyung Il Hong
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    THIN FILM FORMING METHOD

    • Publication number 20070048455
    • Publication date Mar 1, 2007
    • ASM GENITECH KOREA LTD.
    • Won-yong Koh
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

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