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Andrew Graham
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Redwood City, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Robust inertial sensors
Patent number
10,317,211
Issue date
Jun 11, 2019
Robert Bosch GmbH
Bongsang Kim
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS pressure sensor with multiple membrane electrodes
Patent number
10,183,857
Issue date
Jan 22, 2019
Robert Bosch GmbH
Andrew Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Combined pressure and humidity sensor
Patent number
10,184,910
Issue date
Jan 22, 2019
Robert Bosch GmbH
Gerhard Lammel
G01 - MEASURING TESTING
Information
Patent Grant
Trench based capacitive humidity sensor
Patent number
10,175,188
Issue date
Jan 8, 2019
Robert Bosch GmbH
Gary O'Brien
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Epi-poly etch stop for out of plane spacer defined electrode
Patent number
10,173,887
Issue date
Jan 8, 2019
Robert Bosch GmbH
Andrew Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
System and method for forming a buried lower electrode in conjuncti...
Patent number
10,160,632
Issue date
Dec 25, 2018
Robert Bosch GmbH
Andrew Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Resistive MEMS humidity sensor
Patent number
9,588,073
Issue date
Mar 7, 2017
Robert Bosch GmbH
Ando Feyh
G01 - MEASURING TESTING
Information
Patent Grant
MEMS device having a getter
Patent number
9,511,998
Issue date
Dec 6, 2016
Robert Bosch GmbH
Ashwin Samarao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor with an embedded thermistor for precise local temperature me...
Patent number
9,476,779
Issue date
Oct 25, 2016
Robert Bosch GmbH
Andrew Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Epi-poly etch stop for out of plane spacer defined electrode
Patent number
9,469,522
Issue date
Oct 18, 2016
Robert Bosch GmbH
Andrew Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Substrate with multiple encapsulated devices
Patent number
9,455,353
Issue date
Sep 27, 2016
Robert Bosch GmbH
Po-Jui Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Capacitive pressure sensor and method
Patent number
9,302,906
Issue date
Apr 5, 2016
Robert Bosch GmbH
Ando Feyh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS acoustic transducer with silicon nitride backplate and silicon...
Patent number
9,266,716
Issue date
Feb 23, 2016
Robert Bosch GmbH
Ando Feyh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Out-of-plane spacer defined electrode
Patent number
9,242,850
Issue date
Jan 26, 2016
Robert Bosch GmbH
Andrew B. Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Passivation layer for harsh environments and methods of fabrication...
Patent number
9,233,842
Issue date
Jan 12, 2016
Robert Bosch GmbH
Ando Lars Feyh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electronic device with an interlocking mold package
Patent number
9,159,637
Issue date
Oct 13, 2015
Robert Bosch GmbH
Ando Lars Feyh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Structured gap for a MEMS pressure sensor
Patent number
9,073,749
Issue date
Jul 7, 2015
Robert Bosch GmbH
Andrew B. Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Thin-film encapsulated infrared sensor
Patent number
9,064,982
Issue date
Jun 23, 2015
Robert Bosch GmbH
Fabian Purkl
G01 - MEASURING TESTING
Information
Patent Grant
Wafer with spacer including horizontal member
Patent number
8,933,535
Issue date
Jan 13, 2015
Robert Bosch GmbH
Andrew B. Graham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming membranes with modified stress characteristics
Patent number
8,906,730
Issue date
Dec 9, 2014
Robert Bosch GmbH
Andrew B. Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Wafer with recessed plug
Patent number
8,890,283
Issue date
Nov 18, 2014
Robert Bosch GmbH
Andrew B. Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS package or sensor package with intra-cap electrical via and me...
Patent number
8,878,314
Issue date
Nov 4, 2014
Robert Bosch GmbH
Andrew B. Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Pressure sensor with doped electrode
Patent number
8,749,000
Issue date
Jun 10, 2014
Robert Bosch GmbH
Andrew B. Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Out-of-plane spacer defined electrode
Patent number
8,673,756
Issue date
Mar 18, 2014
Robert Bosch GmbH
Andrew B. Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Wafer with recessed plug
Patent number
8,647,930
Issue date
Feb 11, 2014
Robert Bosch GmbH
Andrew B. Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of forming non-planar membranes using CMP
Patent number
8,580,691
Issue date
Nov 12, 2013
Robert Bosch GmbH
Andrew B. Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Wafer with spacer including horizontal member
Patent number
8,426,289
Issue date
Apr 23, 2013
Robert Bosch GmbH
Andrew B. Graham
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Epi-Poly Etch Stop for Out of Plane Spacer Defined Electrode
Publication number
20170297896
Publication date
Oct 19, 2017
ROBERT BOSCH GmbH
Andrew Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TRENCH BASED CAPACITIVE HUMIDITY SENSOR
Publication number
20170082567
Publication date
Mar 23, 2017
Robert Bosch GmbH
Gary O'Brien
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Robust Inertial Sensors
Publication number
20160327392
Publication date
Nov 10, 2016
ROBERT BOSCH GmbH
Bonsang Kim
G01 - MEASURING TESTING
Information
Patent Application
MEMS DEVICE HAVING A GETTER
Publication number
20160137493
Publication date
May 19, 2016
ROBERT BOSCH GmbH
Ashwin Samarao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Epi-Poly Etch Stop for Out of Plane Spacer Defined Electrode
Publication number
20160137485
Publication date
May 19, 2016
ROBERT BOSCH GmbH
Andrew Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Acoustic Transducer with Silicon Nitride Backplate and Silicon...
Publication number
20150274506
Publication date
Oct 1, 2015
ROBERT BOSCH GmbH
Ando Feyh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTRONIC DEVICE WITH AN INTERLOCKING MOLD PACKAGE
Publication number
20140264955
Publication date
Sep 18, 2014
ROBERT BOSCH GmbH
Ando Lars Feyh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PASSIVATION LAYER FOR HARSH ENVIRONMENTS AND METHODS OF FABRICATION...
Publication number
20140264781
Publication date
Sep 18, 2014
ROBERT BOSCH GmbH
Ando Lars Feyh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
THIN-FILM ENCAPSULATED INFRARED SENSOR
Publication number
20140248735
Publication date
Sep 4, 2014
ROBERT BOSCH GmbH
Fabian Purkl
G01 - MEASURING TESTING
Information
Patent Application
SURFACE CHARGE MITIGATION LAYER FOR MEMS SENSORS
Publication number
20140239421
Publication date
Aug 28, 2014
ROBERT BOSCH GmbH
Andrew Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPACITIVE PRESSURE SENSOR AND METHOD
Publication number
20140231939
Publication date
Aug 21, 2014
ROBERT BOSCH GmbH
Ando Feyh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Out-of-Plane Spacer Defined Electrode
Publication number
20140197713
Publication date
Jul 17, 2014
ROBERT BOSCH GmbH
Andrew B. Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Sensor With An Embedded Thermistor For Precise Local Temperature Me...
Publication number
20140169405
Publication date
Jun 19, 2014
ROBERT BOSCH GmbH
Andrew Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Resistive MEMS Humidity Sensor
Publication number
20140167791
Publication date
Jun 19, 2014
ROBERT BOSCH GmbH
Ando Feyh
G01 - MEASURING TESTING
Information
Patent Application
MEMS Pressure Sensor Assembly with Electromagnetic Shield
Publication number
20140150560
Publication date
Jun 5, 2014
ROBERT BOSCH GmbH
Gary O'Brien
G01 - MEASURING TESTING
Information
Patent Application
Structured Gap for a MEMS Pressure Sensor
Publication number
20140151822
Publication date
Jun 5, 2014
ROBERT BOSCH GmbH
Andrew B. Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Wafer with Recessed Plug
Publication number
20140151855
Publication date
Jun 5, 2014
ROBERT BOSCH GmbH
Andrew B. Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COMBINED PRESSURE AND HUMIDITY SENSOR
Publication number
20140116122
Publication date
May 1, 2014
ROBERT BOSCH TOOL CORPORATION
Gerhard Lammel
G01 - MEASURING TESTING
Information
Patent Application
SYSTEM AND METHOD FOR FORMING A BURIED LOWER ELECTRODE IN CONJUNCTI...
Publication number
20140054730
Publication date
Feb 27, 2014
ROBERT BOSCH GmbH
Andrew Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS PRESSURE SENSOR WITH MULTIPLE MEMBRANE ELECTRODES
Publication number
20140054731
Publication date
Feb 27, 2014
ROBERT BOSCH GmbH
Andrew Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Substrate with Multiple Encapsulated Devices
Publication number
20140035071
Publication date
Feb 6, 2014
ROBERT BOSCH GmbH
Po-Jui Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Wafer with Spacer including Horizontal Member
Publication number
20130234281
Publication date
Sep 12, 2013
ROBERT BOSCH GmbH
Andrew B. Graham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Pressure Sensor with Doped Electrode
Publication number
20130207208
Publication date
Aug 15, 2013
ROBERT BOSCH GmbH
Andrew B. Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF FORMING NON-PLANAR MEMBRANES USING CMP
Publication number
20120264301
Publication date
Oct 18, 2012
ROBERT BOSCH GmbH
Andrew B. Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF FORMING MEMBRANES WITH MODIFIED STRESS CHARACTERISTICS
Publication number
20120264250
Publication date
Oct 18, 2012
ROBERT BOSCH GmbH
Andrew B. Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Out-of-Plane Spacer Defined Electrode
Publication number
20120261822
Publication date
Oct 18, 2012
ROBERT BOSCH GmbH
Andrew B. Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Wafer with Spacer Including Horizontal Member
Publication number
20120261789
Publication date
Oct 18, 2012
ROBERT BOSCH GmbH
Andrew B. Graham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEMS PACKAGE OR SENSOR PACKAGE WITH INTRA-CAP ELECTRICAL VIA AND ME...
Publication number
20120261774
Publication date
Oct 18, 2012
ROBERT BOSCH GmbH
Andrew B. Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
WAFER WITH RECESSED PLUG
Publication number
20120261800
Publication date
Oct 18, 2012
ROBERT BOSCH GmbH
Andrew B. Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY