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Patents Grants
last 30 patents
Information
Patent Grant
Method of process trend matching for identification of process vari...
Patent number
7,813,893
Issue date
Oct 12, 2010
TECH Semiconductor Singapore Pte Ltd.
Kien Hoong Fong
G05 - CONTROLLING REGULATING
Information
Patent Grant
Real-time detection of wafer shift/slide in a chamber
Patent number
7,750,819
Issue date
Jul 6, 2010
TECH Semiconductor Singapore Pte Ltd.
Khoon Peng Lim
G01 - MEASURING TESTING
Information
Patent Grant
Method for data collection during manufacturing processes
Patent number
7,680,556
Issue date
Mar 16, 2010
TECH Semiconductor Singapore Pte Ltd.
Boon Hong Sim
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Method and system for wafer lot order
Patent number
7,610,111
Issue date
Oct 27, 2009
TECH Semiconductor Singapore Pte Ltd.
Cheng Lin
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Method for passivation of plasma etch defects in DRAM devices
Patent number
7,407,871
Issue date
Aug 5, 2008
TECH Semiconductor Singapore Pte Ltd.
Arvind Kumar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to identify machines causing excursion in semiconductor manu...
Patent number
7,363,098
Issue date
Apr 22, 2008
TECH Semiconductor Singapore Pte Ltd.
Choy Yow Ng
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Real time monitoring of particulate contamination in a wafer proces...
Patent number
7,248,975
Issue date
Jul 24, 2007
TECH Semiconductor Singapore Pte Ltd.
Khoon Peng Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Real time monitoring of CMP pad conditioning process
Patent number
7,163,435
Issue date
Jan 16, 2007
TECH Semiconductor Singapore Pte Ltd.
Khoon Peng Lim
B24 - GRINDING POLISHING
Information
Patent Grant
Retaining ring structure for edge control during chemical-mechanica...
Patent number
7,121,927
Issue date
Oct 17, 2006
TECH Semiconductor Singapore Pte Ltd.
Yew Hoong Phang
B24 - GRINDING POLISHING
Information
Patent Grant
Method for monitoring ion implant doses
Patent number
7,029,933
Issue date
Apr 18, 2006
TECH Semiconductor Singapore Pte Ltd.
Siew Fong Wee
G01 - MEASURING TESTING
Information
Patent Grant
Method for depositing a very high phosphorus doped silicon oxide film
Patent number
6,893,983
Issue date
May 17, 2005
TECH Semiconductor Singapore Pte Ltd.
Jian Sun
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Method to improve transistor performance matching for plasma-assist...
Publication number
20110201185
Publication date
Aug 18, 2011
TECH Semiconductor Singapore Pte. Ltd.
Devesh Kumar Datta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Real-time detection of wafer shift/slide in a chamber
Publication number
20090249880
Publication date
Oct 8, 2009
TECH Semiconductor Singapore Pte. Ltd.
Khoon Peng Lim
G01 - MEASURING TESTING
Information
Patent Application
Method and system for reticle scheduling
Publication number
20080201003
Publication date
Aug 21, 2008
TECH Semiconductor Singapore Pte. Ltd.
Ashish Maskara
G05 - CONTROLLING REGULATING
Information
Patent Application
Method and system for wafer lot order
Publication number
20080195241
Publication date
Aug 14, 2008
TECH Semiconductor Singapore Pte. Ltd.
Cheng Lin
G05 - CONTROLLING REGULATING
Information
Patent Application
Method for passivation of plasma etch defects in DRAM devices
Publication number
20080124814
Publication date
May 29, 2008
TECH Semiconductor Singapore Pte. Ltd.
Arvind Kumar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method to identify machines causing excursion in semiconductor manu...
Publication number
20070142951
Publication date
Jun 21, 2007
TECH Semiconductor Singapore Pte. Ltd.
Choy Yow Ng
G05 - CONTROLLING REGULATING
Information
Patent Application
Real time monitoring of particulate contamination in a wafer proces...
Publication number
20070067117
Publication date
Mar 22, 2007
TECH Semiconductor Singapore Pte. Ltd.
Khoon Peng Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REAL TIME MONITORING OF CMP PAD CONDITIONING PROCESS
Publication number
20060172662
Publication date
Aug 3, 2006
TECH Semiconductor Singapore Pte. Ltd.
Khoon Peng Lim
B24 - GRINDING POLISHING
Information
Patent Application
Method for data collection during manufacturing processes
Publication number
20060106921
Publication date
May 18, 2006
TECH Semiconductor Singapore Pte. Ltd.
Boon Hong Sim
G05 - CONTROLLING REGULATING
Information
Patent Application
RETAINING RING STRUCTURE FOR EDGE CONTROL DURING CHEMICAL-MECHANICA...
Publication number
20060046621
Publication date
Mar 2, 2006
TECH Semiconductor Singapore Pte. Ltd.
Yew Hoong Phang
B24 - GRINDING POLISHING
Information
Patent Application
Method for monitoring ion implant doses
Publication number
20050282366
Publication date
Dec 22, 2005
TECH Semiconductor Singapore Pte. Ltd.
Siew Fong Wee
G01 - MEASURING TESTING
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