Arthur Keigler

Person

Wellesley, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Adaptive focusing and transport system for electroplating
- Patent number 11,942,341
- Issue date Mar 26, 2024
- ASMPT NEXX, INC.
- Arthur Keigler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adaptive focusing and transport system for electroplating
- Patent number 11,887,874
- Issue date Jan 30, 2024
- ASMPT NEXX, INC.
- Arthur Keigler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Batch processing system with vacuum isolation
- Patent number 11,174,544
- Issue date Nov 16, 2021
- ASM NEXX, INC.
- Arthur Keigler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Workpiece holder for a wet processing system
- Patent number 10,283,396
- Issue date May 7, 2019
- ASM NEXX, INC.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Workpiece loader for a wet processing system
- Patent number 10,074,554
- Issue date Sep 11, 2018
- Tel Nexx, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Electrochemical deposition apparatus and methods for controlling th...
- Patent number 9,988,735
- Issue date Jun 5, 2018
- Tel Nexx, Inc.
- Demetrius Papapanayiotou
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Seed layer deposition in microscale features
- Patent number 9,714,474
- Issue date Jul 25, 2017
- Tel Nexx, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Electrochemical deposition apparatus and methods for controlling th...
- Patent number 9,637,836
- Issue date May 2, 2017
- Tel Nexx, Inc.
- Demetrius Papapanayiotou
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Parallel single substrate marangoni module
- Patent number 9,508,582
- Issue date Nov 29, 2016
- Tel Nexx, Inc.
- Arthur Keigler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for fluid processing a workpiece
- Patent number 9,453,290
- Issue date Sep 27, 2016
- Tel Nexx, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Parallel single substrate processing system
- Patent number 9,449,862
- Issue date Sep 20, 2016
- Tel Nexx, Inc.
- Arthur Keigler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holder
- Patent number 9,421,617
- Issue date Aug 23, 2016
- Tel Nexx, Inc.
- Daniel Goodman
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electrochemical deposition apparatus with remote catholyte fluid ma...
- Patent number 9,303,329
- Issue date Apr 5, 2016
- Tel Nexx, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Parallel single substrate processing system
- Patent number 9,293,356
- Issue date Mar 22, 2016
- Tel Nexx, Inc.
- Arthur Keigler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Parallel single substrate processing system with alignment features...
- Patent number 9,257,319
- Issue date Feb 9, 2016
- Tel Nexx, Inc.
- Arthur Keigler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing pallet with cooling
- Patent number 9,147,588
- Issue date Sep 29, 2015
- Tel Nexx, Inc.
- Daniel Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate loader and unloader having an air bearing support
- Patent number 9,117,856
- Issue date Aug 25, 2015
- Tel Nexx, Inc.
- Daniel Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electro chemical deposition and replenishment apparatus
- Patent number 9,017,528
- Issue date Apr 28, 2015
- Tel Nexx, Inc.
- Demetrius Papapanayiotou
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Electro chemical deposition and replenishment apparatus
- Patent number 9,005,409
- Issue date Apr 14, 2015
- Tel Nexx, Inc.
- David Guarnaccia
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Substrate loader and unloader
- Patent number 8,967,935
- Issue date Mar 3, 2015
- Tel Nexx, Inc.
- Daniel Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge bevel removal apparatus and method
- Patent number 8,858,755
- Issue date Oct 14, 2014
- Tel Nexx, Inc.
- Daniel Goodman
- B44 - DECORATIVE ARTS
Information Patent Grant
Substrate loader and unloader having a Bernoulli support
- Patent number 8,613,474
- Issue date Dec 24, 2013
- Tel Nexx, Inc.
- Daniel Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fluid processing a workpiece
- Patent number 8,512,543
- Issue date Aug 20, 2013
- Tel Nexx, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Wetting a workpiece surface in a fluid-processing system
- Patent number 8,425,687
- Issue date Apr 23, 2013
- Tel Nexx, Inc.
- Arthur Keigler
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Apparatus for thermal processing with micro-environment
- Patent number 8,420,981
- Issue date Apr 16, 2013
- Tel Nexx, Inc.
- Daniel Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for fluid processing a workpiece
- Patent number 8,277,624
- Issue date Oct 2, 2012
- Tel Nexx, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Balancing pressure to improve a fluid seal
- Patent number 8,168,057
- Issue date May 1, 2012
- NEXX Systems, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method and apparatus for fluid processing a workpiece
- Patent number 8,038,856
- Issue date Oct 18, 2011
- NEXX Systems, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Balancing pressure to improve a fluid seal
- Patent number 7,727,366
- Issue date Jun 1, 2010
- NEXX Systems, Inc.
- Arthur Keigler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for fluid processing a workpiece
- Patent number 7,722,747
- Issue date May 25, 2010
- NEXX Systems, Inc.
- Arthur Keigler
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ADAPTIVE FOCUSING AND TRANSPORT SYSTEM FOR ELECTROPLATING
- Publication number 20230238260
- Publication date Jul 27, 2023
- ASMPT NEXX, INC.
- Arthur KEIGLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADAPTIVE FOCUSING AND TRANSPORT SYSTEM FOR ELECTROPLATING
- Publication number 20220148891
- Publication date May 12, 2022
- ASM NEXX, INC.
- Arthur KEIGLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROCHEMICAL DEPOSITION SYSTEMS
- Publication number 20210017661
- Publication date Jan 21, 2021
- ASM NEXX, INC.
- Arthur KEIGLER
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
BATCH PROCESSING SYSTEM WITH VACUUM ISOLATION
- Publication number 20200087774
- Publication date Mar 19, 2020
- ASM NEXX, INC.
- Arthur KEIGLER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WET PROCESSING SYSTEM AND METHOD OF OPERATING
- Publication number 20170370017
- Publication date Dec 28, 2017
- TEL NEXX, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
WORKPIECE HOLDER FOR A WET PROCESSING SYSTEM
- Publication number 20170372937
- Publication date Dec 28, 2017
- TEL NEXX, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
WORKPIECE LOADER FOR A WET PROCESSING SYSTEM
- Publication number 20170372938
- Publication date Dec 28, 2017
- TEL NEXX, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD AND APPARATUS FOR FORMING EMI SHIELDING LAYERS ON SEMICONDUC...
- Publication number 20160365317
- Publication date Dec 15, 2016
- TEL NEXX, Inc.
- Arthur Keigler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROCHEMICAL DEPOSITION APPARATUS WITH REMOTE CATHOLYTE FLUID MA...
- Publication number 20150129418
- Publication date May 14, 2015
- TEL NEXX, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD AND APPARATUS FOR REMOVAL OF PHOTORESIST USING IMPROVED CHEM...
- Publication number 20150047674
- Publication date Feb 19, 2015
- TEL NEXX, Inc.
- Daniel L. Goodman
- B08 - CLEANING
Information Patent Application
ELECTROCHEMICAL DEPOSITION APPARATUS AND METHODS FOR CONTROLLING TH...
- Publication number 20150008133
- Publication date Jan 8, 2015
- TEL NEXX, Inc.
- Demetrius Papapanayiotou
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ELECTROCHEMICAL DEPOSITION APPARATUS AND METHODS FOR CONTROLLING TH...
- Publication number 20150008134
- Publication date Jan 8, 2015
- TEL NEXX, Inc.
- Demetrius Papapanayiotou
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ELECTROCHEMICAL DEPOSITION APPARATUS AND METHODS FOR CONTROLLING TH...
- Publication number 20150008119
- Publication date Jan 8, 2015
- TEL NEXX, Inc.
- Demetrius Papapanayiotou
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
APPARATUS FOR FLUID PROCESSING A WORKPIECE
- Publication number 20130334036
- Publication date Dec 19, 2013
- TEL NEXX, Inc.
- Arthur KEIGLER
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
EDGE BEVEL REMOVAL APPARATUS AND METHOD
- Publication number 20130048610
- Publication date Feb 28, 2013
- TEL NEXX, Inc.
- Daniel GOODMAN
- B44 - DECORATIVE ARTS
Information Patent Application
SUBSTRATE LOADER AND UNLOADER HAVING AN AIR BEARING SUPPORT
- Publication number 20130009415
- Publication date Jan 10, 2013
- Nexx Systems, Inc.
- Daniel Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LOADER AND UNLOADER
- Publication number 20130011222
- Publication date Jan 10, 2013
- Nexx Systems, Inc.
- Daniel Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LOADER AND UNLOADER HAVING A BERNOULLI SUPPORT
- Publication number 20130011225
- Publication date Jan 10, 2013
- NEXX System, Inc.
- Daniel Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROPLATED LEAD-FREE BUMP DEPOSITION
- Publication number 20120325671
- Publication date Dec 27, 2012
- TEL NEXX, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE HOLDER
- Publication number 20120325275
- Publication date Dec 27, 2012
- Nexx Systems, Inc.
- Daniel Goodman
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PARALLEL SINGLE SUBSTRATE PROCESSING SYSTEM
- Publication number 20120308344
- Publication date Dec 6, 2012
- Arthur Keigler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR FLUID PROCESSING A WORKPIECE
- Publication number 20120305404
- Publication date Dec 6, 2012
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PARALLEL SINGLE SUBSTRATE PROCESSING SYSTEM
- Publication number 20120306137
- Publication date Dec 6, 2012
- Arthur Keigler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARALLEL SINGLE SUBSTRATE PROCESSING FLUID JET MODULE
- Publication number 20120305192
- Publication date Dec 6, 2012
- ARTHUR KEIGLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARALLEL SINGLE SUBSTRATE MARANGONI MODULE
- Publication number 20120305033
- Publication date Dec 6, 2012
- Arthur Keigler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARALLEL SINGLE SUBSTRATE PROCESSING SYSTEM HOLDER
- Publication number 20120306139
- Publication date Dec 6, 2012
- Arthur Keigler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARALLEL SINGLE SUBSTRATE PROCESSING SYSTEM
- Publication number 20120308345
- Publication date Dec 6, 2012
- ARTHUR KEIGLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARALLEL SINGLE SUBSTRATE PROCESSING SYSTEM LOADER
- Publication number 20120308346
- Publication date Dec 6, 2012
- Arthur Keigler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARALLEL SINGLE SUBSTRATE PROCESSING AGITATION MODULE
- Publication number 20120305193
- Publication date Dec 6, 2012
- ARTHUR KEIGLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRO CHEMICAL DEPOSITION AND REPLENISHMENT APPARATUS
- Publication number 20120298502
- Publication date Nov 29, 2012
- Demetrius Papapanayiotou
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Arthur Keigler

Person

Patents Grantslast 30 patents

Adaptive focusing and transport system for electroplating

Adaptive focusing and transport system for electroplating

Batch processing system with vacuum isolation

Workpiece holder for a wet processing system

Workpiece loader for a wet processing system

Electrochemical deposition apparatus and methods for controlling th...

Seed layer deposition in microscale features

Electrochemical deposition apparatus and methods for controlling th...

Parallel single substrate marangoni module

Apparatus for fluid processing a workpiece

Parallel single substrate processing system

Substrate holder

Electrochemical deposition apparatus with remote catholyte fluid ma...

Parallel single substrate processing system

Parallel single substrate processing system with alignment features...

Substrate processing pallet with cooling

Substrate loader and unloader having an air bearing support

Electro chemical deposition and replenishment apparatus

Electro chemical deposition and replenishment apparatus

Substrate loader and unloader

Edge bevel removal apparatus and method

Substrate loader and unloader having a Bernoulli support

Method for fluid processing a workpiece

Wetting a workpiece surface in a fluid-processing system

Apparatus for thermal processing with micro-environment

Method and apparatus for fluid processing a workpiece

Balancing pressure to improve a fluid seal

Method and apparatus for fluid processing a workpiece

Balancing pressure to improve a fluid seal

Method and apparatus for fluid processing a workpiece

Patents Applicationslast 30 patents

ADAPTIVE FOCUSING AND TRANSPORT SYSTEM FOR ELECTROPLATING

ADAPTIVE FOCUSING AND TRANSPORT SYSTEM FOR ELECTROPLATING

ELECTROCHEMICAL DEPOSITION SYSTEMS

BATCH PROCESSING SYSTEM WITH VACUUM ISOLATION

WET PROCESSING SYSTEM AND METHOD OF OPERATING

WORKPIECE HOLDER FOR A WET PROCESSING SYSTEM

WORKPIECE LOADER FOR A WET PROCESSING SYSTEM

METHOD AND APPARATUS FOR FORMING EMI SHIELDING LAYERS ON SEMICONDUC...

ELECTROCHEMICAL DEPOSITION APPARATUS WITH REMOTE CATHOLYTE FLUID MA...

METHOD AND APPARATUS FOR REMOVAL OF PHOTORESIST USING IMPROVED CHEM...

ELECTROCHEMICAL DEPOSITION APPARATUS AND METHODS FOR CONTROLLING TH...

ELECTROCHEMICAL DEPOSITION APPARATUS AND METHODS FOR CONTROLLING TH...

ELECTROCHEMICAL DEPOSITION APPARATUS AND METHODS FOR CONTROLLING TH...

APPARATUS FOR FLUID PROCESSING A WORKPIECE

EDGE BEVEL REMOVAL APPARATUS AND METHOD

SUBSTRATE LOADER AND UNLOADER HAVING AN AIR BEARING SUPPORT

SUBSTRATE LOADER AND UNLOADER

SUBSTRATE LOADER AND UNLOADER HAVING A BERNOULLI SUPPORT

ELECTROPLATED LEAD-FREE BUMP DEPOSITION

SUBSTRATE HOLDER

PARALLEL SINGLE SUBSTRATE PROCESSING SYSTEM

METHOD AND APPARATUS FOR FLUID PROCESSING A WORKPIECE

PARALLEL SINGLE SUBSTRATE PROCESSING SYSTEM

PARALLEL SINGLE SUBSTRATE PROCESSING FLUID JET MODULE

PARALLEL SINGLE SUBSTRATE MARANGONI MODULE

PARALLEL SINGLE SUBSTRATE PROCESSING SYSTEM HOLDER

PARALLEL SINGLE SUBSTRATE PROCESSING SYSTEM

PARALLEL SINGLE SUBSTRATE PROCESSING SYSTEM LOADER

PARALLEL SINGLE SUBSTRATE PROCESSING AGITATION MODULE

ELECTRO CHEMICAL DEPOSITION AND REPLENISHMENT APPARATUS