Anatoly Shchemelinin

Person

Bozeman, MT, US

People

Patents Grantslast 30 patents

Information Patent Grant
High efficiency laser-sustained plasma light source with collection...
- Patent number 11,778,720
- Issue date Oct 3, 2023
- KLA Corporation
- Matthew Derstine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser sustained plasma light source with high pressure flow
- Patent number 11,450,521
- Issue date Sep 20, 2022
- KLA Corporation
- Anatoly Shchemelinin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Differential imaging for single-path optical wafer inspection
- Patent number 11,138,722
- Issue date Oct 5, 2021
- KLA-Tencor Corporation
- Anatoly Shchemelinin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Spectrometer for vacuum ultraviolet measurements in high-pressure e...
- Patent number 11,035,727
- Issue date Jun 15, 2021
- KLA Corporation
- Ilya Bezel
- G01 - MEASURING TESTING
Information Patent Grant
Plasma cell for providing VUV filtering in a laser-sustained plasma...
- Patent number 10,976,025
- Issue date Apr 13, 2021
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High efficiency laser-sustained plasma light source
- Patent number 10,887,974
- Issue date Jan 5, 2021
- KLA Corporation
- Matthew Derstine
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for pumping laser sustained plasma and enhancing...
- Patent number 10,714,327
- Issue date Jul 14, 2020
- KLA-Tencor Corporation
- Ilya Bezel
- G01 - MEASURING TESTING
Information Patent Grant
System and method for pumping laser sustained plasma with a frequen...
- Patent number 10,568,195
- Issue date Feb 18, 2020
- KLA-Tencor Corporation
- Ilya Bezel
- G02 - OPTICS
Information Patent Grant
System and method for separation of pump light and collected light...
- Patent number 10,520,741
- Issue date Dec 31, 2019
- KLA-Tencor Corporation
- Anatoly Shchemelinin
- G02 - OPTICS
Information Patent Grant
Continuous-wave laser-sustained plasma illumination source
- Patent number 10,381,216
- Issue date Aug 13, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser sustained plasma light source with graded absorption features
- Patent number 10,283,342
- Issue date May 7, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for laser-sustained plasma illumination
- Patent number 10,257,918
- Issue date Apr 9, 2019
- KLA-Tencor Corporation
- Anant Chimmalgi
- G01 - MEASURING TESTING
Information Patent Grant
System and method for electrodeless plasma ignition in laser-sustai...
- Patent number 10,244,613
- Issue date Mar 26, 2019
- KLA-Tencor Corporation
- Anant Chimmalgi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Continuous-wave laser-sustained plasma illumination source
- Patent number 10,217,625
- Issue date Feb 26, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems for providing illumination in optical metrology
- Patent number 10,203,247
- Issue date Feb 12, 2019
- KLA-Tencor Corporation
- Gregory R. Brady
- F21 - LIGHTING
Information Patent Grant
Continuous-wave laser-sustained plasma illumination source
- Patent number 10,163,620
- Issue date Dec 25, 2018
- KLA-Tencor Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for LADAR-based optic alignment and characterization
- Patent number 10,145,944
- Issue date Dec 4, 2018
- KLA-Tencor Corporation
- Anatoly Shchemelinin
- G01 - MEASURING TESTING
Information Patent Grant
Non-contact thermal measurements of VUV optics
- Patent number 10,139,283
- Issue date Nov 27, 2018
- KLA-Tencor Corporation
- Anatoly Shchemelinin
- G01 - MEASURING TESTING
Information Patent Grant
High power broadband light source
- Patent number 9,941,655
- Issue date Apr 10, 2018
- KLA-Tencor Corporation
- Anant Chimmalgi
- G02 - OPTICS
Information Patent Grant
Plasma cell for providing VUV filtering in a laser-sustained plasma...
- Patent number 9,927,094
- Issue date Mar 27, 2018
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for inhibiting VUV radiative emission of a laser-...
- Patent number 9,899,205
- Issue date Feb 20, 2018
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for controlling convective flow in a light-sustai...
- Patent number 9,887,076
- Issue date Feb 6, 2018
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for generating a light-sustained plasma in a flan...
- Patent number 9,775,226
- Issue date Sep 26, 2017
- KLA-Tencor Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Sub 200nm laser pumped homonuclear excimer lasers
- Patent number 9,735,534
- Issue date Aug 15, 2017
- KLA-Tencor Corporation
- Richard W. Solarz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for transverse pumping of laser-sustained plasma
- Patent number 9,723,703
- Issue date Aug 1, 2017
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Open plasma lamp for forming a light-sustained plasma
- Patent number 9,721,761
- Issue date Aug 1, 2017
- KLA-Tencor Corporation
- Lauren Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for separation of pump light and collected light...
- Patent number 9,709,811
- Issue date Jul 18, 2017
- KLA-Tencor Corporation
- Anatoly Shchemelinin
- G02 - OPTICS
Information Patent Grant
Method and system for controlling convection within a plasma cell
- Patent number 9,655,225
- Issue date May 16, 2017
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for inhibiting radiative emission of a laser-sust...
- Patent number 9,615,439
- Issue date Apr 4, 2017
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for imaging a sample with a laser sustained plasm...
- Patent number 9,558,858
- Issue date Jan 31, 2017
- KLA-Tencor Corporation
- David W. Shortt
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
FRICTIONLESS DESIGN OF HIGH-PRESSURE RECIRCULATION THERMO-PUMP
- Publication number 20240110549
- Publication date Apr 4, 2024
- KLA Corporation
- Anatoly Shchemelinin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER SUSTAINED PLASMA LIGHT SOURCE WITH HIGH PRESSURE FLOW
- Publication number 20210242009
- Publication date Aug 5, 2021
- KLA Corporation
- Anatoly Shchemelinin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...
- Publication number 20210231292
- Publication date Jul 29, 2021
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Efficiency Laser-Sustained Plasma Light Source
- Publication number 20210022233
- Publication date Jan 21, 2021
- KLA Corporation
- Matthew Derstine
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Differential Imaging For Single-Path Optical Wafer Inspection
- Publication number 20200202504
- Publication date Jun 25, 2020
- KLA-Tencor Corporation
- Anatoly Shchemelinin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System and Method for Pumping Laser Sustained Plasma with a Frequen...
- Publication number 20190373709
- Publication date Dec 5, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Pumping Laser Sustained Plasma and Enhancing...
- Publication number 20190287785
- Publication date Sep 19, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Spectrometer for Vacuum Ultraviolet Measurements in High-Pressure E...
- Publication number 20190285470
- Publication date Sep 19, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- G01 - MEASURING TESTING
Information Patent Application
Continuous-Wave Laser-Sustained Plasma Illumination Source
- Publication number 20190115203
- Publication date Apr 18, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...
- Publication number 20180172240
- Publication date Jun 21, 2018
- KLA-Tencor Corporation
- Ilya Bezel
- F21 - LIGHTING
Information Patent Application
System and Method for Inhibiting VUV Radiative Emission of a Laser-...
- Publication number 20170345639
- Publication date Nov 30, 2017
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Separation of Pump Light and Collected Light...
- Publication number 20170315369
- Publication date Nov 2, 2017
- KLA-Tencor Corporation
- Anatoly Shchemelinin
- G02 - OPTICS
Information Patent Application
Laser Sustained Plasma Light Source with Graded Absorption Features
- Publication number 20170164457
- Publication date Jun 8, 2017
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Non-Contact Thermal Measurements of VUV Optics
- Publication number 20170153145
- Publication date Jun 1, 2017
- KLA-Tencor Corporation
- Anatoly Shchemelinin
- G01 - MEASURING TESTING
Information Patent Application
Systems for Providing Illumination in Optical Metrology
- Publication number 20170146399
- Publication date May 25, 2017
- KLA-Tencor Corporation
- Gregory R. Brady
- G02 - OPTICS
Information Patent Application
System and Method for Electrodeless Plasma Ignition in Laser-Sustai...
- Publication number 20170150590
- Publication date May 25, 2017
- KLA-Tencor Corporation
- Anant Chimmalgi
- G02 - OPTICS
Information Patent Application
System and Method for Laser-Sustained Plasma Illumination
- Publication number 20170094765
- Publication date Mar 30, 2017
- KLA-Tencor Corporation
- Anant Chimmalgi
- G02 - OPTICS
Information Patent Application
High Efficiency Laser-Sustained Plasma Light Source
- Publication number 20160381776
- Publication date Dec 29, 2016
- KLA-Tencor Corporation
- Matthew Derstine
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and System for Controlling Convective Flow in a Light-Sustai...
- Publication number 20160322211
- Publication date Nov 3, 2016
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Continuous-Wave Laser-Sustained Plasma Illumination Source
- Publication number 20160268120
- Publication date Sep 15, 2016
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Inhibiting Radiative Emission of a Laser-Sust...
- Publication number 20160205758
- Publication date Jul 14, 2016
- KLA-Tencor Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Open Plasma Lamp for Forming a Light-Sustained Plasma
- Publication number 20160163516
- Publication date Jun 9, 2016
- KLA-Tencor Corporation
- Lauren Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Controlling Convection within a Plasma Cell
- Publication number 20160066402
- Publication date Mar 3, 2016
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Power Broadband Light Source
- Publication number 20150333471
- Publication date Nov 19, 2015
- KLA-Tencor Corporation
- Anant Chimmalgi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Open Plasma Lamp for Forming a Light-Sustained Plasma
- Publication number 20150279628
- Publication date Oct 1, 2015
- KLA-Tencor Corporation
- Lauren Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Transverse Pumping of Laser-Sustained Plasma
- Publication number 20150282288
- Publication date Oct 1, 2015
- KLA-Tencor Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Plasma Cell with Floating Flange
- Publication number 20150201483
- Publication date Jul 16, 2015
- KLA-Tencor Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUB 200NM LASER PUMPED HOMONUCLEAR EXCIMER LASERS
- Publication number 20150168847
- Publication date Jun 18, 2015
- KLA-Tencor Corporation
- Richard W. Solarz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Imaging a Sample with a Laser Sustained Plasm...
- Publication number 20150048741
- Publication date Feb 19, 2015
- KLA-Tencor Corporation
- David W. Shortt
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
System and Method for Separation of Pump Light and Collected Light...
- Publication number 20150049778
- Publication date Feb 19, 2015
- KLA-Tencor Corporation
- Anatoly Shchemelinin
- H01 - BASIC ELECTRIC ELEMENTS

Anatoly Shchemelinin

Person

Patents Grantslast 30 patents

High efficiency laser-sustained plasma light source with collection...

Laser sustained plasma light source with high pressure flow

Differential imaging for single-path optical wafer inspection

Spectrometer for vacuum ultraviolet measurements in high-pressure e...

Plasma cell for providing VUV filtering in a laser-sustained plasma...

High efficiency laser-sustained plasma light source

System and method for pumping laser sustained plasma and enhancing...

System and method for pumping laser sustained plasma with a frequen...

System and method for separation of pump light and collected light...

Continuous-wave laser-sustained plasma illumination source

Laser sustained plasma light source with graded absorption features

System and method for laser-sustained plasma illumination

System and method for electrodeless plasma ignition in laser-sustai...

Continuous-wave laser-sustained plasma illumination source

Systems for providing illumination in optical metrology

Continuous-wave laser-sustained plasma illumination source

System and method for LADAR-based optic alignment and characterization

Non-contact thermal measurements of VUV optics

High power broadband light source

Plasma cell for providing VUV filtering in a laser-sustained plasma...

System and method for inhibiting VUV radiative emission of a laser-...

Method and system for controlling convective flow in a light-sustai...

Method and system for generating a light-sustained plasma in a flan...

Sub 200nm laser pumped homonuclear excimer lasers

System and method for transverse pumping of laser-sustained plasma

Open plasma lamp for forming a light-sustained plasma

System and method for separation of pump light and collected light...

Method and system for controlling convection within a plasma cell

System and method for inhibiting radiative emission of a laser-sust...

System and method for imaging a sample with a laser sustained plasm...

Patents Applicationslast 30 patents

FRICTIONLESS DESIGN OF HIGH-PRESSURE RECIRCULATION THERMO-PUMP

LASER SUSTAINED PLASMA LIGHT SOURCE WITH HIGH PRESSURE FLOW

Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...

High Efficiency Laser-Sustained Plasma Light Source

Differential Imaging For Single-Path Optical Wafer Inspection

System and Method for Pumping Laser Sustained Plasma with a Frequen...

System and Method for Pumping Laser Sustained Plasma and Enhancing...

Spectrometer for Vacuum Ultraviolet Measurements in High-Pressure E...

Continuous-Wave Laser-Sustained Plasma Illumination Source

Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...

System and Method for Inhibiting VUV Radiative Emission of a Laser-...

System and Method for Separation of Pump Light and Collected Light...

Laser Sustained Plasma Light Source with Graded Absorption Features

Non-Contact Thermal Measurements of VUV Optics

Systems for Providing Illumination in Optical Metrology

System and Method for Electrodeless Plasma Ignition in Laser-Sustai...

System and Method for Laser-Sustained Plasma Illumination

High Efficiency Laser-Sustained Plasma Light Source

Method and System for Controlling Convective Flow in a Light-Sustai...

Continuous-Wave Laser-Sustained Plasma Illumination Source

System and Method for Inhibiting Radiative Emission of a Laser-Sust...

Open Plasma Lamp for Forming a Light-Sustained Plasma

Method and System for Controlling Convection within a Plasma Cell

High Power Broadband Light Source

Open Plasma Lamp for Forming a Light-Sustained Plasma

System and Method for Transverse Pumping of Laser-Sustained Plasma

Plasma Cell with Floating Flange

SUB 200NM LASER PUMPED HOMONUCLEAR EXCIMER LASERS

System and Method for Imaging a Sample with a Laser Sustained Plasm...

System and Method for Separation of Pump Light and Collected Light...