Armin Schoeppach

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Optical projection system
- Patent number 9,891,535
- Issue date Feb 13, 2018
- Carl Zeiss SMT GmbH
- Johannes Rau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical device having a deformable optical element
- Patent number 9,798,243
- Issue date Oct 24, 2017
- Carl Zeiss SMT GmbH
- Manfred Steinbach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Actuators and microlithography projection exposure systems and meth...
- Patent number 9,766,550
- Issue date Sep 19, 2017
- Carl Zeiss SMT GmbH
- Ulrich Weber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device for connecting an optical element to a frame
- Patent number 9,604,299
- Issue date Mar 28, 2017
- Carl Zeiss SMT GmbH
- Armin Schoeppach
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical projection system
- Patent number 9,557,653
- Issue date Jan 31, 2017
- Carl Zeiss SMT GmbH
- Johannes Rau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus for microlithography for the producti...
- Patent number 9,513,562
- Issue date Dec 6, 2016
- Carl Zeiss SMT GmbH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical arrangement and microlithographic projection exposure appar...
- Patent number 9,436,101
- Issue date Sep 6, 2016
- Carl Zeiss SMT GmbH
- Armin Schoeppach
- G02 - OPTICS
Information Patent Grant
Gravitation compensation for optical elements in projection exposur...
- Patent number 9,341,807
- Issue date May 17, 2016
- Carl Zeiss SMT GmbH
- Norbert Muehlberger
- G02 - OPTICS
Information Patent Grant
Optical device having a deformable optical element
- Patent number 9,217,936
- Issue date Dec 22, 2015
- Carl Zeiss SMT GmbH
- Manfred Steinbach
- G02 - OPTICS
Information Patent Grant
Microlithographic imaging optical system including multiple mirrors
- Patent number 9,195,145
- Issue date Nov 24, 2015
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Grant
Optical module with a measuring device
- Patent number 9,175,948
- Issue date Nov 3, 2015
- Carl Zeiss SMT GmbH
- Armin Schoeppach
- G01 - MEASURING TESTING
Information Patent Grant
Optical projection system
- Patent number 9,104,016
- Issue date Aug 11, 2015
- Carl Zeiss SMT GmbH
- Johannes Rau
- G02 - OPTICS
Information Patent Grant
Projection exposure apparatus for microlithography for the producti...
- Patent number 8,885,143
- Issue date Nov 11, 2014
- Carl Zeiss SMT GmbH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microlithographic imaging optical system including multiple mirrors
- Patent number 8,873,122
- Issue date Oct 28, 2014
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Grant
Holding device for an optical element in an objective
- Patent number 8,854,602
- Issue date Oct 7, 2014
- ASML Netherlands B.V.
- Bernhard Gellrich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gravitation compensation for optical elements in projection exposur...
- Patent number 8,854,603
- Issue date Oct 7, 2014
- Carl Zeiss SMT GmbH
- Norbert Muehlberger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical element
- Patent number 8,705,185
- Issue date Apr 22, 2014
- Carl Zeiss SMT GmbH
- Johannes Rau
- G02 - OPTICS
Information Patent Grant
Method and device for connecting an optical element to a frame
- Patent number 8,705,006
- Issue date Apr 22, 2014
- Carl Zeiss SMT GmbH
- Armin Schoeppach
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical system with an exchangeable, manipulable correction arrange...
- Patent number 8,659,745
- Issue date Feb 25, 2014
- Carl Zeiss SMT GmbH
- Guido Limbach
- G02 - OPTICS
Information Patent Grant
Optical system with an exchangeable, manipulable correction arrange...
- Patent number 8,542,346
- Issue date Sep 24, 2013
- Carl Zeiss SMT GmbH
- Guido Limbach
- G02 - OPTICS
Information Patent Grant
Holding arrangement for an optical element
- Patent number 8,508,868
- Issue date Aug 13, 2013
- Carl Zeiss SMT GmbH
- Ulrich Weber
- G02 - OPTICS
Information Patent Grant
Optical system having heat dissipation arrangement
- Patent number 8,456,615
- Issue date Jun 4, 2013
- Carl Zeiss Laser Optics GmbH
- Hubert Holderer
- G02 - OPTICS
Information Patent Grant
Temperature-control device for an optical assembly
- Patent number 8,339,569
- Issue date Dec 25, 2012
- Carl Zeiss SMT GmbH
- Armin Schoeppach
- G02 - OPTICS
Information Patent Grant
Optical projection system
- Patent number 8,300,210
- Issue date Oct 30, 2012
- Carl Zeiss SMT GmbH
- Johannes Rau
- G02 - OPTICS
Information Patent Grant
Arrangement for mounting an optical element
- Patent number 7,920,344
- Issue date Apr 5, 2011
- Carl Zeiss SMT GmbH
- Armin Schoeppach
- G02 - OPTICS
Information Patent Grant
Optical element unit
- Patent number 7,729,065
- Issue date Jun 1, 2010
- Carl Zeiss SMT AG
- Armin Schoeppach
- G02 - OPTICS
Information Patent Grant
Device for preventing the displacement of an optical element
- Patent number 7,564,636
- Issue date Jul 21, 2009
- Carl Zeiss SMT AG
- Christian Zengerling
- G02 - OPTICS
Information Patent Grant
Process for connecting an optical element of a microlithographic pr...
- Patent number 7,551,375
- Issue date Jun 23, 2009
- Carl Zeiss SMT AG
- Johannes Rau
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Objective with at least one optical element
- Patent number 7,239,462
- Issue date Jul 3, 2007
- Carl Zeiss SMT AG
- Johannes Rau
- G02 - OPTICS
Information Patent Grant
Device for holding a beam splitter element
- Patent number 7,079,331
- Issue date Jul 18, 2006
- Carl Zeiss SMT AG
- Ulrich Weber
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Optical Projection System
- Publication number 20180259856
- Publication date Sep 13, 2018
- Carl Zeiss SMT GMBH
- Johannes Rau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL DEVICE HAVING A DEFORMABLE OPTICAL ELEMENT
- Publication number 20180120710
- Publication date May 3, 2018
- Carl Zeiss SMT GMBH
- Manfred Steinbach
- G02 - OPTICS
Information Patent Application
Optical Projection System
- Publication number 20170219929
- Publication date Aug 3, 2017
- Carl Zeiss SMT GMBH
- Johannes Rau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL DEVICE HAVING A DEFORMABLE OPTICAL ELEMENT
- Publication number 20160209752
- Publication date Jul 21, 2016
- Carl Zeiss SMT GMBH
- Manfred Steinbach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ACTUATORS AND MICROLITHOGRAPHY PROJECTION EXPOSURE SYSTEMS AND METH...
- Publication number 20150370176
- Publication date Dec 24, 2015
- Carl Zeiss SMT GMBH
- Ulrich Weber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Holding Device for an Optical Element in an Objective
- Publication number 20150138520
- Publication date May 21, 2015
- ASML NETHERLANDS B.V.
- Bernhard Gellrich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MICROLITHOGRAPHIC IMAGING OPTICAL SYSTEM INCLUDING MULTIPLE MIRRORS
- Publication number 20150022799
- Publication date Jan 22, 2015
- Carl Zeiss SMT GMBH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY FOR THE PRODUCTI...
- Publication number 20150015864
- Publication date Jan 15, 2015
- Carl Zeiss SMT GMBH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GRAVITATION COMPENSATION FOR OPTICAL ELEMENTS IN PROJECTION EXPOSUR...
- Publication number 20150009557
- Publication date Jan 8, 2015
- Carl Zeiss SMT GMBH
- Norbert Muehlberger
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR CONNECTING AN OPTICAL ELEMENT TO A FRAME
- Publication number 20150008215
- Publication date Jan 8, 2015
- Carl Zeiss SMT GMBH
- Armin Schoeppach
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
OPTICAL MODULE WITH A MEASURING DEVICE
- Publication number 20140125995
- Publication date May 8, 2014
- Armin Schoeppach
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM WITH AN EXCHANGEABLE, MANIPULABLE CORRECTION ARRANGE...
- Publication number 20130278911
- Publication date Oct 24, 2013
- Guido Limbach
- G02 - OPTICS
Information Patent Application
OPTICAL PROJECTION SYSTEM
- Publication number 20130044304
- Publication date Feb 21, 2013
- Carl Zeiss SMT GMBH
- Johannes Rau
- G02 - OPTICS
Information Patent Application
OPTICAL ELEMENT
- Publication number 20120194795
- Publication date Aug 2, 2012
- Carl Zeiss SMT GMBH
- Johannes Rau
- G02 - OPTICS
Information Patent Application
OPTICAL ARRANGEMENT AND MICROLITHOGRAPHIC PROJECTION EXPOSURE APPAR...
- Publication number 20120182533
- Publication date Jul 19, 2012
- Carl Zeiss SMT GMBH
- Armin Schoeppach
- G02 - OPTICS
Information Patent Application
HOLDING ARRANGEMENT FOR AN OPTICAL ELEMENT
- Publication number 20120154935
- Publication date Jun 21, 2012
- Carl Zeiss SMT GMBH
- Ulrich Weber
- G02 - OPTICS
Information Patent Application
ACTUATORS AND MICROLITHOGRAPHY PROJECTION EXPOSURE SYSTEMS AND METH...
- Publication number 20120147344
- Publication date Jun 14, 2012
- Carl Zeiss SMT GMBH
- Ulrich Weber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL DEVICE HAVING A DEFORMABLE OPTICAL ELEMENT
- Publication number 20110299053
- Publication date Dec 8, 2011
- Carl Zeiss SMT GMBH
- Manfred Steinbach
- G02 - OPTICS
Information Patent Application
GRAVITATION COMPENSATION FOR OPTICAL ELEMENTS IN PROJECTION EXPOSUR...
- Publication number 20110267596
- Publication date Nov 3, 2011
- Carl Zeiss SMT GMBH
- Norbert Muehlberger
- G02 - OPTICS
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY FOR THE PRODUCTI...
- Publication number 20110235012
- Publication date Sep 29, 2011
- Carl Zeiss SMT GMBH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TEMPERATURE-CONTROL DEVICE FOR AN OPTICAL ASSEMBLY
- Publication number 20110181851
- Publication date Jul 28, 2011
- Carl Zeiss SMT GMBH
- Armin Schoeppach
- G02 - OPTICS
Information Patent Application
IMAGING OPTICAL SYSTEM
- Publication number 20110165522
- Publication date Jul 7, 2011
- Carl Zeiss SMT GMBH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Application
ACTUATORS AND MICROLITHOGRAPHY PROJECTION EXPOSURE SYSTEMS AND METH...
- Publication number 20110128521
- Publication date Jun 2, 2011
- Carl Zeiss SMT GMBH
- Ulrich Weber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL SYSTEM HAVING AN OPTICAL ARRANGEMENT
- Publication number 20110025992
- Publication date Feb 3, 2011
- CARL ZEISS LASER OPTICS GmbH
- Hubert Holderer
- G02 - OPTICS
Information Patent Application
PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS AND METHOD
- Publication number 20100128367
- Publication date May 27, 2010
- Carl Zeiss SMT AG
- Mariella Beckenbach
- G02 - OPTICS
Information Patent Application
Arrangement for Mounting An Optical Element
- Publication number 20090284849
- Publication date Nov 19, 2009
- Armin Schoeppach
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM WITH AN EXCHANGEABLE, MANIPULABLE CORRECTION ARRANGE...
- Publication number 20090244509
- Publication date Oct 1, 2009
- Carl Zeiss SMT AG
- Guido Limbach
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR CONNECTING AN OPTICAL ELEMENT TO A FRAME
- Publication number 20090244508
- Publication date Oct 1, 2009
- Carl Zeiss SMT AG
- Armin Schoeppach
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
OPTICAL DEVICE WITH STIFF HOUSING
- Publication number 20090219497
- Publication date Sep 3, 2009
- Carl Zeiss SMT AG
- Armin Schoeppach
- G02 - OPTICS
Information Patent Application
ASSEMBLY FOR ADJUSTING AN OPTICAL ELEMENT
- Publication number 20090207511
- Publication date Aug 20, 2009
- Carl Zeiss SMT AG
- Armin Schoeppach
- G02 - OPTICS

Armin Schoeppach

Person

Patents Grantslast 30 patents

Optical projection system

Optical device having a deformable optical element

Actuators and microlithography projection exposure systems and meth...

Method and device for connecting an optical element to a frame

Optical projection system

Projection exposure apparatus for microlithography for the producti...

Optical arrangement and microlithographic projection exposure appar...

Gravitation compensation for optical elements in projection exposur...

Optical device having a deformable optical element

Microlithographic imaging optical system including multiple mirrors

Optical module with a measuring device

Optical projection system

Projection exposure apparatus for microlithography for the producti...

Microlithographic imaging optical system including multiple mirrors

Holding device for an optical element in an objective

Gravitation compensation for optical elements in projection exposur...

Optical element

Method and device for connecting an optical element to a frame

Optical system with an exchangeable, manipulable correction arrange...

Optical system with an exchangeable, manipulable correction arrange...

Holding arrangement for an optical element

Optical system having heat dissipation arrangement

Temperature-control device for an optical assembly

Optical projection system

Arrangement for mounting an optical element

Optical element unit

Device for preventing the displacement of an optical element

Process for connecting an optical element of a microlithographic pr...

Objective with at least one optical element

Device for holding a beam splitter element

Patents Applicationslast 30 patents

Optical Projection System

OPTICAL DEVICE HAVING A DEFORMABLE OPTICAL ELEMENT

Optical Projection System

OPTICAL DEVICE HAVING A DEFORMABLE OPTICAL ELEMENT

ACTUATORS AND MICROLITHOGRAPHY PROJECTION EXPOSURE SYSTEMS AND METH...

Holding Device for an Optical Element in an Objective

MICROLITHOGRAPHIC IMAGING OPTICAL SYSTEM INCLUDING MULTIPLE MIRRORS

PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY FOR THE PRODUCTI...

GRAVITATION COMPENSATION FOR OPTICAL ELEMENTS IN PROJECTION EXPOSUR...

METHOD AND DEVICE FOR CONNECTING AN OPTICAL ELEMENT TO A FRAME

OPTICAL MODULE WITH A MEASURING DEVICE

OPTICAL SYSTEM WITH AN EXCHANGEABLE, MANIPULABLE CORRECTION ARRANGE...

OPTICAL PROJECTION SYSTEM

OPTICAL ELEMENT

OPTICAL ARRANGEMENT AND MICROLITHOGRAPHIC PROJECTION EXPOSURE APPAR...

HOLDING ARRANGEMENT FOR AN OPTICAL ELEMENT

ACTUATORS AND MICROLITHOGRAPHY PROJECTION EXPOSURE SYSTEMS AND METH...

OPTICAL DEVICE HAVING A DEFORMABLE OPTICAL ELEMENT

GRAVITATION COMPENSATION FOR OPTICAL ELEMENTS IN PROJECTION EXPOSUR...

PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY FOR THE PRODUCTI...

TEMPERATURE-CONTROL DEVICE FOR AN OPTICAL ASSEMBLY

IMAGING OPTICAL SYSTEM

ACTUATORS AND MICROLITHOGRAPHY PROJECTION EXPOSURE SYSTEMS AND METH...

OPTICAL SYSTEM HAVING AN OPTICAL ARRANGEMENT

PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS AND METHOD

Arrangement for Mounting An Optical Element

OPTICAL SYSTEM WITH AN EXCHANGEABLE, MANIPULABLE CORRECTION ARRANGE...

METHOD AND DEVICE FOR CONNECTING AN OPTICAL ELEMENT TO A FRAME

OPTICAL DEVICE WITH STIFF HOUSING

ASSEMBLY FOR ADJUSTING AN OPTICAL ELEMENT