Akifumi Gawase

Person

Kuwana, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film forming apparatus and film forming method
- Patent number 12,065,725
- Issue date Aug 20, 2024
- Kioxia Corporation
- Yuta Konno
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Semiconductor device and semiconductor memory device
- Patent number 11,978,807
- Issue date May 7, 2024
- Kioxia Corporation
- Akifumi Gawase
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing pad, semiconductor fabricating device and fabricating met...
- Patent number 11,883,926
- Issue date Jan 30, 2024
- Kioxia Corporation
- Takahiko Kawasaki
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing device, polishing head, polishing method, and method of m...
- Patent number 11,534,886
- Issue date Dec 27, 2022
- Kioxia Corporation
- Mikiya Sakashita
- B24 - GRINDING POLISHING
Information Patent Grant
Semiconductor device and semiconductor memory device
- Patent number 11,502,204
- Issue date Nov 15, 2022
- Kioxia Corporation
- Akifumi Gawase
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and semiconductor memory device
- Patent number 11,349,033
- Issue date May 31, 2022
- Kioxia Corporation
- Tomoki Ishimaru
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device production method
- Patent number 10,998,283
- Issue date May 4, 2021
- TOSHIBA MEMORY CORPORATION
- Takahiko Kawasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor device and semiconductor devi...
- Patent number 10,991,588
- Issue date Apr 27, 2021
- TOSHIBA MEMORY CORPORATION
- Akifumi Gawase
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 10,985,027
- Issue date Apr 20, 2021
- Kioxia Corporation
- Akifumi Gawase
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor device and semiconductor manu...
- Patent number 10,850,363
- Issue date Dec 1, 2020
- TOSHIBA MEMORY CORPORATION
- Yukiteru Matsui
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor memory device having air gap
- Patent number 10,319,734
- Issue date Jun 11, 2019
- TOSHIBA MEMORY CORPORATION
- Yasuhito Yoshimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Planarization method and planarization apparatus
- Patent number 10,283,383
- Issue date May 7, 2019
- TOSHIBA MEMORY CORPORATION
- Akifumi Gawase
- B24 - GRINDING POLISHING
Information Patent Grant
Dresser, method of manufacturing dresser, and method of manufacturi...
- Patent number 10,195,716
- Issue date Feb 5, 2019
- TOSHIBA MEMORY CORPORATION
- Takahiko Kawasaki
- B24 - GRINDING POLISHING
Information Patent Grant
Manufacturing method of semiconductor device
- Patent number 10,121,677
- Issue date Nov 6, 2018
- TOSHIBA MEMORY CORPORATION
- Yukiteru Matsui
- B24 - GRINDING POLISHING
Information Patent Grant
Semiconductor storage device
- Patent number 10,079,153
- Issue date Sep 18, 2018
- TOSHIBA MEMORY CORPORATION
- Akifumi Gawase
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Abrasive cloth and polishing method
- Patent number 10,010,997
- Issue date Jul 3, 2018
- TOSHIBA MEMORY CORPORATION
- Akifumi Gawase
- B24 - GRINDING POLISHING
Information Patent Grant
Manufacturing method of semiconductor device and semiconductor manu...
- Patent number 10,008,390
- Issue date Jun 26, 2018
- TOSHIBA MEMORY CORPORATION
- Yukiteru Matsui
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of semiconductor device and semiconductor devi...
- Patent number 9,837,279
- Issue date Dec 5, 2017
- TOSHIBA MEMORY CORPORATION
- Akifumi Gawase
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Three-dimensional memory device
- Patent number 9,646,989
- Issue date May 9, 2017
- Kabushiki Kaisha Toshiba
- Yasuhito Yoshimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor device
- Patent number 9,558,961
- Issue date Jan 31, 2017
- Kabushiki Kaisha Toshiba
- Akifumi Gawase
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor device
- Patent number 9,174,322
- Issue date Nov 3, 2015
- Kabushiki Kaisha Toshiba
- Yukiteru Matsui
- B24 - GRINDING POLISHING
Information Patent Grant
Planarization method and planarization apparatus
- Patent number 9,144,879
- Issue date Sep 29, 2015
- Kabushiki Kaisha Toshiba
- Akifumi Gawase
- B24 - GRINDING POLISHING
Information Patent Grant
Manufacturing method of semiconductor device and polishing apparatus
- Patent number 9,012,246
- Issue date Apr 21, 2015
- Kabushiki Kaisha Toshiba
- Hajime Eda
- B24 - GRINDING POLISHING
Information Patent Grant
Planarizing method
- Patent number 8,936,729
- Issue date Jan 20, 2015
- Kabushiki Kaisha Toshiba
- Akifumi Gawase
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 8,871,644
- Issue date Oct 28, 2014
- Kabushiki Kaisha Toshiba
- Yukiteru Matsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for chemical planarization and chemical planarization apparatus
- Patent number 8,703,004
- Issue date Apr 22, 2014
- Kabushiki Kaisha Toshiba
- Yukiteru Matsui
- B24 - GRINDING POLISHING
Information Patent Grant
Method of fabricating semiconductor device
- Patent number 7,781,301
- Issue date Aug 24, 2010
- Kabushiki Kaisha Toshiba
- Kei Watanabe
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MEMORY DEVICE
- Publication number 20240324178
- Publication date Sep 26, 2024
- KIOXIA Corporation
- Kasumi OKABE
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240324179
- Publication date Sep 26, 2024
- KIOXIA Corporation
- Yusuke MUTO
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20240097044
- Publication date Mar 21, 2024
- KIOXIA Corporation
- Yusuke KASAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MEMORY DEVICE
- Publication number 20240098962
- Publication date Mar 21, 2024
- KIOXIA Corporation
- Daisuke WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20240084456
- Publication date Mar 14, 2024
- KIOXIA Corporation
- Kazuhiro KATONO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MEMORY DEVICE
- Publication number 20230413530
- Publication date Dec 21, 2023
- KIOXIA Corporation
- Akifumi GAWASE
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20230307358
- Publication date Sep 28, 2023
- KIOXIA Corporation
- Akifumi GAWASE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MEMORY DEVICE
- Publication number 20230200050
- Publication date Jun 22, 2023
- KIOXIA Corporation
- Akifumi GAWASE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESISTANCE CHANGE DEVICE AND STORAGE DEVICE
- Publication number 20230085635
- Publication date Mar 23, 2023
- KIOXIA Corporation
- Hiroki KAWAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MEMORY DEVICE
- Publication number 20230030121
- Publication date Feb 2, 2023
- KIOXIA Corporation
- Akifumi GAWASE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MEMORY DEVICE
- Publication number 20220302320
- Publication date Sep 22, 2022
- KIOXIA Corporation
- Akifumi GAWASE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MEMORY DEVICE
- Publication number 20220262954
- Publication date Aug 18, 2022
- KIOXIA Corporation
- Tomoki ISHIMARU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20220048155
- Publication date Feb 17, 2022
- KIOXIA Corporation
- Mikiya SAKASHITA
- B24 - GRINDING POLISHING
Information Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MEMORY DEVICE
- Publication number 20210305431
- Publication date Sep 30, 2021
- KIOXIA Corporation
- Tomoki ISHIMARU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING PAD, SEMICONDUCTOR FABRICATING DEVICE AND FABRICATING MET...
- Publication number 20210260719
- Publication date Aug 26, 2021
- Toshiba Memory Corporation
- Takahiko KAWASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING DEVICE, POLISHING HEAD, POLISHING METHOD, AND METHOD OF M...
- Publication number 20210170542
- Publication date Jun 10, 2021
- KIOXIA Corporation
- Mikiya SAKASHITA
- B24 - GRINDING POLISHING
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20210087669
- Publication date Mar 25, 2021
- Kioxia Corporation
- Yuta KONNO
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20210082711
- Publication date Mar 18, 2021
- Kioxia Corporation
- Akifumi GAWASE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING DEVICE AND POLISHING METHOD
- Publication number 20200298363
- Publication date Sep 24, 2020
- Toshiba Memory Corporation
- Akifumi GAWASE
- B24 - GRINDING POLISHING
Information Patent Application
SEMICONDUCTOR DEVICE PRODUCTION METHOD
- Publication number 20200035636
- Publication date Jan 30, 2020
- Toshiba Memory Corporation
- Takahiro KAWASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING PAD, SEMICONDUCTOR FABRICATING DEVICE AND FABRICATING MET...
- Publication number 20190283206
- Publication date Sep 19, 2019
- Toshiba Memory Corporation
- Takahiko KAWASAKI
- B24 - GRINDING POLISHING
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
- Publication number 20190259777
- Publication date Aug 22, 2019
- Toshiba Memory Corporation
- Yasuhito YOSHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...
- Publication number 20180277388
- Publication date Sep 27, 2018
- Toshiba Memory Corporation
- Yukiteru MATSUI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DRESSER, METHOD OF MANUFACTURING DRESSER, AND METHOD OF MANUFACTURI...
- Publication number 20180056482
- Publication date Mar 1, 2018
- Toshiba Memory Corporation
- Takahiko KAWASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVI...
- Publication number 20180061654
- Publication date Mar 1, 2018
- Toshiba Memory Corporation
- Akifumi Gawase
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STORAGE DEVICE
- Publication number 20170250081
- Publication date Aug 31, 2017
- Kabushiki Kaisha Toshiba
- Akifumi GAWASE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A THREE-DIMENSIONAL MEMORY DEVICE
- Publication number 20170141122
- Publication date May 18, 2017
- Kabushiki Kaisha Toshiba
- Yasuhito YOSHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SLURRY FOR CHEMICA...
- Publication number 20170133238
- Publication date May 11, 2017
- Kabushiki Kaisha Toshiba
- Takahiko KAWASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
- Publication number 20170110471
- Publication date Apr 20, 2017
- KABUSHIKI KAISHA TOSHIBA
- Yasuhito YOSHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Manufacturing Method of Semiconductor Device and Semiconductor Devi...
- Publication number 20170076953
- Publication date Mar 16, 2017
- Kabushiki Kaisha Toshiba
- Akifumi GAWASE
- H01 - BASIC ELECTRIC ELEMENTS

Akifumi Gawase

Person

Patents Grantslast 30 patents

Film forming apparatus and film forming method

Semiconductor device and semiconductor memory device

Polishing pad, semiconductor fabricating device and fabricating met...

Polishing device, polishing head, polishing method, and method of m...

Semiconductor device and semiconductor memory device

Semiconductor device and semiconductor memory device

Semiconductor device production method

Manufacturing method of semiconductor device and semiconductor devi...

Method for manufacturing semiconductor device

Manufacturing method of semiconductor device and semiconductor manu...

Semiconductor memory device having air gap

Planarization method and planarization apparatus

Dresser, method of manufacturing dresser, and method of manufacturi...

Manufacturing method of semiconductor device

Semiconductor storage device

Abrasive cloth and polishing method

Manufacturing method of semiconductor device and semiconductor manu...

Manufacturing method of semiconductor device and semiconductor devi...

Three-dimensional memory device

Manufacturing method of semiconductor device

Manufacturing method of semiconductor device

Planarization method and planarization apparatus

Manufacturing method of semiconductor device and polishing apparatus

Planarizing method

Method of manufacturing semiconductor device

Method for chemical planarization and chemical planarization apparatus

Method of fabricating semiconductor device

Patents Applicationslast 30 patents

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MEMORY DEVICE

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MEMORY DEVICE

FILM FORMING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR...

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MEMORY DEVICE

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MEMORY DEVICE

RESISTANCE CHANGE DEVICE AND STORAGE DEVICE

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MEMORY DEVICE

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MEMORY DEVICE

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MEMORY DEVICE

POLISHING APPARATUS AND POLISHING METHOD

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MEMORY DEVICE

POLISHING PAD, SEMICONDUCTOR FABRICATING DEVICE AND FABRICATING MET...

POLISHING DEVICE, POLISHING HEAD, POLISHING METHOD, AND METHOD OF M...

FILM FORMING APPARATUS AND FILM FORMING METHOD

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

POLISHING DEVICE AND POLISHING METHOD

SEMICONDUCTOR DEVICE PRODUCTION METHOD

POLISHING PAD, SEMICONDUCTOR FABRICATING DEVICE AND FABRICATING MET...

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...

DRESSER, METHOD OF MANUFACTURING DRESSER, AND METHOD OF MANUFACTURI...

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVI...

SEMICONDUCTOR STORAGE DEVICE

A THREE-DIMENSIONAL MEMORY DEVICE

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SLURRY FOR CHEMICA...

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME

Manufacturing Method of Semiconductor Device and Semiconductor Devi...