SCREEN SEMICONDUCTOR SOLUTIONS CO., LTD

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KYOTO 602-8585, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate treating apparatus with parallel gas supply pipes and a g...
- Patent number 10,290,521
- Issue date May 14, 2019
- Screen Semiconductor Solutions Co., Ltd.
- Yoshiteru Fukutomi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,216,099
- Issue date Feb 26, 2019
- SCREEN Semiconductor Solutions Co., Ltd.
- Kazuhiro Nishimura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,201,824
- Issue date Feb 12, 2019
- SCREEN Semiconductor Solutions Co., Ltd.
- Yukihiko Inagaki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate treating apparatus and substrate transporting method
- Patent number 10,181,417
- Issue date Jan 15, 2019
- SCREEN Semiconductor Solutions Co., Ltd.
- Yoshinori Kokabu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cup and substrate processing apparatus
- Patent number 10,160,012
- Issue date Dec 25, 2018
- SCREEN Semiconductor Solutions Co., Ltd.
- Minoru Sugiyama
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing method for drying a substrate by discharging g...
- Patent number 10,134,610
- Issue date Nov 20, 2018
- Screen Semiconductor Solutions Co., Ltd.
- Tadashi Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus
- Patent number 10,109,513
- Issue date Oct 23, 2018
- SCREEN Semiconductor Solutions Co., Ltd.
- Koji Nishiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,047,441
- Issue date Aug 14, 2018
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahiko Harumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Development processing device
- Patent number 9,927,760
- Issue date Mar 27, 2018
- SCREEN Semiconductor Solutions Co., Ltd.
- Minoru Sugiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,828,676
- Issue date Nov 28, 2017
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahiko Harumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method for...
- Patent number 9,741,594
- Issue date Aug 22, 2017
- Screen Semiconductor Solutions Co., Ltd.
- Katsumi Hashimoto
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Substrate processing apparatus, storage device, and method of trans...
- Patent number 9,728,434
- Issue date Aug 8, 2017
- SCREEN Semiconductor Solutions Co., Ltd.
- Yukihiko Inagaki
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Substrate processing apparatus
- Patent number 9,703,199
- Issue date Jul 11, 2017
- Screen Semiconductor Solutions Co., Ltd.
- Toru Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multi-story substrate treating apparatus with flexible transport me...
- Patent number 9,687,874
- Issue date Jun 27, 2017
- Screen Semiconductor Solutions Co., Ltd.
- Hiroyuki Ogura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alignment device and substrate processing apparatus
- Patent number 9,685,363
- Issue date Jun 20, 2017
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahito Kashiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus for cleaning a lower surface of a subs...
- Patent number 9,623,450
- Issue date Apr 18, 2017
- SCREEN Semiconductor Solutions Co., Ltd.
- Koji Nishiyama
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing system
- Patent number 9,606,454
- Issue date Mar 28, 2017
- SCREEN Semiconductor Solutions Co., Ltd.
- Takashi Taguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing apparatus
- Patent number 9,581,907
- Issue date Feb 28, 2017
- Screen Semiconductor Solutions Co., Ltd.
- Masahiko Harumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,566,598
- Issue date Feb 14, 2017
- SCREEN Semiconductor Solutions Co., Ltd.
- Yukihiko Inagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating method and coating apparatus
- Patent number 9,553,007
- Issue date Jan 24, 2017
- SCREEN Semiconductor Solutions Co., Ltd.
- Yukihiko Inagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,539,607
- Issue date Jan 10, 2017
- SCREEN Holdings Co., Ltd.
- Joji Kuwahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,508,573
- Issue date Nov 29, 2016
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahito Kashiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 9,494,877
- Issue date Nov 15, 2016
- SCREEN Semiconductor Solutions Co., Ltd.
- Kazuhiro Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method
- Patent number 9,477,162
- Issue date Oct 25, 2016
- Screen Semiconductor Solutions Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,465,293
- Issue date Oct 11, 2016
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahito Kashiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate cleaning apparatus and substrate processing apparatus inc...
- Patent number 9,460,941
- Issue date Oct 4, 2016
- SCREEN Semiconductor Solutions Co., Ltd.
- Koji Nishiyama
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate processing apparatus with a cleaning processing section f...
- Patent number 9,436,087
- Issue date Sep 6, 2016
- SCREEN Holdings Co., Ltd.
- Kazuo Morioka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,375,748
- Issue date Jun 28, 2016
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahiko Harumoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate treating apparatus with substrate reordering
- Patent number 9,368,383
- Issue date Jun 14, 2016
- Screen Semiconductor Solutions Co., Ltd.
- Hiroyuki Ogura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating method and coating apparatus
- Patent number 9,343,339
- Issue date May 17, 2016
- SCREEN Semiconductor Solutions Co., Ltd.
- Yukihiko Inagaki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20230042033
- Publication date Feb 9, 2023
- SCREEN Semiconductor Solutions Co., Ltd.
- Yoshiteru Fukutomi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE TREATING APPARATUS WITH PARALLEL SUBSTRATE TREATMENT LINE...
- Publication number 20210134626
- Publication date May 6, 2021
- SCREEN Semiconductor Solutions Co., Ltd.
- Hiroyuki Ogura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20190221457
- Publication date Jul 18, 2019
- SCREEN Semiconductor Solutions Co., Ltd.
- Yoshiteru Fukutomi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20190019698
- Publication date Jan 17, 2019
- SCREEN Semiconductor Solutions Co., Ltd.
- Koji NISHIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180044795
- Publication date Feb 15, 2018
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahiko HARUMOTO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170106389
- Publication date Apr 20, 2017
- SCREEN Semiconductor Solutions Co., Ltd.
- Yukihiko INAGAKI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170008017
- Publication date Jan 12, 2017
- SCREEN Semiconductor Solutions Co., Ltd.
- Kazuhiro NISHIMURA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160289839
- Publication date Oct 6, 2016
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahiko HARUMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20160203997
- Publication date Jul 14, 2016
- SCREEN Semiconductor Solutions Co., Ltd.
- Tadashi Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS WITH PARALLEL SUBSTRATE TREATMENT LINES
- Publication number 20160163573
- Publication date Jun 9, 2016
- SCREEN Semiconductor Solutions Co., Ltd.
- Hiroyuki Ogura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20160079099
- Publication date Mar 17, 2016
- SCREEN Semiconductor Solutions Co., Ltd.
- Yoshiteru Fukutomi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
MULTI-STORY SUBSTRATE TREATING APPARATUS WITH FLEXIBLE TRANSPORT ME...
- Publication number 20160008841
- Publication date Jan 14, 2016
- SCREEN Semiconductor Solutions Co., Ltd.
- Hiroyuki Ogura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD
- Publication number 20150279713
- Publication date Oct 1, 2015
- SCREEN Semiconductor Solutions Co., Ltd.
- Yoshinori KOKABU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPING APPARATUS
- Publication number 20150104747
- Publication date Apr 16, 2015
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahiko Harumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20150086923
- Publication date Mar 26, 2015
- SCREEN Semiconductor Solutions Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

SCREEN SEMICONDUCTOR SOLUTIONS CO., LTD

Organization

Patents Grantslast 30 patents

Substrate treating apparatus with parallel gas supply pipes and a g...

Substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate treating apparatus and substrate transporting method

Cup and substrate processing apparatus

Substrate processing method for drying a substrate by discharging g...

Substrate treating apparatus

Substrate processing apparatus and substrate processing method

Development processing device

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method for...

Substrate processing apparatus, storage device, and method of trans...

Substrate processing apparatus

Multi-story substrate treating apparatus with flexible transport me...

Alignment device and substrate processing apparatus

Substrate cleaning apparatus for cleaning a lower surface of a subs...

Substrate processing apparatus and substrate processing system

Developing apparatus

Substrate processing apparatus and substrate processing method

Coating method and coating apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus

Substrate processing method

Substrate processing apparatus and substrate processing method

Substrate cleaning apparatus and substrate processing apparatus inc...

Substrate processing apparatus with a cleaning processing section f...

Substrate processing apparatus and substrate processing method

Substrate treating apparatus with substrate reordering

Coating method and coating apparatus

Patents Applicationslast 30 patents

SUBSTRATE TREATING APPARATUS

SUBSTRATE TREATING APPARATUS WITH PARALLEL SUBSTRATE TREATMENT LINE...

SUBSTRATE TREATING APPARATUS

SUBSTRATE TREATING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD

SUBSTRATE TREATING APPARATUS WITH PARALLEL SUBSTRATE TREATMENT LINES

SUBSTRATE TREATING APPARATUS

MULTI-STORY SUBSTRATE TREATING APPARATUS WITH FLEXIBLE TRANSPORT ME...

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD

DEVELOPING APPARATUS

SUBSTRATE PROCESSING METHOD

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