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Setagaya, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Pattern inspection method and apparatus
Patent number
7,957,579
Issue date
Jun 7, 2011
Hitachi, Ltd.
Takashi Hiroi
G01 - MEASURING TESTING
Information
Patent Grant
Pattern inspection method and apparatus
Patent number
7,894,658
Issue date
Feb 22, 2011
Hitachi, Ltd.
Takashi Hiroi
G01 - MEASURING TESTING
Information
Patent Grant
Pattern inspection method and apparatus
Patent number
7,457,453
Issue date
Nov 25, 2008
Hitachi, Ltd.
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pattern inspection method and apparatus using electron beam
Patent number
7,439,504
Issue date
Oct 21, 2008
Hitachi, Ltd.
Takashi Hiroi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and its apparatus for inspecting a pattern
Patent number
7,269,280
Issue date
Sep 11, 2007
Hitachi, Ltd.
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pattern inspection method and apparatus
Patent number
7,266,235
Issue date
Sep 4, 2007
Hitachi, Ltd.
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and system for inspecting a pattern
Patent number
7,260,256
Issue date
Aug 21, 2007
Renesas Technology Corporation
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pattern inspection method and apparatus
Patent number
7,133,550
Issue date
Nov 7, 2006
Hitachi, Ltd.
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Electron beam inspection method and apparatus and semiconductor man...
Patent number
7,122,796
Issue date
Oct 17, 2006
Hitachi Ltd.
Takashi Hiroi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for inspecting a specimen
Patent number
7,049,587
Issue date
May 23, 2006
Hitachi, Ltd.
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Circuit pattern inspection method and apparatus
Patent number
6,975,754
Issue date
Dec 13, 2005
Hitachi, Ltd.
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pattern inspection method and apparatus using electron beam
Patent number
6,940,069
Issue date
Sep 6, 2005
Hitachi, Ltd.
Takashi Hiroi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Circuit pattern inspection method and apparatus
Patent number
6,898,305
Issue date
May 24, 2005
Hitachi, Ltd.
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Electron beam inspection method and apparatus and semiconductor man...
Patent number
6,828,554
Issue date
Dec 7, 2004
Hitachi, Ltd.
Takashi Hiroi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam inspection method and apparatus and semiconductor man...
Patent number
6,717,142
Issue date
Apr 6, 2004
Hitachi, Ltd.
Takashi Hiroi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern inspection method and apparatus using electron beam
Patent number
6,614,022
Issue date
Sep 2, 2003
Hitachi, Ltd.
Takashi Hiroi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Visual inspection method and apparatus therefor
Patent number
6,587,581
Issue date
Jul 1, 2003
Hitachi, Ltd.
Yukio Matsuyama
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Sample processing apparatus and method for removing charge on sampl...
Patent number
6,507,029
Issue date
Jan 14, 2003
Hitachi, Ltd.
Norimasa Nishimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for inspecting or measuring a sample based on...
Patent number
6,465,781
Issue date
Oct 15, 2002
Hitachi, Ltd.
Norimasa Nishimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of inspecting a pattern on a substrate
Patent number
6,376,854
Issue date
Apr 23, 2002
Hitachi, Ltd.
Chie Shishido
G01 - MEASURING TESTING
Information
Patent Grant
Electron beam inspection method and apparatus and semiconductor man...
Patent number
6,373,054
Issue date
Apr 16, 2002
Hitachi, Ltd.
Takashi Hiroi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for inspecting a pattern
Patent number
6,347,150
Issue date
Feb 12, 2002
Hitachi, Ltd.
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method of inspecting pattern and apparatus thereof with a different...
Patent number
6,236,057
Issue date
May 22, 2001
Hitachi, Ltd.
Chie Shishido
G01 - MEASURING TESTING
Information
Patent Grant
Electron beam inspection method and apparatus and semiconductor man...
Patent number
6,172,365
Issue date
Jan 9, 2001
Hitachi Ltd.
Takashi Hiroi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of inspecting pattern and apparatus thereof
Patent number
6,087,673
Issue date
Jul 11, 2000
Hitachi, Ltd.
Chie Shishido
G01 - MEASURING TESTING
Information
Patent Grant
Electron beam inspection method and apparatus and semiconductor man...
Patent number
5,986,263
Issue date
Nov 16, 1999
Hitachi, Ltd.
Takashi Hiroi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspection method for soldered joints using x-ray imaging and appar...
Patent number
5,463,667
Issue date
Oct 31, 1995
Hitachi, Ltd.
Toshiaki Ichinose
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for detecting defect in circuit pattern of a m...
Patent number
4,814,615
Issue date
Mar 21, 1989
Hitachi, Ltd.
Satoru Fushimi
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Substrate surface deflecting device
Patent number
4,788,577
Issue date
Nov 29, 1988
Hitachi, Ltd.
Nobuyuki Akiyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for alignment
Patent number
4,777,641
Issue date
Oct 11, 1988
Hitachi, Ltd.
Akira Inagaki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Pattern Inspection Method And Apparatus
Publication number
20100246933
Publication date
Sep 30, 2010
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Pattern Inspection Method And Apparatus
Publication number
20080063257
Publication date
Mar 13, 2008
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Pattern Inspection Method And Apparatus
Publication number
20080056559
Publication date
Mar 6, 2008
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND ITS APPARATUS FOR INSPECTING A PATTERN
Publication number
20080002876
Publication date
Jan 3, 2008
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PATTERN INSPECTION METHOD AND APPARATUS
Publication number
20070269101
Publication date
Nov 22, 2007
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Pattern inspection method and system therefor
Publication number
20070131877
Publication date
Jun 14, 2007
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Pattern inspection method and apparatus using electron beam
Publication number
20050263703
Publication date
Dec 1, 2005
Takashi Hiroi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron beam inspection method and apparatus and semiconductor man...
Publication number
20050082476
Publication date
Apr 21, 2005
Takashi Hiroi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Business process diagnostic method and business process diagnostic...
Publication number
20050080647
Publication date
Apr 14, 2005
Koji Okada
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Electron beam inspection method and apparatus and semiconductor man...
Publication number
20040164244
Publication date
Aug 26, 2004
Takashi Hiroi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Pattern inspection method and apparatus using electron beam
Publication number
20040028272
Publication date
Feb 12, 2004
Takashi Hiroi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Pattern inspection method and system therefor
Publication number
20030062487
Publication date
Apr 3, 2003
Takashi Hiroi
G01 - MEASURING TESTING
Information
Patent Application
Apparatus for inspecting a specimen
Publication number
20030063792
Publication date
Apr 3, 2003
Takashi Hiroi
G01 - MEASURING TESTING
Information
Patent Application
Method and its apparatus for inspecting a pattern
Publication number
20030007677
Publication date
Jan 9, 2003
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Circuit pattern inspection method and apparatus
Publication number
20020114506
Publication date
Aug 22, 2002
Takashi Hiroi
G01 - MEASURING TESTING
Information
Patent Application
Electron beam inspection method and apparatus and semiconductor man...
Publication number
20020100872
Publication date
Aug 1, 2002
Takashi Hiroi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and system for inspecting a pattern
Publication number
20020094120
Publication date
Jul 18, 2002
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Pattern inspection method and apparatus
Publication number
20020057831
Publication date
May 16, 2002
Takashi Hiroi
G01 - MEASURING TESTING
Information
Patent Application
Pattern inspection method and apparatus
Publication number
20020054703
Publication date
May 9, 2002
Takashi Hiroi
G01 - MEASURING TESTING
Information
Patent Application
Circuit pattern inspection method and apparatus
Publication number
20020051565
Publication date
May 2, 2002
Takashi Hiroi
G01 - MEASURING TESTING
Information
Patent Application
Pattern inspection method and apparatus using electron beam
Publication number
20020030166
Publication date
Mar 14, 2002
Takashi Hiroi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of inspecting pattern and apparatus thereof
Publication number
20010030300
Publication date
Oct 18, 2001
Chie Shishido
G01 - MEASURING TESTING
Information
Patent Application
Electron beam inspection method and apparatus and semiconductor man...
Publication number
20010002697
Publication date
Jun 7, 2001
Takashi Hiroi
H01 - BASIC ELECTRIC ELEMENTS