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MRS Technology, Inc.
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Chelmsford, MA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Lens focus shift sensor
Patent number
5,991,004
Issue date
Nov 23, 1999
MRS Technology, Inc.
John D. Wallace
G02 - OPTICS
Information
Patent Grant
Platen for use with lithographic stages and method of making same
Patent number
5,828,142
Issue date
Oct 27, 1998
MRS Technology, Inc.
Craig R. Simpson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Non-contact edge detector
Patent number
5,739,913
Issue date
Apr 14, 1998
MRS Technology, Inc.
John D. Wallace
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Lithography System using dual substrate stages
Patent number
5,677,758
Issue date
Oct 14, 1997
MRS Technology, Inc.
Robert A. McEachern
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment system for use in lithography utilizing a spherical refle...
Patent number
5,483,345
Issue date
Jan 9, 1996
MRS Technology, Inc.
J. Casey Donaher
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for making large area electronic devices, such...
Patent number
RE33836
Issue date
Mar 3, 1992
MRS Technology, Inc.
Griffith L. Resor
355 - Photocopying
Information
Patent Grant
Optical alignment system for use in photolithography and having red...
Patent number
4,855,792
Issue date
Aug 8, 1989
MRS Technology, Inc.
David S. Holbrook
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for making large area electronic devices, such...
Patent number
4,769,680
Issue date
Sep 6, 1988
MRS Technology, Inc.
Griffith L. Resor
G02 - OPTICS
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Patents Applications
last 30 patents
Information
Patent Application
Reticle alignment system for use in lithography
Publication number
20020085189
Publication date
Jul 4, 2002
MRS Technology, Inc.
Craig R. Simpson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY