Amit KHANDELWAL

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for variable substrate temperature control
- Patent number 9,783,889
- Issue date Oct 10, 2017
- Applied Materials, Inc.
- Gwo-Chuan Tzu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of reducing tungsten film roughness and resistivity
- Patent number 9,546,419
- Issue date Jan 17, 2017
- Applied Materials, Inc.
- Amit Khandelwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment of film for impurity removal
- Patent number 9,275,865
- Issue date Mar 1, 2016
- Applied Materials, Inc.
- Benjamin C. Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for thermal based substrate processing with v...
- Patent number 8,920,564
- Issue date Dec 30, 2014
- Applied Materials, Inc.
- Gwo-Chuan Tzu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for forming cobalt and cobalt silicide materials in tungste...
- Patent number 8,563,424
- Issue date Oct 22, 2013
- Applied Materials, Inc.
- Seshadri Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ammonia-based plasma treatment for metal fill in narrow features
- Patent number 8,551,880
- Issue date Oct 8, 2013
- Applied Materials, Inc.
- Bencherki Mebarki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atomic layer deposition of tungsten materials
- Patent number 8,513,116
- Issue date Aug 20, 2013
- Applied Materials, Inc.
- Amit Khandelwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition of tungsten materials
- Patent number 8,211,799
- Issue date Jul 3, 2012
- Applied Materials, Inc.
- Amit Khandelwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for forming cobalt and cobalt silicide materials in tungste...
- Patent number 8,187,970
- Issue date May 29, 2012
- Applied Materials, Inc.
- Seshadri Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing tungsten film with reduced resistivity and imp...
- Patent number 8,071,478
- Issue date Dec 6, 2011
- Applied Materials, Inc.
- Kai Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition of tungsten materials
- Patent number 7,964,505
- Issue date Jun 21, 2011
- Applied Materials, Inc.
- Amit Khandelwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition and densification process for titanium nitride barrier l...
- Patent number 7,838,441
- Issue date Nov 23, 2010
- Applied Materials, Inc.
- Amit Khandelwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for depositing tungsten layers employing atomic layer depos...
- Patent number 7,745,333
- Issue date Jun 29, 2010
- Applied Materials, Inc.
- Ken Kaung Lai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition of tungsten materials
- Patent number 7,732,327
- Issue date Jun 8, 2010
- Applied Materials, Inc.
- Sang-Hyeob Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ruthenium or cobalt as an underlayer for tungsten film deposition
- Patent number 7,691,442
- Issue date Apr 6, 2010
- Applied Materials, Inc.
- Srinivas Gandikota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition and densification process for titanium nitride barrier l...
- Patent number 7,521,379
- Issue date Apr 21, 2009
- Applied Materials, Inc.
- Amit Khandelwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Contact metallization scheme using a barrier layer over a silicide...
- Patent number 7,514,353
- Issue date Apr 7, 2009
- Applied Materials, Inc.
- Timothy W. Weidman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ruthenium as an underlayer for tungsten film deposition
- Patent number 7,429,402
- Issue date Sep 30, 2008
- Applied Materials, Inc.
- Srinivas Gandikota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing tungsten layers employing atomic layer depos...
- Patent number 7,405,158
- Issue date Jul 29, 2008
- Applied Materials, Inc.
- Ken Kaung Lai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
TUNGSTEN DEPOSITION SEQUENCE
- Publication number 20140273451
- Publication date Sep 18, 2014
- Benjamin C. Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF REDUCING TUNGSTEN FILM ROUGHNESS AND RESISTIVITY
- Publication number 20140147589
- Publication date May 29, 2014
- Applied Materials, Inc.
- AMIT KHANDELWAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA TREATMENT OF FILM FOR IMPURITY REMOVAL
- Publication number 20140120700
- Publication date May 1, 2014
- Benjamin C. WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR VARIABLE SUBSTRATE TEMPERATURE CONTROL
- Publication number 20130247826
- Publication date Sep 26, 2013
- Applied Materials, Inc.
- GWO-CHUAN TZU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION OF TUNGSTEN MATERIALS
- Publication number 20120244699
- Publication date Sep 27, 2012
- Applied Materials, Inc.
- AMIT KHANDELWAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR FORMING COBALT AND COBALT SILICIDE MATERIALS IN TUNGSTE...
- Publication number 20120214303
- Publication date Aug 23, 2012
- SESHADRI GANGULI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING TUNGSTEN-CONTAINING LAYERS
- Publication number 20120003833
- Publication date Jan 5, 2012
- Applied Materials, Inc.
- AMIT KHANDELWAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR THERMAL BASED SUBSTRATE PROCESSING WITH V...
- Publication number 20120003388
- Publication date Jan 5, 2012
- Applied Materials, Inc.
- GWO-CHUAN TZU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION OF TUNGSTEN MATERIALS
- Publication number 20110244682
- Publication date Oct 6, 2011
- Amit Khandelwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR FORMING COBALT AND COBALT SILICIDE MATERIALS IN TUNGSTE...
- Publication number 20110086509
- Publication date Apr 14, 2011
- SESHADRI GANGULI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING TUNGSTEN FILM WITH REDUCED RESISTIVITY AND IMP...
- Publication number 20100167527
- Publication date Jul 1, 2010
- Applied Materials, Inc.
- Kai Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION AND DENSIFICATION PROCESS FOR TITANIUM NITRIDE BARRIER L...
- Publication number 20090280640
- Publication date Nov 12, 2009
- Applied Materials Incorporated
- AMIT KHANDELWAL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RUTHENIUM AS AN UNDERLAYER FOR TUNGSTEN FILM DEPOSITION
- Publication number 20090142474
- Publication date Jun 4, 2009
- Srinivas Gandikota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION OF TUNGSTEN MATERIALS
- Publication number 20090081866
- Publication date Mar 26, 2009
- SANG-HYEOB LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION OF TUNGSTEN MATERIALS
- Publication number 20090053893
- Publication date Feb 26, 2009
- Amit Khandelwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR FORMING COBALT AND COBALT SILICIDE MATERIALS IN TUNGSTE...
- Publication number 20090004850
- Publication date Jan 1, 2009
- SESHADRI GANGULI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING TUNGSTEN LAYERS EMPLOYING ATOMIC LAYER DEPOS...
- Publication number 20080280438
- Publication date Nov 13, 2008
- Ken Kaung Lai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR FORMING COBALT AND COBALT SILICIDE MATERIALS IN COPPER...
- Publication number 20080268635
- Publication date Oct 30, 2008
- Sang-Ho Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION AND DENSIFICATION PROCESS FOR TITANIUM NITRIDE BARRIER L...
- Publication number 20080085611
- Publication date Apr 10, 2008
- AMIT KHANDELWAL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Contact metallization scheme using a barrier layer over a silicide...
- Publication number 20060251800
- Publication date Nov 9, 2006
- Timothy W. Weidman
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Ruthenium as an underlayer for tungsten film deposition
- Publication number 20060128150
- Publication date Jun 15, 2006
- APPLIED MATERIALS, INC.
- Srinivas Gandikota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for depositing tungsten layers employing atomic layer depos...
- Publication number 20060009034
- Publication date Jan 12, 2006
- Ken Kaung Lai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Amit KHANDELWAL

Person

Patents Grantslast 30 patents

Apparatus for variable substrate temperature control

Method of reducing tungsten film roughness and resistivity

Plasma treatment of film for impurity removal

Methods and apparatus for thermal based substrate processing with v...

Process for forming cobalt and cobalt silicide materials in tungste...

Ammonia-based plasma treatment for metal fill in narrow features

Atomic layer deposition of tungsten materials

Atomic layer deposition of tungsten materials

Process for forming cobalt and cobalt silicide materials in tungste...

Method of depositing tungsten film with reduced resistivity and imp...

Atomic layer deposition of tungsten materials

Deposition and densification process for titanium nitride barrier l...

Methods for depositing tungsten layers employing atomic layer depos...

Vapor deposition of tungsten materials

Ruthenium or cobalt as an underlayer for tungsten film deposition

Deposition and densification process for titanium nitride barrier l...

Contact metallization scheme using a barrier layer over a silicide...

Ruthenium as an underlayer for tungsten film deposition

Methods for depositing tungsten layers employing atomic layer depos...

Patents Applicationslast 30 patents

TUNGSTEN DEPOSITION SEQUENCE

METHOD OF REDUCING TUNGSTEN FILM ROUGHNESS AND RESISTIVITY

PLASMA TREATMENT OF FILM FOR IMPURITY REMOVAL

APPARATUS FOR VARIABLE SUBSTRATE TEMPERATURE CONTROL

ATOMIC LAYER DEPOSITION OF TUNGSTEN MATERIALS

PROCESS FOR FORMING COBALT AND COBALT SILICIDE MATERIALS IN TUNGSTE...

METHODS FOR FORMING TUNGSTEN-CONTAINING LAYERS

METHODS AND APPARATUS FOR THERMAL BASED SUBSTRATE PROCESSING WITH V...

ATOMIC LAYER DEPOSITION OF TUNGSTEN MATERIALS

PROCESS FOR FORMING COBALT AND COBALT SILICIDE MATERIALS IN TUNGSTE...

METHOD OF DEPOSITING TUNGSTEN FILM WITH REDUCED RESISTIVITY AND IMP...

DEPOSITION AND DENSIFICATION PROCESS FOR TITANIUM NITRIDE BARRIER L...

RUTHENIUM AS AN UNDERLAYER FOR TUNGSTEN FILM DEPOSITION

VAPOR DEPOSITION OF TUNGSTEN MATERIALS

ATOMIC LAYER DEPOSITION OF TUNGSTEN MATERIALS

PROCESS FOR FORMING COBALT AND COBALT SILICIDE MATERIALS IN TUNGSTE...

METHODS FOR DEPOSITING TUNGSTEN LAYERS EMPLOYING ATOMIC LAYER DEPOS...

PROCESS FOR FORMING COBALT AND COBALT SILICIDE MATERIALS IN COPPER...

DEPOSITION AND DENSIFICATION PROCESS FOR TITANIUM NITRIDE BARRIER L...

Contact metallization scheme using a barrier layer over a silicide...

Ruthenium as an underlayer for tungsten film deposition

Methods for depositing tungsten layers employing atomic layer depos...