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Anthony Sayka
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Austin, TX, US
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last 30 patents
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Patent Grant
Apparatus and method for cleaning a wafer
Patent number
6,766,813
Issue date
Jul 27, 2004
Board of Regents, The University of Texas System
Anthony Sayka
B08 - CLEANING
Information
Patent Grant
Apparatus for coating a workpiece with fluid contamination detection
Patent number
5,772,769
Issue date
Jun 30, 1998
VLSI Technology, Inc.
Anthony Sayka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical-fiber liquid-level monitor
Patent number
5,743,135
Issue date
Apr 28, 1998
VLSI Technology, Inc.
Anthony Sayka
G01 - MEASURING TESTING
Information
Patent Grant
Magnetic sensing robotics for automated semiconductor wafer process...
Patent number
5,668,452
Issue date
Sep 16, 1997
VLSI Technology, Inc.
Danine Villarreal
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Fusion heat sink for integrated circuit
Patent number
5,631,799
Issue date
May 20, 1997
VLSI Technology, Inc.
Anthony Sayka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for detecting contaminants carried by a fluid
Patent number
5,558,902
Issue date
Sep 24, 1996
VLSI Technology, Inc.
Anthony Sayka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for detecting contaminants carried by a fluid
Patent number
5,509,375
Issue date
Apr 23, 1996
VLSI Technology, Inc.
Anthony Sayka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fusion heat sink for integrated circuit
Patent number
5,477,409
Issue date
Dec 19, 1995
VLSI Technology Inc.
Anthony Sayka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal interconnect fabrication with dual plasma silicon dioxide dep...
Patent number
5,472,825
Issue date
Dec 5, 1995
VLSI Technology Inc.
Anthony Sayka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor wafer defect monitoring
Patent number
5,392,113
Issue date
Feb 21, 1995
VLSI Technology, Inc.
Anthony Sayka
G01 - MEASURING TESTING
Information
Patent Grant
Integrated circuit package including a heat pipe
Patent number
5,349,237
Issue date
Sep 20, 1994
VLSI Technology, Inc.
Anthony Sayka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Contaminant monitor for a flowing liquid
Patent number
5,313,818
Issue date
May 24, 1994
VLSI Technology, Inc.
Anthony Sayka
G01 - MEASURING TESTING
Information
Patent Grant
Electro-optic monitor for fluid spray pattern
Patent number
5,312,039
Issue date
May 17, 1994
VLSI Technology, Inc.
Anthony Sayka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor photolithography with superficial plasma etch
Patent number
5,310,621
Issue date
May 10, 1994
VLSI Technology, Inc.
Anthony Sayka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods of moisture protection in semiconductor devices utilizing p...
Patent number
5,284,801
Issue date
Feb 8, 1994
VLSI Technology, Inc.
Allen Page
H01 - BASIC ELECTRIC ELEMENTS