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Alex Ka Tim Poon
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San Ramon, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Dual valve fluid actuator assembly
Patent number
11,092,170
Issue date
Aug 17, 2021
NIKON CORPORATION
Alex Ka Tim Poon
F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information
Patent Grant
Apparatus and method for providing fluid for immersion lithography
Patent number
10,203,610
Issue date
Feb 12, 2019
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for providing fluid for immersion lithography
Patent number
9,817,319
Issue date
Nov 14, 2017
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for providing fluid for immersion lithography
Patent number
9,547,243
Issue date
Jan 17, 2017
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method to control vacuum at porous material using mul...
Patent number
9,329,492
Issue date
May 3, 2016
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for providing fluid for immersion lithography
Patent number
9,285,683
Issue date
Mar 15, 2016
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and methods for keeping immersion fluid adjacent to an op...
Patent number
9,217,933
Issue date
Dec 22, 2015
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Immersion lithography apparatus and method having movable liquid di...
Patent number
9,176,394
Issue date
Nov 3, 2015
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and methods for recovering fluid in immersion lithography
Patent number
8,934,080
Issue date
Jan 13, 2015
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for providing fluid for immersion lithography
Patent number
8,896,807
Issue date
Nov 25, 2014
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for recovering liquid droplets in immersion li...
Patent number
8,780,323
Issue date
Jul 15, 2014
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and methods for keeping immersion fluid adjacent to an op...
Patent number
8,743,343
Issue date
Jun 3, 2014
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method to control vacuum at porous material using mul...
Patent number
8,634,055
Issue date
Jan 21, 2014
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Immersion lithography apparatus and method having movable liquid di...
Patent number
8,610,873
Issue date
Dec 17, 2013
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for providing fluid for immersion lithography
Patent number
8,520,187
Issue date
Aug 27, 2013
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method to control vacuum at porous material using mul...
Patent number
8,477,284
Issue date
Jul 2, 2013
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and methods for keeping immersion fluid adjacent to an op...
Patent number
8,400,610
Issue date
Mar 19, 2013
Nikon Corporation
Alex Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and methods for keeping immersion fluid adjacent to an op...
Patent number
8,237,911
Issue date
Aug 7, 2012
Nikon Corporation
Alex Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Positioning device and exposure apparatus including the same
Patent number
6,791,669
Issue date
Sep 14, 2004
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reticle stage with reaction force cancellation
Patent number
6,597,435
Issue date
Jul 22, 2003
Nikon Corporation
Alex K Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
High performance stage assembly
Patent number
6,281,655
Issue date
Aug 28, 2001
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
EXPANDABLE BARRIER ACTUATED VALVE
Publication number
20220057017
Publication date
Feb 24, 2022
Alex Ka Tim Poon
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
DUAL VALVE FLUID ACTUATOR ASSEMBLY
Publication number
20190376531
Publication date
Dec 12, 2019
Nikon Corporation
Alex Ka Tim Poon
F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information
Patent Application
APPARATUS AND METHOD FOR PROVIDING FLUID FOR IMMERSION LITHOGRAPHY
Publication number
20190137888
Publication date
May 9, 2019
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS AND METHOD FOR PROVIDING FLUID FOR IMMERSION LITHOGRAPHY
Publication number
20180039187
Publication date
Feb 8, 2018
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS AND METHOD FOR PROVIDING FLUID FOR IMMERSION LITHOGRAPHY
Publication number
20170108784
Publication date
Apr 20, 2017
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS AND METHOD FOR PROVIDING FLUID FOR IMMERSION LITHOGRAPHY
Publication number
20150036113
Publication date
Feb 5, 2015
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS AND METHODS FOR KEEPING IMMERSION FLUID ADJACENT TO AN OP...
Publication number
20140232999
Publication date
Aug 21, 2014
Nikon Corporation
Alex Ka Tim POON
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMMERSION LITHOGRAPHY APPARATUS AND METHOD HAVING MOVABLE LIQUID DI...
Publication number
20140071412
Publication date
Mar 13, 2014
Nikon Corporation
Alex Ka Tim POON
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS AND METHOD FOR PROVIDING FLUID FOR IMMERSION LITHOGRAPHY
Publication number
20130301015
Publication date
Nov 14, 2013
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS AND METHOD TO CONTROL VACUUM AT POROUS MATERIAL USING MUL...
Publication number
20130286366
Publication date
Oct 31, 2013
Alex Ka Tim POON
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS AND METHODS FOR KEEPING IMMERSION FLUID ADJACENT TO AN OP...
Publication number
20130141702
Publication date
Jun 6, 2013
Nikon Corporation
Alex Ka Tim POON
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MODULAR COIL ARRAYS FOR PLANAR AND LINEAR MOTORS
Publication number
20130069449
Publication date
Mar 21, 2013
Nikon Corporation
Michel Pharand
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
Apparatus and methods for recovering fluid in immersion lithography
Publication number
20080043211
Publication date
Feb 21, 2008
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Apparatus and Method for Providing Fluid for Immersion Lithography
Publication number
20070222967
Publication date
Sep 27, 2007
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Apparatus and method for providing fluid for immersion lithography
Publication number
20070195303
Publication date
Aug 23, 2007
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Force provider with adjustable force characteristics for a stage as...
Publication number
20070131879
Publication date
Jun 14, 2007
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Apparatus and method for containing immersion liquid in immersion l...
Publication number
20070126999
Publication date
Jun 7, 2007
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Apparatus and method for recovering liquid droplets in immersion li...
Publication number
20070091289
Publication date
Apr 26, 2007
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Apparatus and method for recovering fluid for immersion lithography
Publication number
20070046910
Publication date
Mar 1, 2007
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Apparatus and method for providing fluid for immersion lithography
Publication number
20060152697
Publication date
Jul 13, 2006
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Non-contact pneumatic transfer for stages with small motion
Publication number
20060050262
Publication date
Mar 9, 2006
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Force provider for a mover assembly of a stage assembly
Publication number
20050169784
Publication date
Aug 4, 2005
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Stage with isolated actuators for low vacuum environment
Publication number
20050093502
Publication date
May 5, 2005
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
System and method for measuring displacement of a stage
Publication number
20050012918
Publication date
Jan 20, 2005
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MODULAR STAGE WITH REACTION FORCE CANCELLATION
Publication number
20040165172
Publication date
Aug 26, 2004
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Double isolation fine stage
Publication number
20040119964
Publication date
Jun 24, 2004
NIKON CORPORATION
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Chamber assembly for an exposure apparatus
Publication number
20020159042
Publication date
Oct 31, 2002
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Positioning device and exposure apparatus including the same
Publication number
20020149758
Publication date
Oct 17, 2002
NIKON CORPORATION
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
High performance stage assembly
Publication number
20010045810
Publication date
Nov 29, 2001
Alex Ka Tim Poon
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC