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Andrew John HARPHAM

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  • Copthorne, GB
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    VACUUM SYSTEM FOR IMMERSION PHOTOLITHOGRAPHY
    • Publication number 20190094715
    • Publication date Mar 28, 2019
    • ASML NETHERLANDS B.V.
    • Andrew John HARPHAM
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    VACUUM SYSTEM FOR IMMERSION PHOTOLITHOGRAPHY
    • Publication number 20180120715
    • Publication date May 3, 2018
    • ASML NETHERLANDS B.V.
    • Andrew John HARPHAM
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    VACUUM SYSTEM FOR IMMERSION PHOTOLITHOGRAPHY
    • Publication number 20170075233
    • Publication date Mar 16, 2017
    • ASML NETHERLANDS B.V.
    • Andrew John HARPHAM
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    VACUUM SYSTEM FOR IMMERSION PHOTOLITHOGRAPHY
    • Publication number 20140362358
    • Publication date Dec 11, 2014
    • ASML NETHERLANDS B.V.
    • Andrew John HARPHAM
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    VACUUM SYSTEM FOR IMMERSION PHOTOLITHOGRAPHY
    • Publication number 20110273681
    • Publication date Nov 10, 2011
    • ASML NETHERLANDS B.V.
    • Andrew John HARPHAM
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    VACUUM SYSTEM FOR IMMERSION PHOTOLITHOGRAPHY
    • Publication number 20090201471
    • Publication date Aug 13, 2009
    • ASML NETHERLANDS B.V.
    • Andrew John HARPHAM
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Treatment of effluent gases
    • Publication number 20060130649
    • Publication date Jun 22, 2006
    • Ravi Jain
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    Vacuum system for immersion photolithography
    • Publication number 20050282405
    • Publication date Dec 22, 2005
    • Andrew John Harpham
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY