Akiko Kobayashi

Person

Sakurashin-machi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for fabricating layer structure having target topological pr...
- Patent number 11,961,741
- Issue date Apr 16, 2024
- ASM IP Holding B.V.
- Eiichiro Shiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of selectively depositing a capping layer structure on a sem...
- Patent number 10,910,262
- Issue date Feb 2, 2021
- ASM IP Holding B.V.
- Aurélie Kuroda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of atomic layer etching using hydrogen plasma
- Patent number 10,504,742
- Issue date Dec 10, 2019
- ASM IP Holding B.V.
- Masaru Zaitsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming insulation film by modified PEALD
- Patent number 10,378,106
- Issue date Aug 13, 2019
- ASM IP Holding B.V.
- Akiko Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of reforming insulating film deposited on substrate with rec...
- Patent number 10,283,353
- Issue date May 7, 2019
- ASM IP Holding B.V.
- Akiko Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cell-containing sheet
- Patent number 10,258,456
- Issue date Apr 16, 2019
- National University Corporation Tokyo Medical and Dental University
- Ikuo Morita
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Cell-containing sheet
- Patent number 10,219,888
- Issue date Mar 5, 2019
- National University Corporation Tokyo Medical and Dental University
- Ikuo Morita
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of cyclic dry etching using etchant film
- Patent number 9,793,135
- Issue date Oct 17, 2017
- ASM IP Holding B.V.
- Masaru Zaitsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for hydrophobization of surface of silicon-containing film b...
- Patent number 9,478,414
- Issue date Oct 25, 2016
- ASM IP Holding B.V.
- Akiko Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for repairing damage of dielectric film by cyclic processes
- Patent number 8,785,215
- Issue date Jul 22, 2014
- ASM IP Holding B.V.
- Akiko Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming insulation film using plasma treatment cycles
- Patent number 8,647,722
- Issue date Feb 11, 2014
- ASM Japan K.K.
- Akiko Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for controlling flow and concentration of liquid precursor
- Patent number 8,151,814
- Issue date Apr 10, 2012
- ASM Japan K.K.
- Akira Shimizu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for forming copper thin film
- Patent number 6,726,954
- Issue date Apr 27, 2004
- Anelva Corporation
- Minjuan Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for the formation of copper wiring films
- Patent number 6,562,219
- Issue date May 13, 2003
- Anelva Corporation
- Akiko Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition apparatus
- Patent number 6,143,077
- Issue date Nov 7, 2000
- Anelva Corporation
- Kei Ikeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning metallic films built up within thin film deposit...
- Patent number 5,993,679
- Issue date Nov 30, 1999
- Anelva Corporation
- Tomoaki Koide
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin-film formation device and method
- Patent number 5,793,479
- Issue date Aug 11, 1998
- NEC Corporation
- Kazumi Sugai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR FABRICATING LAYER STRUCTURE HAVING TARGET TOPOLOGICAL PR...
- Publication number 20240128090
- Publication date Apr 18, 2024
- ASM IP HOLDING B.V.
- Eiichiro Shiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FABRICATING LAYER STRUCTURE HAVING TARGET TOPOLOGICAL PR...
- Publication number 20210287912
- Publication date Sep 16, 2021
- ASM IP HOLDING B.V.
- Eiichiro Shiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CELL-CONTAINING SHEET
- Publication number 20190192271
- Publication date Jun 27, 2019
- NATIONAL UNIVERSITY CORPORATION TOKYO MEDICAL AND DENTAL UNIVERSITY
- Ikuo MORITA
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD OF SELECTIVELY DEPOSITING A CAPPING LAYER STRUCTURE ON A SEM...
- Publication number 20190148224
- Publication date May 16, 2019
- ASM IP HOLDING B.V.
- Aurélie Kuroda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF ATOMIC LAYER ETCHING USING HYDROGEN PLASMA
- Publication number 20180350620
- Publication date Dec 6, 2018
- ASM IP HOLDING B.V.
- Masaru Zaitsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF REFORMING INSULATING FILM DEPOSITED ON SUBSTRATE WITH REC...
- Publication number 20180286663
- Publication date Oct 4, 2018
- ASM IP HOLDING B.V.
- Akiko Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CELL-CONTAINING SHEET
- Publication number 20160324623
- Publication date Nov 10, 2016
- Tokyo Medical and Dental University
- Ikuo MORITA
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
Method for Hydrophobization of Surface of Silicon-Containing Film b...
- Publication number 20160093485
- Publication date Mar 31, 2016
- ASM IP HOLDING B.V.
- Akiko Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR REPAIRING DAMAGE OF DIELECTRIC FILM BY CYCLIC PROCESSES
- Publication number 20130337583
- Publication date Dec 19, 2013
- ASM IP HOLDING B.V.
- Akiko Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR CONTROLLING FLOW AND CONCENTRATION OF LIQUID PRECURSOR
- Publication number 20100178423
- Publication date Jul 15, 2010
- ASM JAPAN K.K.
- Akira Shimizu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR FORMING HIGH RESISTIVITY THIN METALLIC FILM
- Publication number 20100136313
- Publication date Jun 3, 2010
- ASM JAPAN K.K.
- Akira Shimizu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Forming Insulation Film by Modified PEALD
- Publication number 20100124621
- Publication date May 20, 2010
- ASM JAPAN K.K.
- Akiko Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Forming Insulation Film Using Plasma Treatment Cycles
- Publication number 20100124618
- Publication date May 20, 2010
- ASM JAPAN K.K.
- Akiko Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cell-containing sheet
- Publication number 20070048292
- Publication date Mar 1, 2007
- Tokyo Medical and Dental University
- Ikuo Morita
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
Method for the formation of copper wiring films
- Publication number 20020134686
- Publication date Sep 26, 2002
- Akiko Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and system for forming copper thin film
- Publication number 20020052109
- Publication date May 2, 2002
- Minjuan Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CVD apparatus and CVD method for copper deposition
- Publication number 20010006701
- Publication date Jul 5, 2001
- Akiko Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Akiko Kobayashi

Person

Patents Grantslast 30 patents

Method for fabricating layer structure having target topological pr...

Method of selectively depositing a capping layer structure on a sem...

Method of atomic layer etching using hydrogen plasma

Method of forming insulation film by modified PEALD

Method of reforming insulating film deposited on substrate with rec...

Cell-containing sheet

Cell-containing sheet

Method of cyclic dry etching using etchant film

Method for hydrophobization of surface of silicon-containing film b...

Method for repairing damage of dielectric film by cyclic processes

Method of forming insulation film using plasma treatment cycles

Method for controlling flow and concentration of liquid precursor

Method and system for forming copper thin film

Method for the formation of copper wiring films

Chemical vapor deposition apparatus

Method of cleaning metallic films built up within thin film deposit...

Thin-film formation device and method

Patents Applicationslast 30 patents

METHOD FOR FABRICATING LAYER STRUCTURE HAVING TARGET TOPOLOGICAL PR...

METHOD FOR FABRICATING LAYER STRUCTURE HAVING TARGET TOPOLOGICAL PR...

CELL-CONTAINING SHEET

METHOD OF SELECTIVELY DEPOSITING A CAPPING LAYER STRUCTURE ON A SEM...

METHOD OF ATOMIC LAYER ETCHING USING HYDROGEN PLASMA

METHOD OF REFORMING INSULATING FILM DEPOSITED ON SUBSTRATE WITH REC...

CELL-CONTAINING SHEET

Method for Hydrophobization of Surface of Silicon-Containing Film b...

METHOD FOR REPAIRING DAMAGE OF DIELECTRIC FILM BY CYCLIC PROCESSES

METHOD FOR CONTROLLING FLOW AND CONCENTRATION OF LIQUID PRECURSOR

PROCESS FOR FORMING HIGH RESISTIVITY THIN METALLIC FILM

Method of Forming Insulation Film by Modified PEALD

Method of Forming Insulation Film Using Plasma Treatment Cycles

Cell-containing sheet

Method for the formation of copper wiring films

Method and system for forming copper thin film

CVD apparatus and CVD method for copper deposition