TECH SEMICONDUCTOR SINGAPORE PTE. LTD

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738799, SG

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Patents Grantslast 30 patents

Information Patent Grant
Method of process trend matching for identification of process vari...
- Patent number 7,813,893
- Issue date Oct 12, 2010
- TECH Semiconductor Singapore Pte Ltd.
- Kien Hoong Fong
- G05 - CONTROLLING REGULATING
Information Patent Grant
Real-time detection of wafer shift/slide in a chamber
- Patent number 7,750,819
- Issue date Jul 6, 2010
- TECH Semiconductor Singapore Pte Ltd.
- Khoon Peng Lim
- G01 - MEASURING TESTING
Information Patent Grant
Method for data collection during manufacturing processes
- Patent number 7,680,556
- Issue date Mar 16, 2010
- TECH Semiconductor Singapore Pte Ltd.
- Boon Hong Sim
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method and system for wafer lot order
- Patent number 7,610,111
- Issue date Oct 27, 2009
- TECH Semiconductor Singapore Pte Ltd.
- Cheng Lin
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method for passivation of plasma etch defects in DRAM devices
- Patent number 7,407,871
- Issue date Aug 5, 2008
- TECH Semiconductor Singapore Pte Ltd.
- Arvind Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to identify machines causing excursion in semiconductor manu...
- Patent number 7,363,098
- Issue date Apr 22, 2008
- TECH Semiconductor Singapore Pte Ltd.
- Choy Yow Ng
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Real time monitoring of particulate contamination in a wafer proces...
- Patent number 7,248,975
- Issue date Jul 24, 2007
- TECH Semiconductor Singapore Pte Ltd.
- Khoon Peng Lim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Real time monitoring of CMP pad conditioning process
- Patent number 7,163,435
- Issue date Jan 16, 2007
- TECH Semiconductor Singapore Pte Ltd.
- Khoon Peng Lim
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring structure for edge control during chemical-mechanica...
- Patent number 7,121,927
- Issue date Oct 17, 2006
- TECH Semiconductor Singapore Pte Ltd.
- Yew Hoong Phang
- B24 - GRINDING POLISHING
Information Patent Grant
Method for monitoring ion implant doses
- Patent number 7,029,933
- Issue date Apr 18, 2006
- TECH Semiconductor Singapore Pte Ltd.
- Siew Fong Wee
- G01 - MEASURING TESTING
Information Patent Grant
Method for depositing a very high phosphorus doped silicon oxide film
- Patent number 6,893,983
- Issue date May 17, 2005
- TECH Semiconductor Singapore Pte Ltd.
- Jian Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

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Patents Applicationslast 30 patents

Information Patent Application
Method to improve transistor performance matching for plasma-assist...
- Publication number 20110201185
- Publication date Aug 18, 2011
- TECH Semiconductor Singapore Pte. Ltd.
- Devesh Kumar Datta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Real-time detection of wafer shift/slide in a chamber
- Publication number 20090249880
- Publication date Oct 8, 2009
- TECH Semiconductor Singapore Pte. Ltd.
- Khoon Peng Lim
- G01 - MEASURING TESTING
Information Patent Application
Method and system for reticle scheduling
- Publication number 20080201003
- Publication date Aug 21, 2008
- TECH Semiconductor Singapore Pte. Ltd.
- Ashish Maskara
- G05 - CONTROLLING REGULATING
Information Patent Application
Method and system for wafer lot order
- Publication number 20080195241
- Publication date Aug 14, 2008
- TECH Semiconductor Singapore Pte. Ltd.
- Cheng Lin
- G05 - CONTROLLING REGULATING
Information Patent Application
Method for passivation of plasma etch defects in DRAM devices
- Publication number 20080124814
- Publication date May 29, 2008
- TECH Semiconductor Singapore Pte. Ltd.
- Arvind Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method to identify machines causing excursion in semiconductor manu...
- Publication number 20070142951
- Publication date Jun 21, 2007
- TECH Semiconductor Singapore Pte. Ltd.
- Choy Yow Ng
- G05 - CONTROLLING REGULATING
Information Patent Application
Real time monitoring of particulate contamination in a wafer proces...
- Publication number 20070067117
- Publication date Mar 22, 2007
- TECH Semiconductor Singapore Pte. Ltd.
- Khoon Peng Lim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REAL TIME MONITORING OF CMP PAD CONDITIONING PROCESS
- Publication number 20060172662
- Publication date Aug 3, 2006
- TECH Semiconductor Singapore Pte. Ltd.
- Khoon Peng Lim
- B24 - GRINDING POLISHING
Information Patent Application
Method for data collection during manufacturing processes
- Publication number 20060106921
- Publication date May 18, 2006
- TECH Semiconductor Singapore Pte. Ltd.
- Boon Hong Sim
- G05 - CONTROLLING REGULATING
Information Patent Application
RETAINING RING STRUCTURE FOR EDGE CONTROL DURING CHEMICAL-MECHANICA...
- Publication number 20060046621
- Publication date Mar 2, 2006
- TECH Semiconductor Singapore Pte. Ltd.
- Yew Hoong Phang
- B24 - GRINDING POLISHING
Information Patent Application
Method for monitoring ion implant doses
- Publication number 20050282366
- Publication date Dec 22, 2005
- TECH Semiconductor Singapore Pte. Ltd.
- Siew Fong Wee
- G01 - MEASURING TESTING

TECH SEMICONDUCTOR SINGAPORE PTE. LTD

Organization

Patents Grantslast 30 patents

Method of process trend matching for identification of process vari...

Real-time detection of wafer shift/slide in a chamber

Method for data collection during manufacturing processes

Method and system for wafer lot order

Method for passivation of plasma etch defects in DRAM devices

Method to identify machines causing excursion in semiconductor manu...

Real time monitoring of particulate contamination in a wafer proces...

Real time monitoring of CMP pad conditioning process

Retaining ring structure for edge control during chemical-mechanica...

Method for monitoring ion implant doses

Method for depositing a very high phosphorus doped silicon oxide film

Patents Applicationslast 30 patents

Method to improve transistor performance matching for plasma-assist...

Real-time detection of wafer shift/slide in a chamber

Method and system for reticle scheduling

Method and system for wafer lot order

Method for passivation of plasma etch defects in DRAM devices

Method to identify machines causing excursion in semiconductor manu...

Real time monitoring of particulate contamination in a wafer proces...

REAL TIME MONITORING OF CMP PAD CONDITIONING PROCESS

Method for data collection during manufacturing processes

RETAINING RING STRUCTURE FOR EDGE CONTROL DURING CHEMICAL-MECHANICA...

Method for monitoring ion implant doses