Alan F. Morrison

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method for constructing a film on a semiconductor wafer
- Patent number 6,699,530
- Issue date Mar 2, 2004
- Applied Materials, Inc.
- Michal Danek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etch chamber
- Patent number 6,270,621
- Issue date Aug 7, 2001
- Applied Materials, Inc.
- Simon W. Tam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for constructing an oxidized film on a semiconductor wafer
- Patent number 6,155,198
- Issue date Dec 5, 2000
- Applied Materials, Inc.
- Michael Danek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etch chamber
- Patent number 6,123,864
- Issue date Sep 26, 2000
- Applied Materials, Inc.
- Simon W. Tam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical vapor deposition chamber
- Patent number 6,103,014
- Issue date Aug 15, 2000
- Applied Materials, Inc.
- Lawrence Chung-Lai Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition chamber
- Patent number 5,935,338
- Issue date Aug 10, 1999
- Applied Materials, Inc.
- Lawrence Chung-Lai Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heater with shadow ring and purge above wafer surface
- Patent number 5,888,304
- Issue date Mar 30, 1999
- Applied Materials, Inc.
- Salvador P. Umotoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition chamber
- Patent number 5,882,419
- Issue date Mar 16, 1999
- Applied Materials, Inc.
- Ashok Sinha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition of a thin film onto a substrate
- Patent number 5,856,240
- Issue date Jan 5, 1999
- Applied Materials, Inc.
- Ashok Sinha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support shield in wafer processing reactors
- Patent number 5,855,687
- Issue date Jan 5, 1999
- Applied Materials, Inc.
- Dale R. DuBois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Removable ring for controlling edge deposition in substrate process...
- Patent number 5,766,365
- Issue date Jun 16, 1998
- Applied Materials, Inc.
- Salvador P. Umotoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition chamber
- Patent number 5,695,568
- Issue date Dec 9, 1997
- Applied Materials, Inc.
- Ashok Sinha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Resistance heated stem mounted aluminum susceptor assembly
- Patent number 5,688,331
- Issue date Nov 18, 1997
- Applied Materisls, Inc.
- Michio Aruga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition chamber with a purge guide
- Patent number 5,516,367
- Issue date May 14, 1996
- Applied Materials, Inc.
- Lawrence C. Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compound clamp ring for semiconductor wafers
- Patent number 5,421,401
- Issue date Jun 6, 1995
- Applied Materials, Inc.
- Semyon Sherstinsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lift fingers for substrate processing apparatus
- Patent number 5,332,443
- Issue date Jul 26, 1994
- Applied Materials, Inc.
- Sandy M.-S. Chew
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Chamber for constructing a film on a semiconductor wafer
- Publication number 20040099215
- Publication date May 27, 2004
- APPLIED MATERIALS, INC.
- Michal Danek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER FOR CONSTRUCTING A FILM ON A SEMICONDUCTOR WAFER
- Publication number 20020001976
- Publication date Jan 3, 2002
- MICHAL DANEK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Alan F. Morrison

Person

Patents Grantslast 30 patents

Method for constructing a film on a semiconductor wafer

Etch chamber

Apparatus for constructing an oxidized film on a semiconductor wafer

Etch chamber

Chemical vapor deposition chamber

Chemical vapor deposition chamber

Heater with shadow ring and purge above wafer surface

Chemical vapor deposition chamber

Chemical vapor deposition of a thin film onto a substrate

Substrate support shield in wafer processing reactors

Removable ring for controlling edge deposition in substrate process...

Chemical vapor deposition chamber

Resistance heated stem mounted aluminum susceptor assembly

Chemical vapor deposition chamber with a purge guide

Compound clamp ring for semiconductor wafers

Lift fingers for substrate processing apparatus

Patents Applicationslast 30 patents

Chamber for constructing a film on a semiconductor wafer

CHAMBER FOR CONSTRUCTING A FILM ON A SEMICONDUCTOR WAFER