Akira Shimase

Person

Yokosuka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Manufacturing method of semiconductor integrated circuit device and...
- Patent number 7,517,707
- Issue date Apr 14, 2009
- Renesas Technology Corp.
- Masayoshi Okamoto
- G01 - MEASURING TESTING
Information Patent Grant
Probe driving method, and probe apparatus
- Patent number 7,301,146
- Issue date Nov 27, 2007
- Hitachi, Ltd.
- Satoshi Tomimatsu
- G01 - MEASURING TESTING
Information Patent Grant
Manufacturing method of semiconductor integrated circuit device and...
- Patent number 7,271,015
- Issue date Sep 18, 2007
- Renesas Technology Corp.
- Masayoshi Okamoto
- G01 - MEASURING TESTING
Information Patent Grant
Probe driving method, and probe apparatus
- Patent number 6,960,765
- Issue date Nov 1, 2005
- Hitachi, Ltd.
- Satoshi Tomimatsu
- G01 - MEASURING TESTING
Information Patent Grant
Method of making wiring and logic corrections on a semiconductor de...
- Patent number 6,753,253
- Issue date Jun 22, 2004
- Hitachi, Ltd.
- Takahiko Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample processing apparatus and method for removing charge on sampl...
- Patent number 6,507,029
- Issue date Jan 14, 2003
- Hitachi, Ltd.
- Norimasa Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for observing or processing and analyzing usin...
- Patent number 6,476,387
- Issue date Nov 5, 2002
- Hitachi, Ltd.
- Norimasa Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for inspecting or measuring a sample based on...
- Patent number 6,465,781
- Issue date Oct 15, 2002
- Hitachi, Ltd.
- Norimasa Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern forming method using charged particle beam process and char...
- Patent number 6,344,115
- Issue date Feb 5, 2002
- Hitachi, Ltd.
- Junzou Azuma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and its apparatus for detecting a secondary electron beam im...
- Patent number 6,303,932
- Issue date Oct 16, 2001
- Hitachi, Ltd.
- Yuichi Hamamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern forming method using charged particle beam process and char...
- Patent number 5,976,328
- Issue date Nov 2, 1999
- Hitachi, Ltd.
- Junzou Azuma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for judging milling end point for use in charged...
- Patent number 5,952,658
- Issue date Sep 14, 1999
- Hitachi, Ltd.
- Akira Shimase
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
IC wiring connecting method using focused energy beams
- Patent number 5,824,598
- Issue date Oct 20, 1998
- Hitachi, Ltd.
- Hiroshi Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing method and apparatus using focused ion beam generating m...
- Patent number 5,825,035
- Issue date Oct 20, 1998
- Hitachi, Ltd.
- Michinobu Mizumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing method and apparatus using focused energy beam
- Patent number 5,683,547
- Issue date Nov 4, 1997
- Hitachi, Ltd.
- Junzou Azuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for making specimen and apparatus thereof
- Patent number 5,656,811
- Issue date Aug 12, 1997
- Hitachi, Ltd.
- Fumikazu Itoh
- G01 - MEASURING TESTING
Information Patent Grant
Process method and apparatus using focused ion beam generating means
- Patent number 5,583,344
- Issue date Dec 10, 1996
- Hitachi, Ltd.
- Michinobu Mizumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process method and apparatus using focused ion beam generating means
- Patent number 5,504,340
- Issue date Apr 2, 1996
- Hitachi, Ltd.
- Michinobu Mizumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
IC wiring connecting method and apparatus
- Patent number 5,497,034
- Issue date Mar 5, 1996
- Hitachi, Ltd.
- Hiroshi Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
IC wiring connecting method and apparatus
- Patent number 5,472,507
- Issue date Dec 5, 1995
- Hitachi, Ltd.
- Hiroshi Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of processing a sample using a charged beam and reactive gas...
- Patent number 5,447,614
- Issue date Sep 5, 1995
- Hitachi, Ltd.
- Yuuichi Hamamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical mask and method of correcting the same
- Patent number 5,439,763
- Issue date Aug 8, 1995
- Hitachi, Ltd.
- Akira Shimase
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase shift mask, method of correcting the same and apparatus for c...
- Patent number 5,358,806
- Issue date Oct 25, 1994
- Hitachi, Ltd.
- Satoshi Haraichi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for processing a sample using a charged beam and reactive...
- Patent number 5,342,448
- Issue date Aug 30, 1994
- Hitachi, Ltd.
- Yuuichi Hamamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Combination apparatus having a scanning electron microscope therein
- Patent number 5,229,607
- Issue date Jul 20, 1993
- Hitachi, Ltd.
- Hironobu Matsui
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Ion beam processing method and apparatus
- Patent number 5,223,109
- Issue date Jun 29, 1993
- Hitachi, Ltd.
- Fumikazu Itoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of etching a semiconductor device by an ion beam
- Patent number 5,086,015
- Issue date Feb 4, 1992
- Hitachi, Ltd.
- Fumikazu Itoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multilayered device micro etching method and system
- Patent number 5,055,696
- Issue date Oct 8, 1991
- Hitachi, Ltd.
- Satoshi Haraichi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of providing a semiconductor IC device with an additional co...
- Patent number 5,026,664
- Issue date Jun 25, 1991
- Hitachi, Ltd.
- Mikio Hongo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for correcting defects of X-ray mask
- Patent number 4,933,565
- Issue date Jun 12, 1990
- Hitachi, Ltd.
- Hiroshi Yamaguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Manufacturing method of semiconductor integrated circuit device and...
- Publication number 20070190671
- Publication date Aug 16, 2007
- Masayoshi Okamoto
- G01 - MEASURING TESTING
Information Patent Application
Probe driving method, and probe apparatus
- Publication number 20050269511
- Publication date Dec 8, 2005
- Satoshi Tomimatsu
- G01 - MEASURING TESTING
Information Patent Application
Manufacturing method of semiconductor integrated circuit device and...
- Publication number 20050227383
- Publication date Oct 13, 2005
- Masayoshi Okamoto
- G01 - MEASURING TESTING
Information Patent Application
Probe driving method, and probe apparatus
- Publication number 20030184332
- Publication date Oct 2, 2003
- Satoshi Tomimatsu
- G01 - MEASURING TESTING

Akira Shimase

Person

Patents Grantslast 30 patents

Manufacturing method of semiconductor integrated circuit device and...

Probe driving method, and probe apparatus

Manufacturing method of semiconductor integrated circuit device and...

Probe driving method, and probe apparatus

Method of making wiring and logic corrections on a semiconductor de...

Sample processing apparatus and method for removing charge on sampl...

Method and apparatus for observing or processing and analyzing usin...

Method and apparatus for inspecting or measuring a sample based on...

Pattern forming method using charged particle beam process and char...

Method and its apparatus for detecting a secondary electron beam im...

Pattern forming method using charged particle beam process and char...

Method and system for judging milling end point for use in charged...

IC wiring connecting method using focused energy beams

Processing method and apparatus using focused ion beam generating m...

Processing method and apparatus using focused energy beam

Method for making specimen and apparatus thereof

Process method and apparatus using focused ion beam generating means

Process method and apparatus using focused ion beam generating means

IC wiring connecting method and apparatus

IC wiring connecting method and apparatus

Method of processing a sample using a charged beam and reactive gas...

Optical mask and method of correcting the same

Phase shift mask, method of correcting the same and apparatus for c...

Apparatus for processing a sample using a charged beam and reactive...

Combination apparatus having a scanning electron microscope therein

Ion beam processing method and apparatus

Method of etching a semiconductor device by an ion beam

Multilayered device micro etching method and system

Method of providing a semiconductor IC device with an additional co...

Method and apparatus for correcting defects of X-ray mask

Patents Applicationslast 30 patents

Manufacturing method of semiconductor integrated circuit device and...

Probe driving method, and probe apparatus

Manufacturing method of semiconductor integrated circuit device and...

Probe driving method, and probe apparatus