Arthur Kenneth Hochberg

Person

Solana Beach, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Precursors for CVD silicon carbo-nitride films
- Patent number 9,640,386
- Issue date May 2, 2017
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing silicon carbo-nitride film
- Patent number 8,932,675
- Issue date Jan 13, 2015
- Air Products and Chemicals, Inc.
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursors for CVD silicon carbo-nitride films
- Patent number 8,383,849
- Issue date Feb 26, 2013
- Air Products and Chemicals, Inc.
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursors for CVD silicon carbo-nitride films
- Patent number 8,288,577
- Issue date Oct 16, 2012
- Air Products and Chemicals, Inc.
- Manchao Xiao
Information Patent Grant
Precursors for CVD silicon carbo-nitride films
- Patent number 7,932,413
- Issue date Apr 26, 2011
- Air Products and Chemicals, Inc.
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursors for CVD silicon carbo-nitride and silicon nitride films
- Patent number 7,875,556
- Issue date Jan 25, 2011
- Air Products and Chemicals, Inc.
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diethylsilane as a silicon source in the deposition of metal silica...
- Patent number 7,582,574
- Issue date Sep 1, 2009
- Air Products and Chemicals, Inc.
- Robert Daniel Clark
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursors for depositing silicon containing films
- Patent number 7,288,145
- Issue date Oct 30, 2007
- Air Products and Chemicals, Inc.
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and vessel for the delivery of precursor materials
- Patent number 7,261,118
- Issue date Aug 28, 2007
- Air Products and Chemicals, Inc.
- Charles Michael Birtcher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursors for depositing silicon containing films and processes th...
- Patent number 7,122,222
- Issue date Oct 17, 2006
- Air Products and Chemicals, Inc.
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single source mixtures of metal siloxides
- Patent number 7,033,560
- Issue date Apr 25, 2006
- Air Products and Chemicals, Inc.
- Robert D. Clark
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Process of CVD of Hf and Zr containing oxynitride films
- Patent number 6,844,271
- Issue date Jan 18, 2005
- Air Products and Chemicals, Inc.
- John D. Loftin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Synthesis of metal oxide and oxynitride
- Patent number 6,616,972
- Issue date Sep 9, 2003
- Air Products and Chemicals, Inc.
- Yoshihide Senzaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for metal metalloid oxides and nitrides with compositional...
- Patent number 6,537,613
- Issue date Mar 25, 2003
- Air Products and Chemicals, Inc.
- Yoshihide Senzaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid precursor mixtures for deposition of multicomponent metal co...
- Patent number 6,503,561
- Issue date Jan 7, 2003
- Air Products and Chemicals, Inc.
- Yoshihide Senzaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition and annealing of multicomponent ZrSnTi and HfSnTi oxide...
- Patent number 6,500,499
- Issue date Dec 31, 2002
- Air Products and Chemicals, Inc.
- Yoshihide Senzaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Synthesis of tantalum nitride
- Patent number 6,319,567
- Issue date Nov 20, 2001
- Air Products and Chemicals, Inc.
- Yoshihide Senzaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of silicon dioxide and silicon oxynitride using bis(tert...
- Patent number 5,976,991
- Issue date Nov 2, 1999
- Air Products and Chemicals, Inc.
- Ravi Kumar Laxman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon nitride from bis(tertiarybutylamino)silane
- Patent number 5,874,368
- Issue date Feb 23, 1999
- Air Products and Chemicals, Inc.
- Ravi Kumar Laxman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature deposition of silicon dioxide using organosilanes
- Patent number 5,744,196
- Issue date Apr 28, 1998
- Air Products and Chemicals, Inc.
- Ravi Kumar Laxman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for improved quality of CVD copper films
- Patent number RE35614
- Issue date Sep 23, 1997
- Air Products and Chemicals, Inc.
- John A. T. Norman
- 427 - Coating processes
Information Patent Grant
Plasma etch with trifluoroacetic acid and derivatives
- Patent number 5,626,775
- Issue date May 6, 1997
- Air Products and Chemicals, Inc.
- David A. Roberts
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fluorine doped silicon oxide process
- Patent number 5,492,736
- Issue date Feb 20, 1996
- Air Products and Chemicals, Inc.
- Ravi K. Laxman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of tungsten films from mixtures of tungsten hexafluoride...
- Patent number 5,433,975
- Issue date Jul 18, 1995
- Air Products and Chemicals, Inc.
- David A. Roberts
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for improved quality of CVD copper films
- Patent number 5,322,712
- Issue date Jun 21, 1994
- Air Products and Chemicals, Inc.
- John A. T. Norman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Furnace tube cleaning process
- Patent number 5,298,075
- Issue date Mar 29, 1994
- Air Products and Chemicals, Inc.
- Andre Lagendijk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low ozone depleting organic chlorides for use during silicon oxidat...
- Patent number 5,288,662
- Issue date Feb 22, 1994
- Air Products and Chemicals, Inc.
- Andre Lagendijk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of silicon dioxide films at temperatures as low as 100 d...
- Patent number 5,204,141
- Issue date Apr 20, 1993
- Air Products and Chemicals, Inc.
- David A. Roberts
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for deposition of silicon films from azidosilane sources
- Patent number 5,013,690
- Issue date May 7, 1991
- Air Products and Chemicals, Inc.
- Arthur K. Hochberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition of silicon dioxide and silicon oxynitride films using az...
- Patent number 4,992,306
- Issue date Feb 12, 1991
- Air Products abd Chemicals, Inc.
- Arthur K. Hochberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Precursors for CVD Silicon Carbo-Nitride Films
- Publication number 20150147893
- Publication date May 28, 2015
- Air Products and Chemicals, Inc.
- Manchao Xiao
- C07 - ORGANIC CHEMISTRY
Information Patent Application
Precursors for CVD Silicon Carbo-Nitride Films
- Publication number 20130244448
- Publication date Sep 19, 2013
- Air Products and Chemicals, Inc.
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Precursors for CVD Silicon Carbo-Nitride Films
- Publication number 20110165346
- Publication date Jul 7, 2011
- Air Products and Chemicals, Inc.
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Precursors for CVD Silicon Carbo-nitride Films
- Publication number 20090069588
- Publication date Mar 12, 2009
- Air Products and Chemicals, Inc.
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Diethylsilane As A Silicon Source In The Deposition Of Metal Silica...
- Publication number 20070281475
- Publication date Dec 6, 2007
- Robert Daniel Clark
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Precursors for depositing silicon containing films
- Publication number 20070004931
- Publication date Jan 4, 2007
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Precursors for CVD silicon carbo-nitride films
- Publication number 20060258173
- Publication date Nov 16, 2006
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Preparation of metal silicon nitride films via cyclic deposition
- Publication number 20060182885
- Publication date Aug 17, 2006
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Silicon nitride from aminosilane using PECVD
- Publication number 20060045986
- Publication date Mar 2, 2006
- Arthur Kenneth Hochberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Precursors for depositing silicon-containing films and processes th...
- Publication number 20050181633
- Publication date Aug 18, 2005
- Arthur Kenneth Hochberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and vessel for the delivery of precursor materials
- Publication number 20050039794
- Publication date Feb 24, 2005
- Charles Michael Birtcher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS OF CVD OF HF AND ZR CONTAINING OXYNITRIDE FILMS
- Publication number 20040235312
- Publication date Nov 25, 2004
- John D. Loftin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Precursors for depositing silicon containing films and processes th...
- Publication number 20040146644
- Publication date Jul 29, 2004
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Single source mixtures of metal siloxides
- Publication number 20040044163
- Publication date Mar 4, 2004
- Robert D. Clark
- C07 - ORGANIC CHEMISTRY

Arthur Kenneth Hochberg

Person

Patents Grantslast 30 patents

Precursors for CVD silicon carbo-nitride films

Methods for depositing silicon carbo-nitride film

Precursors for CVD silicon carbo-nitride films

Precursors for CVD silicon carbo-nitride films

Precursors for CVD silicon carbo-nitride films

Precursors for CVD silicon carbo-nitride and silicon nitride films

Diethylsilane as a silicon source in the deposition of metal silica...

Precursors for depositing silicon containing films

Method and vessel for the delivery of precursor materials

Precursors for depositing silicon containing films and processes th...

Single source mixtures of metal siloxides

Process of CVD of Hf and Zr containing oxynitride films

Synthesis of metal oxide and oxynitride

Process for metal metalloid oxides and nitrides with compositional...

Liquid precursor mixtures for deposition of multicomponent metal co...

Deposition and annealing of multicomponent ZrSnTi and HfSnTi oxide...

Synthesis of tantalum nitride

Deposition of silicon dioxide and silicon oxynitride using bis(tert...

Silicon nitride from bis(tertiarybutylamino)silane

Low temperature deposition of silicon dioxide using organosilanes

Process for improved quality of CVD copper films

Plasma etch with trifluoroacetic acid and derivatives

Fluorine doped silicon oxide process

Deposition of tungsten films from mixtures of tungsten hexafluoride...

Process for improved quality of CVD copper films

Furnace tube cleaning process

Low ozone depleting organic chlorides for use during silicon oxidat...

Deposition of silicon dioxide films at temperatures as low as 100 d...

Method for deposition of silicon films from azidosilane sources

Deposition of silicon dioxide and silicon oxynitride films using az...

Patents Applicationslast 30 patents

Precursors for CVD Silicon Carbo-Nitride Films

Precursors for CVD Silicon Carbo-Nitride Films

Precursors for CVD Silicon Carbo-Nitride Films

Precursors for CVD Silicon Carbo-nitride Films

Diethylsilane As A Silicon Source In The Deposition Of Metal Silica...

Precursors for depositing silicon containing films

Precursors for CVD silicon carbo-nitride films

Preparation of metal silicon nitride films via cyclic deposition

Silicon nitride from aminosilane using PECVD

Precursors for depositing silicon-containing films and processes th...

Method and vessel for the delivery of precursor materials

PROCESS OF CVD OF HF AND ZR CONTAINING OXYNITRIDE FILMS

Precursors for depositing silicon containing films and processes th...

Single source mixtures of metal siloxides