Number | Date | Country | Kind |
---|---|---|---|
10-077719 | Mar 1998 | JP |
Number | Name | Date | Kind |
---|---|---|---|
4705951 | Layman et al. | Nov 1987 | A |
4745287 | Truner | May 1988 | A |
5751537 | Kumar | May 1998 | A |
6033482 | Parkhe | Mar 2000 | A |
Number | Date | Country |
---|---|---|
A-57-170526 | Oct 1982 | JP |
A-58-106827 | Jun 1983 | JP |
A-59-172232 | Sep 1984 | JP |
A-63-133640 | Jun 1988 | JP |
A-64-59811 | Mar 1989 | JP |
A-1-119668 | May 1989 | JP |
A-1-194256 | Aug 1989 | JP |
A-1-243449 | Sep 1989 | JP |
A-2-15552 | Jan 1990 | JP |
A-4-152519 | May 1992 | JP |
A-6-120329 | Aug 1992 | JP |
A-7-45693 | Jul 1993 | JP |
A-5-275517 | Oct 1993 | JP |
A-7-134968 | May 1995 | JP |
Entry |
---|
“Cooperation Development of Electrostatic Floating chuck” by Kyocera Corporation, Nov. 27, 1996. |