-
-
-
-
Sputtering target
-
Patent number 5,320,729
-
Issue date Jun 14, 1994
-
Hitachi, Ltd.
-
Yasunori Narizuka
-
H01 - BASIC ELECTRIC ELEMENTS
-
-
Sputtering method and apparatus
-
Patent number 4,902,394
-
Issue date Feb 20, 1990
-
Hitachi, Ltd.
-
Akihiro Kenmotsu
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
Semiconductor device
-
Patent number 4,736,012
-
Issue date Apr 5, 1988
-
Hitachi, Ltd.
-
Fusaji Shoji
-
H01 - BASIC ELECTRIC ELEMENTS