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METHODS FOR REMOVAL OF HARD MASK
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Publication number 20180190537
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Publication date Jul 5, 2018
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GLOBALFOUNDRIES SINGAPORE PTE. LTD.
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H01 - BASIC ELECTRIC ELEMENTS
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SLOT DESIGNS IN WIDE METAL LINES
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Publication number 20160233157
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Publication date Aug 11, 2016
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GLOBALFOUNDRIES SINGAPORE PTE. LTD.
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Yeow Kheng LIM
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H01 - BASIC ELECTRIC ELEMENTS
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THROUGH SILICON VIAS
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Publication number 20160190066
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Publication date Jun 30, 2016
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GLOBALFOUNDRIES SINGAPORE PTE. LTD.
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Benfu LIN
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H01 - BASIC ELECTRIC ELEMENTS
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CMP HEAD STRUCTURE
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Publication number 20160136781
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Publication date May 19, 2016
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GLOBALFOUNDRIES SINGAPORE PTE. LTD.
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Benfu LIN
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B24 - GRINDING POLISHING
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CMP HEAD STRUCTURE
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Publication number 20160136774
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Publication date May 19, 2016
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GLOBALFOUNDRIES SINGAPORE PTE. LTD.
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Benfu LIN
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B24 - GRINDING POLISHING
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PLANAR PASSIVATION FOR PADS
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Publication number 20160118355
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Publication date Apr 28, 2016
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GLOBALFOUNDRIES SINGAPORE PTE. LTD.
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Benfu LIN
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H01 - BASIC ELECTRIC ELEMENTS
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ISOLATION FOR EMBEDDED DEVICES
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Publication number 20150279743
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Publication date Oct 1, 2015
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GLOBALFOUNDRIES SINGAPORE PTE. LTD.
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Liang LI
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H01 - BASIC ELECTRIC ELEMENTS
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CMP HEAD STRUCTURE
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Publication number 20150111467
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Publication date Apr 23, 2015
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GLOBALFOUNDRIES SINGAPORE PTE. LTD.
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Benfu LIN
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B24 - GRINDING POLISHING
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CMP HEAD STRUCTURE
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Publication number 20150111469
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Publication date Apr 23, 2015
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GLOBALFOUNDRIES SINGAPORE PTE. LTD.
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Benfu LIN
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B24 - GRINDING POLISHING
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CD CONTROL
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Publication number 20140374920
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Publication date Dec 25, 2014
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Zheng ZOU
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H01 - BASIC ELECTRIC ELEMENTS
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THROUGH SILICON VIAS
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Publication number 20140264911
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Publication date Sep 18, 2014
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GLOBALFOUNDRIES SINGAPORE PTE. LTD.
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H01 - BASIC ELECTRIC ELEMENTS
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STI CMP UNDER POLISH MONITORING
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Publication number 20140234993
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Publication date Aug 21, 2014
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GLOBALFOUNDRIES SINGAPORE PTE. LTD.
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Liang LI
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G01 - MEASURING TESTING
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FILAMENT FREE SILICIDE FORMATION
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Publication number 20140167121
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Publication date Jun 19, 2014
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GLOBALFOUNDRIES SINGAPORE PTE. LTD.
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Kwee Liang YEO
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H01 - BASIC ELECTRIC ELEMENTS
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CD CONTROL
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Publication number 20140110855
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Publication date Apr 24, 2014
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GLOBALFOUNDRIES SINGAPORE PTE. LTD.
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Zheng ZOU
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H01 - BASIC ELECTRIC ELEMENTS
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