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Akira Tokui
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Hyogo, JP
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last 30 patents
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Patent Grant
Photomask and pattern transfer method for transferring a pattern on...
Patent number
5,384,218
Issue date
Jan 24, 1995
Mitsubishi Denki Kabushiki Kaisha
Akira Tokui
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for inspecting a phase shift mask
Patent number
5,270,796
Issue date
Dec 14, 1993
Mitsubishi Denki Kabushiki Kaisha
Akira Tokui
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of forming minute patterns using positive chemically amplify...
Patent number
5,258,266
Issue date
Nov 2, 1993
Mitsubishi Denki Kabushiki Kaisha
Akira Tokui
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of forming minute patterns using chemically amplifying type...
Patent number
5,158,861
Issue date
Oct 27, 1992
Mitsubishi Denki Kabushiki Kaisha
Akira Tokui
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY