SPEEDFAM Co., Ltd.

Organization

Ayase-city, JP

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Local dry etching apparatus
- Patent number 11,145,492
- Issue date Oct 12, 2021
- Speedfam Co., Ltd.
- Yasushi Obara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing composition for semiconductor wafer and polishing method
- Patent number 8,114,178
- Issue date Feb 14, 2012
- Nippon Chemical Industrial Co., Ltd.
- Masahiro Izumi
- B24 - GRINDING POLISHING
Information Patent Grant
Thickness control method and double side polisher
- Patent number 7,147,541
- Issue date Dec 12, 2006
- SPEEDFAM Co., Ltd.
- Hitoshi Nagayama
- B24 - GRINDING POLISHING
Information Patent Grant
Thickness control method and double side polisher
- Patent number 7,137,867
- Issue date Nov 21, 2006
- Speedfam Co., Ltd.
- Hitoshi Nagayama
- B24 - GRINDING POLISHING
Information Patent Grant
Local dry etching method
- Patent number 7,094,355
- Issue date Aug 22, 2006
- SPEEDFAM Co., Ltd.
- Michihiko Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer table for local dry etching apparatus
- Patent number 7,005,032
- Issue date Feb 28, 2006
- Speedfam Co., Ltd
- Michihiko Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Local dry etching method
- Patent number 6,908,566
- Issue date Jun 21, 2005
- SPEEDFAM Co., Ltd.
- Michihiko Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nanotopography removing method
- Patent number 6,875,701
- Issue date Apr 5, 2005
- Speedfam Co., Ltd
- Michihiko Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer edge polishing system
- Patent number 6,840,841
- Issue date Jan 11, 2005
- SPEEDFAM Co., Ltd.
- Shunji Hakomori
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for polishing periphery of device wafer and polishing method
- Patent number 6,773,335
- Issue date Aug 10, 2004
- Speedfam Co., Ltd.
- Shunji Hakomori
- B24 - GRINDING POLISHING
Information Patent Grant
Local dry etching method
- Patent number 6,649,528
- Issue date Nov 18, 2003
- Speedfam Co., Ltd.
- Michihiko Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing method for removing corner material from a semi-conductor...
- Patent number 6,638,147
- Issue date Oct 28, 2003
- SPEEDFAM Co., Ltd.
- Masami Shiino
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer flattening process and storage medium
- Patent number 6,496,748
- Issue date Dec 17, 2002
- SpeedFam Co., Ltd.
- Michihiko Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of and method for polishing the outer circumferential por...
- Patent number 6,478,660
- Issue date Nov 12, 2002
- Speedfam Co., Ltd.
- Shunji Hakomori
- B24 - GRINDING POLISHING
Information Patent Grant
Method for manufacturing a semiconductor wafer
- Patent number 6,432,824
- Issue date Aug 13, 2002
- SPEEDFAM Co., Ltd.
- Michihiko Yanagisawa
- C30 - CRYSTAL GROWTH
Information Patent Grant
Discharge tube for a local etching apparatus and a local etching ap...
- Patent number 6,429,399
- Issue date Aug 6, 2002
- SPEEDFAM Co., Ltd.
- Michihiko Yanagisawa
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for removing deposited film
- Patent number 6,422,930
- Issue date Jul 23, 2002
- Speedfam Co., Ltd.
- Shunji Hakomori
- B24 - GRINDING POLISHING
Information Patent Grant
Corrosion-resistant system and method for a plasma etching apparatus
- Patent number 6,316,369
- Issue date Nov 13, 2001
- Speedfam Co., Ltd
- Michihiko Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing compound and an edge polishing method thereby
- Patent number 6,312,487
- Issue date Nov 6, 2001
- Speedfam Co Ltd
- Hiroaki Tanaka
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing compound and a method for polishing
- Patent number 6,300,249
- Issue date Oct 9, 2001
- SpeedFam Co Ltd
- Akitoshi Yoshida
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Carriers and polishing apparatus
- Patent number 6,273,803
- Issue date Aug 14, 2001
- SpeedFam Co., Ltd.
- Xu-Jin Wang
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for specular-polishing of work edges
- Patent number 6,261,160
- Issue date Jul 17, 2001
- SpeedFam Co., Ltd.
- Shunji Hakomori
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Combined CMP and plasma etching wafer flattening system
- Patent number 6,254,718
- Issue date Jul 3, 2001
- SpeedFam Co., Ltd.
- Chikai Tanaka
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for polishing outer periphery of workpiece
- Patent number 6,250,995
- Issue date Jun 26, 2001
- SpeedFam Co., Ltd.
- Shunji Hakomori
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier and CMP apparatus
- Patent number 6,210,260
- Issue date Apr 3, 2001
- SpeedFam Co., Ltd.
- Hideo Tanaka
- B24 - GRINDING POLISHING
Information Patent Grant
Plasma etching method and plasma etching system for carrying out th...
- Patent number 6,159,388
- Issue date Dec 12, 2000
- Speedfam Co., Ltd.
- Michihiko Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dresser and dressing apparatus
- Patent number 6,152,813
- Issue date Nov 28, 2000
- Speedfam Co., Ltd.
- Toshinaru Suzuki
- B24 - GRINDING POLISHING
Information Patent Grant
Cleaning device for surface plate correcting dresser
- Patent number 6,126,530
- Issue date Oct 3, 2000
- Speedfam Co., Ltd.
- Kazuhiko Hirata
- B08 - CLEANING
Information Patent Grant
Slurry recycling system of CMP apparatus and method of same
- Patent number 6,126,531
- Issue date Oct 3, 2000
- Speedfam Co., Ltd.
- Shinya Iida
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier and polishing apparatus
- Patent number 6,110,026
- Issue date Aug 29, 2000
- Speedfam Co., Ltd.
- Hatsuyuki Arai
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
LOCAL DRY ETCHING APPARATUS
- Publication number 20200135429
- Publication date Apr 30, 2020
- SPEEDFAM CO., LTD.
- Yasushi OBARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOCAL DRY ETCHING APPARATUS
- Publication number 20170278674
- Publication date Sep 28, 2017
- SPEEDFAM Co., Ltd.
- Yasushi OBARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOCAL DRY ETCHING APPARATUS AND LOCAL DRY ETCHING FABRICATION METHOD
- Publication number 20160203989
- Publication date Jul 14, 2016
- SPEEDFAM Co., Ltd.
- Yasushi OBARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOCAL DRY ETCHING APPARATUS
- Publication number 20160104601
- Publication date Apr 14, 2016
- SPEEDFAM Co., Ltd.
- Yasushi OBARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OUTER PERIPHERY POLISHING APPARATUS FOR DISC-SHAPED WORKPIECE
- Publication number 20150283664
- Publication date Oct 8, 2015
- Shin-Etsu Handotai Co., Ltd.
- Tadahiro Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Polishing compound for semiconductor wafer polishing and polishing...
- Publication number 20090223136
- Publication date Sep 10, 2009
- Nippon Chemical Industrial Co., Ltd. (50%)
- Masaru Nakajo
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Carrier for holding an object to be polished
- Publication number 20090203300
- Publication date Aug 13, 2009
- SpeedFam Co., Ltd.
- Akira Yoshida
- B24 - GRINDING POLISHING
Information Patent Application
Polishing composition for semiconductor wafer and polishing method
- Publication number 20080311750
- Publication date Dec 18, 2008
- NIPPON CHEMICAL INDUSTRIAL CO., LTD.
- Masahiro Izumi
- B24 - GRINDING POLISHING
Information Patent Application
Polishing composition for semiconductor wafer, method for productio...
- Publication number 20080287038
- Publication date Nov 20, 2008
- NIPPON CHEMICAL INDUSTRIAL CO., LTD.
- Shinsuke Miyabe
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Composition for polishing semiconductor wafer, and method of produc...
- Publication number 20080237535
- Publication date Oct 2, 2008
- SPEEDFAM CO., LTD.
- Kuniaki Maejima
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
POLISHING COMPOSITION FOR SEMICONDUCTOR WAFER, PRODUCTION METHOD TH...
- Publication number 20080038996
- Publication date Feb 14, 2008
- NIPPON CHEMICAL INDUSTRIAL CO., LTD.
- Kuniaki MAEJIMA
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Thickness control method and double side polisher
- Publication number 20060194511
- Publication date Aug 31, 2006
- SPEEDFAM Co., Ltd.
- Hitoshi Nagayama
- B24 - GRINDING POLISHING
Information Patent Application
Thickness control method and double side polisher
- Publication number 20060194512
- Publication date Aug 31, 2006
- SPEEDFAM Co., Ltd.
- Hitoshi Nagayama
- B24 - GRINDING POLISHING
Information Patent Application
Local dry etching method
- Publication number 20040142571
- Publication date Jul 22, 2004
- SPEEDFAM Co., Ltd.
- Michihiko Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-step local dry etching method for SOI wafer
- Publication number 20040063329
- Publication date Apr 1, 2004
- SPEEDFAM Co., Ltd.
- Michihiko Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Local dry etching method
- Publication number 20030199168
- Publication date Oct 23, 2003
- SPEEDFAM Co., Ltd.
- Michihiko Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer edge polishing system
- Publication number 20030134570
- Publication date Jul 17, 2003
- SPEEDFAM Co., Ltd.
- Shunji Hakomori
- B24 - GRINDING POLISHING
Information Patent Application
Polishing method for removing corner material from a semi-conductor...
- Publication number 20020182985
- Publication date Dec 5, 2002
- SPEEDFAM Co., Ltd.
- Masami Shiino
- B24 - GRINDING POLISHING
Information Patent Application
Local dry etching method
- Publication number 20020173149
- Publication date Nov 21, 2002
- SPEEDFAM Co., Ltd.
- Michihiko Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Local etching apparatus and local etching method
- Publication number 20020008082
- Publication date Jan 24, 2002
- SpeedFam Co., Ltd.
- Chikai Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for removing deposited film
- Publication number 20010034194
- Publication date Oct 25, 2001
- SpeedFam Co., Ltd.
- Shunji Hakomori
- B24 - GRINDING POLISHING
Information Patent Application
Wafer flattening process and system
- Publication number 20010007275
- Publication date Jul 12, 2001
- SpeedFam Co., Ltd.
- Michihiko Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS

Trademarklast 30 trademarks

Information Trademark
79061173 - PURE EDGE
- Serial number 79061173
- Registration number 3623274
- Filing date Oct 2, 2008
- SPEEDFAM CO., LTD.
- 3 - Bleaching preparations and other substances for laundry use
Information Trademark
78298521 - STREAM EDGE
- Serial number 78298521
- Filing date Sep 10, 2003
- SpeedFam Co., Ltd.
- 7 - Machines and machine tools
Information Trademark
76340801 - SF
- Serial number 76340801
- Filing date Nov 21, 2001
- SpeedFam Co., Ltd.
- 1 - Chemicals used in industry, science and photography, as well as in agriculture, horticulture and forestry

SPEEDFAM Co., Ltd.

Organization

Patents Grantslast 30 patents

Local dry etching apparatus

Polishing composition for semiconductor wafer and polishing method

Thickness control method and double side polisher

Thickness control method and double side polisher

Local dry etching method

Wafer table for local dry etching apparatus

Local dry etching method

Nanotopography removing method

Wafer edge polishing system

Apparatus for polishing periphery of device wafer and polishing method

Local dry etching method

Polishing method for removing corner material from a semi-conductor...

Wafer flattening process and storage medium

Apparatus of and method for polishing the outer circumferential por...

Method for manufacturing a semiconductor wafer

Discharge tube for a local etching apparatus and a local etching ap...

Apparatus for removing deposited film

Corrosion-resistant system and method for a plasma etching apparatus

Polishing compound and an edge polishing method thereby

Polishing compound and a method for polishing

Carriers and polishing apparatus

Method and apparatus for specular-polishing of work edges

Combined CMP and plasma etching wafer flattening system

Apparatus for polishing outer periphery of workpiece

Carrier and CMP apparatus

Plasma etching method and plasma etching system for carrying out th...

Dresser and dressing apparatus

Cleaning device for surface plate correcting dresser

Slurry recycling system of CMP apparatus and method of same

Carrier and polishing apparatus

Patents Applicationslast 30 patents

LOCAL DRY ETCHING APPARATUS

LOCAL DRY ETCHING APPARATUS

LOCAL DRY ETCHING APPARATUS AND LOCAL DRY ETCHING FABRICATION METHOD

LOCAL DRY ETCHING APPARATUS

OUTER PERIPHERY POLISHING APPARATUS FOR DISC-SHAPED WORKPIECE

Polishing compound for semiconductor wafer polishing and polishing...

Carrier for holding an object to be polished

Polishing composition for semiconductor wafer and polishing method

Polishing composition for semiconductor wafer, method for productio...

Composition for polishing semiconductor wafer, and method of produc...

POLISHING COMPOSITION FOR SEMICONDUCTOR WAFER, PRODUCTION METHOD TH...

Thickness control method and double side polisher

Thickness control method and double side polisher

Local dry etching method

Multi-step local dry etching method for SOI wafer

Local dry etching method

Wafer edge polishing system

Polishing method for removing corner material from a semi-conductor...

Local dry etching method

Local etching apparatus and local etching method

Apparatus for removing deposited film

Wafer flattening process and system

Trademarklast 30 trademarks

79061173 - PURE EDGE

78298521 - STREAM EDGE

76340801 - SF