Aniruddha Pal

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Seal for an assembly in a vapor deposition chamber
- Patent number D1027120
- Issue date May 14, 2024
- Applied Materials, Inc.
- Yao-Hung Yang
- D23 - Environmental heating and cooling
Information Patent Grant
Method and apparatus for substrate transfer and radical confinement
- Patent number 11,574,831
- Issue date Feb 7, 2023
- Applied Materials, Inc.
- Jared Ahmad Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multinode multi-use O-ring and method for forming a seal
- Patent number 11,359,722
- Issue date Jun 14, 2022
- Applied Materials, Inc.
- Shagun P. Maheshwari
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Abatement and strip process chamber in a dual loadlock configuration
- Patent number 11,177,136
- Issue date Nov 16, 2021
- APPLIED MATERIALS, INC.
- Jared Ahmad Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Abatement and strip process chamber in a dual load lock configuration
- Patent number 11,171,008
- Issue date Nov 9, 2021
- Applied Materials, Inc.
- Jared Ahmad Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of reclaiming a seal
- Patent number 11,090,893
- Issue date Aug 17, 2021
- Applied Materials, Inc.
- Shagun P. Maheshwari
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Cooling mechanism utilized in a plasma reactor with enhanced temper...
- Patent number 10,991,552
- Issue date Apr 27, 2021
- Applied Materials, Inc.
- Aniruddha Pal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for substrate transfer and radical confinement
- Patent number 10,468,282
- Issue date Nov 5, 2019
- Applied Materials, Inc.
- Jared Ahmad Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Abatement and strip process chamber in a dual loadlock configuration
- Patent number 10,453,694
- Issue date Oct 22, 2019
- Applied Materials, Inc.
- Jared Ahmad Lee
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Cooling mechanism utlized in a plasma reactor with enhanced tempera...
- Patent number 10,249,475
- Issue date Apr 2, 2019
- Applied Materials, Inc.
- Aniruddha Pal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin heated substrate support
- Patent number 10,204,805
- Issue date Feb 12, 2019
- Applied Materials, Inc.
- Imad Yousif
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for substrate transfer and radical confinement
- Patent number 10,090,181
- Issue date Oct 2, 2018
- Applied Materials, Inc.
- Jared Ahmad Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal management of edge ring in semiconductor processing
- Patent number 9,947,559
- Issue date Apr 17, 2018
- Applied Materials, Inc.
- Aniruddha Pal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for radial delivery of gas to a chamber and methods of us...
- Patent number 8,562,742
- Issue date Oct 22, 2013
- Applied Materials, Inc.
- Jared Ahmad Lee
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
CLAMPED DUAL-CHANNEL SHOWERHEAD
- Publication number 20230064637
- Publication date Mar 2, 2023
- Applied Materials, Inc.
- Kiran Shyam Honnavar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PLASMA SPRAYING SILICON CARBIDE COATINGS...
- Publication number 20230051800
- Publication date Feb 16, 2023
- Applied Materials, Inc.
- YIKAI CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND RADICAL CONFINEMENT
- Publication number 20200411350
- Publication date Dec 31, 2020
- Applied Materials, Inc.
- Jared Ahmad LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ABATEMENT AND STRIP PROCESS CHAMBER IN A DUAL LOADLOCK CONFIGURATION
- Publication number 20200126802
- Publication date Apr 23, 2020
- Appled Materials, Inc.
- Jared Ahmad LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF RECLAIMING A SEAL
- Publication number 20200079044
- Publication date Mar 12, 2020
- Applied Materials, Inc.
- Shagun P. MAHESHWARI
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND RADICAL CONFINEMENT
- Publication number 20200066563
- Publication date Feb 27, 2020
- Applied Materials, Inc.
- Jared Ahmad LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTINODE MULTI-USE O-RING AND METHOD FOR FORMING A SEAL
- Publication number 20200025292
- Publication date Jan 23, 2020
- Applied Materials, Inc.
- Shagun P. MAHESHWARI
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
ABATEMENT AND STRIP PROCESS CHAMBER IN A DUAL LOADLOCK CONFIGURATION
- Publication number 20200027742
- Publication date Jan 23, 2020
- Applied Materials, Inc.
- Jared Ahmad Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COOLING MECHANISM UTLIZED IN A PLASMA REACTOR WITH ENHANCED TEMPERA...
- Publication number 20190198295
- Publication date Jun 27, 2019
- Applied Materials, Inc.
- Aniruddha PAL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND RADICAL CONFINEMENT
- Publication number 20180247850
- Publication date Aug 30, 2018
- Applied Materials, Inc.
- Jared Ahmad LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN HEATED SUBSTRATE SUPPORT
- Publication number 20170040192
- Publication date Feb 9, 2017
- Applied Materials, Inc.
- Imad Yousif
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COOLING MECHANISM UTLIZED IN A PLASMA REACTOR WITH ENHANCED TEMPERA...
- Publication number 20150279634
- Publication date Oct 1, 2015
- Applied Materials, Inc.
- Aniruddha PAL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND RADICAL CONFINEMENT
- Publication number 20140087561
- Publication date Mar 27, 2014
- Applied Materials, Inc.
- Jared Ahmad Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN HEATED SUBSTRATE SUPPORT
- Publication number 20130334199
- Publication date Dec 19, 2013
- Applied Materials, Inc.
- Imad Yousif
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ABATEMENT AND STRIP PROCESS CHAMBER IN A DUAL LOADLOCK CONFIGURATION
- Publication number 20130337655
- Publication date Dec 19, 2013
- Applied Materials, Inc.
- Jared Ahmad Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL MANAGEMENT OF EDGE RING IN SEMICONDUCTOR PROCESSING
- Publication number 20130105088
- Publication date May 2, 2013
- Applied Materials, Inc.
- Aniruddha PAL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM CHAMBERS WITH SHARED PUMP
- Publication number 20120222813
- Publication date Sep 6, 2012
- Applied Materials, Inc.
- Aniruddha Pal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR RADIAL DELIVERY OF GAS TO A CHAMBER AND METHODS OF US...
- Publication number 20110265887
- Publication date Nov 3, 2011
- Applied Materials, Inc.
- JARED AHMAD LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR IMPROVING FLOW UNIFORMITY IN A PROCESS CH...
- Publication number 20100081284
- Publication date Apr 1, 2010
- Applied Materials, Inc.
- AJIT BALAKRISHNA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Aniruddha Pal

Person

Patents Grantslast 30 patents

Seal for an assembly in a vapor deposition chamber

Method and apparatus for substrate transfer and radical confinement

Multinode multi-use O-ring and method for forming a seal

Abatement and strip process chamber in a dual loadlock configuration

Abatement and strip process chamber in a dual load lock configuration

Method of reclaiming a seal

Cooling mechanism utilized in a plasma reactor with enhanced temper...

Method and apparatus for substrate transfer and radical confinement

Abatement and strip process chamber in a dual loadlock configuration

Cooling mechanism utlized in a plasma reactor with enhanced tempera...

Thin heated substrate support

Method and apparatus for substrate transfer and radical confinement

Thermal management of edge ring in semiconductor processing

Apparatus for radial delivery of gas to a chamber and methods of us...

Patents Applicationslast 30 patents

CLAMPED DUAL-CHANNEL SHOWERHEAD

METHODS AND APPARATUS FOR PLASMA SPRAYING SILICON CARBIDE COATINGS...

METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND RADICAL CONFINEMENT

ABATEMENT AND STRIP PROCESS CHAMBER IN A DUAL LOADLOCK CONFIGURATION

METHOD OF RECLAIMING A SEAL

METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND RADICAL CONFINEMENT

MULTINODE MULTI-USE O-RING AND METHOD FOR FORMING A SEAL

ABATEMENT AND STRIP PROCESS CHAMBER IN A DUAL LOADLOCK CONFIGURATION

COOLING MECHANISM UTLIZED IN A PLASMA REACTOR WITH ENHANCED TEMPERA...

METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND RADICAL CONFINEMENT

THIN HEATED SUBSTRATE SUPPORT

COOLING MECHANISM UTLIZED IN A PLASMA REACTOR WITH ENHANCED TEMPERA...

METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND RADICAL CONFINEMENT

THIN HEATED SUBSTRATE SUPPORT

ABATEMENT AND STRIP PROCESS CHAMBER IN A DUAL LOADLOCK CONFIGURATION

THERMAL MANAGEMENT OF EDGE RING IN SEMICONDUCTOR PROCESSING

VACUUM CHAMBERS WITH SHARED PUMP

APPARATUS FOR RADIAL DELIVERY OF GAS TO A CHAMBER AND METHODS OF US...

METHODS AND APPARATUS FOR IMPROVING FLOW UNIFORMITY IN A PROCESS CH...