ETEC SYSTEMS, INC.

Organization

Hayward, CA, US

SPECIAL INDUSTRY MACHINERY, NEC
Business Address
26460 CORPORATE AVE M/S 1240 HAYWARD CA 94545 5107839210
Mailing Address
26460 CORPORATE AVENUE M/S 1240 HAYWARD CA 94545
State Location
CA
State of Incorporation
NV

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Correction for systematic, low spatial frequency critical dimension...
- Patent number 6,331,711
- Issue date Dec 18, 2001
- Etec Systems, Inc.
- Matthew F. Vernon
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Minimization of electron fogging in electron beam lithography
- Patent number 6,326,635
- Issue date Dec 4, 2001
- Etec Systems, Inc.
- Robert Innes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Diaphragm preload air bearing
- Patent number 6,315,450
- Issue date Nov 13, 2001
- Etec Systems, Inc.
- Philip J. Hipol
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Annular differential seal for electron beam apparatus using isolati...
- Patent number 6,300,630
- Issue date Oct 9, 2001
- Etec Systems, Inc.
- Lee H. Veneklasen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precision alignment of microcolumn tip to a micron-size extractor a...
- Patent number 6,297,584
- Issue date Oct 2, 2001
- Etec Systems, Inc.
- Ho-Seob Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermally balanced acousto-optic modulator
- Patent number 6,295,157
- Issue date Sep 25, 2001
- Etec Systems, Inc.
- Paul C. Allen
- G02 - OPTICS
Information Patent Grant
Electrostatic alignment of a charged particle beam
- Patent number 6,288,401
- Issue date Sep 11, 2001
- Etec Systems, Inc.
- Tai-Hon P Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precision alignment and assembly of microlenses and microcolumns
- Patent number 6,281,508
- Issue date Aug 28, 2001
- Etec Systems, Inc.
- Kim Y. Lee
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Epicyclic stage
- Patent number 6,279,490
- Issue date Aug 28, 2001
- Etec Systems, Inc.
- Manuel G. Pastor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Raster scan gaussian beam writing strategy and method for pattern g...
- Patent number 6,274,290
- Issue date Aug 14, 2001
- Etec Systems, Inc.
- Lee H. Veneklasen
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Multi-beam scanner including a dove prism array
- Patent number 6,271,514
- Issue date Aug 7, 2001
- Etec Systems, Inc.
- Timothy N. Thomas
- G02 - OPTICS
Information Patent Grant
Raster shaped beam, electron beam exposure strategy using a two dim...
- Patent number 6,262,429
- Issue date Jul 17, 2001
- Etec Systems, Inc.
- Stephen A. Rishton
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Mask for high resolution optical lithography
- Patent number 6,258,491
- Issue date Jul 10, 2001
- Etec Systems, Inc.
- Juan R. Maldonado
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for controlling a beam shape
- Patent number 6,259,106
- Issue date Jul 10, 2001
- Etec Systems, Inc.
- Volker Boegli
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Integrated electron gun and electronics module
- Patent number 6,246,190
- Issue date Jun 12, 2001
- Etec Systems, Inc.
- Richard Prior
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for providing rectangular shape array of light...
- Patent number 6,243,209
- Issue date Jun 5, 2001
- Etec Systems, Inc.
- Samuel C. Howells
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming gated photocathode for controlled single and mult...
- Patent number 6,220,914
- Issue date Apr 24, 2001
- Etec Systems, Inc.
- Kim Y. Lee
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Laser reflector alignment
- Patent number 6,219,146
- Issue date Apr 17, 2001
- Etec Systems, Inc.
- Robert Innes
- G01 - MEASURING TESTING
Information Patent Grant
Compact photoemission source, field and objective lens arrangement...
- Patent number 6,215,128
- Issue date Apr 10, 2001
- Etec Systems, Inc.
- Marian Mankos
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photoresist developer and method
- Patent number 6,200,736
- Issue date Mar 13, 2001
- ETEC Systems, Inc.
- Zoilo Cheng Ho Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microcolumn assembly using laser spot welding
- Patent number 6,195,214
- Issue date Feb 27, 2001
- Etec Systems, Inc.
- Lawrence Peter Muray
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precision alignment of microcolumn tip to a micron-size extractor a...
- Patent number 6,171,165
- Issue date Jan 9, 2001
- Etec Systems, Inc.
- Ho-Seob Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam illumination of blanking aperture array
- Patent number 6,157,039
- Issue date Dec 5, 2000
- Etec Systems, Inc.
- Marian Mankos
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Chevron correction and autofocus optics for laser scanner
- Patent number 6,107,622
- Issue date Aug 22, 2000
- Etec Systems, Inc.
- Shi-Kay Yao
- G02 - OPTICS
Information Patent Grant
High efficiency laser pattern generator
- Patent number 6,084,706
- Issue date Jul 4, 2000
- Etec Systems, Inc.
- John M. Tamkin
- G02 - OPTICS
Information Patent Grant
Silicon microlens cleaning system
- Patent number 6,077,417
- Issue date Jun 20, 2000
- Etec Systems, Inc.
- Kim Y. Lee
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Two piece mirror arrangement for interferometrically controlled stage
- Patent number 6,057,921
- Issue date May 2, 2000
- Etec Systems, Inc.
- Shi-kay Yao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Short wavelength pulsed laser scanner
- Patent number 6,037,967
- Issue date Mar 14, 2000
- Etec Systems, Inc.
- Paul C. Allen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
T-shaped electron-beam microcolumn as a general purpose scanning el...
- Patent number 6,023,060
- Issue date Feb 8, 2000
- Etec Systems, Inc.
- Tai-Hon P. Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shaped shadow projection for an electron beam column
- Patent number 6,011,269
- Issue date Jan 4, 2000
- Etec Systems, Inc.
- Lee H. Veneklasen
- B82 - NANO-TECHNOLOGY

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Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for removal of surface contaminants from subst...
- Publication number 20030200985
- Publication date Oct 30, 2003
- ETEC SYSTEMS, INC.
- Bart Scholte van Mast
- B08 - CLEANING
Information Patent Application
Tandem microchannel plate and solid state electron detector
- Publication number 20020175283
- Publication date Nov 28, 2002
- Etec Systems, Inc.
- Tai-Hon Philip Chang
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for removal of surface contaminants from subst...
- Publication number 20020094664
- Publication date Jul 18, 2002
- Etec Systems, Inc.
- Bart Scholte van Mast
- H01 - BASIC ELECTRIC ELEMENTS

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Trademarklast 30 trademarks

Information Trademark
76312538 - EXARA
- Serial number 76312538
- Filing date Sep 14, 2001
- Etec Systems, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75455392 - DIGIRITE
- Serial number 75455392
- Registration number 2322987
- Filing date Mar 23, 1998
- Etec Systems, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
74466109 - ALTA
- Serial number 74466109
- Registration number 1908232
- Filing date Dec 1, 1993
- Etec Systems, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
74384448 - ETEC
- Serial number 74384448
- Registration number 1909769
- Filing date Apr 26, 1993
- Etec Systems, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments

ETEC SYSTEMS, INC.

Organization

Business Address

Mailing Address

State Location

State of Incorporation

Patents Grantslast 30 patents

Correction for systematic, low spatial frequency critical dimension...

Minimization of electron fogging in electron beam lithography

Diaphragm preload air bearing

Annular differential seal for electron beam apparatus using isolati...

Precision alignment of microcolumn tip to a micron-size extractor a...

Thermally balanced acousto-optic modulator

Electrostatic alignment of a charged particle beam

Precision alignment and assembly of microlenses and microcolumns

Epicyclic stage

Raster scan gaussian beam writing strategy and method for pattern g...

Multi-beam scanner including a dove prism array

Raster shaped beam, electron beam exposure strategy using a two dim...

Mask for high resolution optical lithography

Apparatus and method for controlling a beam shape

Integrated electron gun and electronics module

Method and apparatus for providing rectangular shape array of light...

Method of forming gated photocathode for controlled single and mult...

Laser reflector alignment

Compact photoemission source, field and objective lens arrangement...

Photoresist developer and method

Microcolumn assembly using laser spot welding

Precision alignment of microcolumn tip to a micron-size extractor a...

Charged particle beam illumination of blanking aperture array

Chevron correction and autofocus optics for laser scanner

High efficiency laser pattern generator

Silicon microlens cleaning system

Two piece mirror arrangement for interferometrically controlled stage

Short wavelength pulsed laser scanner

T-shaped electron-beam microcolumn as a general purpose scanning el...

Shaped shadow projection for an electron beam column

Patents Applicationslast 30 patents

Method and apparatus for removal of surface contaminants from subst...

Tandem microchannel plate and solid state electron detector

Method and apparatus for removal of surface contaminants from subst...

Trademarklast 30 trademarks

76312538 - EXARA

75455392 - DIGIRITE

74466109 - ALTA

74384448 - ETEC