Aseem K. Srivastava

Person

Andover, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
System and method for hi-precision ion implantation
- Patent number 11,699,570
- Issue date Jul 11, 2023
- Applied Materials, Inc.
- Supakit Charnvanichborikarn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for isolating gates in transistors
- Patent number 10,937,646
- Issue date Mar 2, 2021
- Applied Materials, Inc.
- Aseem K. Srivastava
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for implementing low dose implant in a plasma system
- Patent number 9,783,884
- Issue date Oct 10, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Ilwoong Koo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
RF coupled plasma abatement system comprising an integrated power o...
- Patent number 8,932,430
- Issue date Jan 13, 2015
- Axcelis Technologies, Inc.
- Aseem K. Srivastava
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tuning hardware for plasma ashing apparatus and methods of use thereof
- Patent number 8,906,195
- Issue date Dec 9, 2014
- Lam Research Corporation
- Aseem K. Srivastava
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma apparatus, gas distribution assembly for a plasma apparatus...
- Patent number 8,580,076
- Issue date Nov 12, 2013
- Lam Research Corporation
- Alan Frederick Becknell
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Plasma ashing apparatus and endpoint detection process
- Patent number 8,268,181
- Issue date Sep 18, 2012
- Axcelis Technologies, Inc.
- Aseem Kumar Srivastava
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gas distribution plate assembly for plasma reactors
- Patent number 7,892,357
- Issue date Feb 22, 2011
- Axcelis Technologies, Inc.
- Aseem K. Srivastava
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wide area radio frequency plasma apparatus for processing multiple...
- Patent number 7,845,310
- Issue date Dec 7, 2010
- Axcelis Technologies, Inc.
- William F. DiVergilio
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for micro-jet enabled, low energy ion generati...
- Patent number 7,037,846
- Issue date May 2, 2006
- Axcelis Technologies, Inc.
- Aseem Kumar Srivastava
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for micro-jet enabled, low-energy ion generati...
- Patent number 6,761,796
- Issue date Jul 13, 2004
- Axcelis Technologies, Inc.
- Aseem Kumar Srivastava
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual plasma source for plasma process chamber
- Patent number 6,225,745
- Issue date May 1, 2001
- Axcelis Technologies, Inc.
- Aseem K. Srivastava
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma discharge device with dynamic tuning by a movable microwave...
- Patent number 6,057,645
- Issue date May 2, 2000
- Eaton Corporation
- Aseem K. Srivastava
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for cooling electrodeless lamp with supersonic outlet jets a...
- Patent number 6,031,320
- Issue date Feb 29, 2000
- Mohammad Kamarehi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR ISOLATING GATES IN TRANSISTORS
- Publication number 20210082695
- Publication date Mar 18, 2021
- Applied Materials, Inc.
- Aseem K. Srivastava
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method For Implementing Low Dose Implant In A Plasma System
- Publication number 20140272182
- Publication date Sep 18, 2014
- Ilwoong Koo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR CLEANING RESIDUE FROM AN ION SOURCE COMPONENT
- Publication number 20130305989
- Publication date Nov 21, 2013
- Axcelis Technologies, Inc.
- Aseem K. Srivastava
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTANTIALLY NON-OXIDIZING PLASMA TREATMENT DEVICES AND PROCESSES
- Publication number 20130248113
- Publication date Sep 26, 2013
- LAM RESEARCH CORPORATION
- Phillip Geissbûhler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA GENERATING APPARATUS AND PROCESS FOR SIMULTANEOUS EXPOSURE O...
- Publication number 20130160793
- Publication date Jun 27, 2013
- Axcelis Technologies, Inc.
- Aseem K. Srivastava
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF Coupled Plasma Abatement System Comprising an Integrated Power O...
- Publication number 20120279657
- Publication date Nov 8, 2012
- Axcelis Technologies, Inc.
- Aseem K. Srivastava
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substantially Non-Oxidizing Plasma Treatment Devices and Processes
- Publication number 20110136346
- Publication date Jun 9, 2011
- Axcelis Technologies, Inc.
- Phillip Geissbühler
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
TUNING HARDWARE FOR PLASMA ASHING APPARATUS AND METHODS OF USE THEREOF
- Publication number 20110114115
- Publication date May 19, 2011
- AXCELIS TECHNOLOGIESM INC.
- Aseem K. Srivastava
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CLEANING RESIDUE FROM AN ION SOURCE COMPONENT
- Publication number 20110108058
- Publication date May 12, 2011
- Axcelis Technologies, Inc.
- Aseem K. Srivastava
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WIDE AREA RADIO FREQUENCY PLASMA APPARATUS FOR PROCESSING MULTIPLE...
- Publication number 20110036500
- Publication date Feb 17, 2011
- Axcelis Technologies, Inc.
- William F. DiVergilio
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLASMA ASHING APPARATUS AND ENDPOINT DETECTION PROCESS
- Publication number 20100055807
- Publication date Mar 4, 2010
- Axcelis Technologies, Inc.
- Aseem Kumar Srivastava
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Wide area radio frequency plasma apparatus for processing multiple...
- Publication number 20080138992
- Publication date Jun 12, 2008
- William F. DiVergilio
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Medium pressure plasma system for removal of surface layers without...
- Publication number 20070228008
- Publication date Oct 4, 2007
- University of Houston
- John C. Wolfe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Multi-piece baffle plate assembly for a plasma processing system
- Publication number 20050241767
- Publication date Nov 3, 2005
- David S. Ferris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas distribution plate assembly for plasma reactors
- Publication number 20050150601
- Publication date Jul 14, 2005
- Aseem K. Srivastava
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA APPARATUS, GAS DISTRIBUTION ASSEMBLY FOR A PLASMA APPARATUS...
- Publication number 20040238123
- Publication date Dec 2, 2004
- Axcelis Technologies, Inc.
- Alan Frederick Becknell
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
PLASMA ASHING APPARATUS AND ENDPOINT DETECTION PROCESS
- Publication number 20040235299
- Publication date Nov 25, 2004
- Axcelis Technologies, Inc.
- Aseem Kumar Srivastava
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for micro-jet enabled, low-energy ion generati...
- Publication number 20040140053
- Publication date Jul 22, 2004
- Aseem Kumar Srivastava
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for micro-jet enabled, low-energy ion generati...
- Publication number 20020144785
- Publication date Oct 10, 2002
- Aseem Kumar Srivastava
- H01 - BASIC ELECTRIC ELEMENTS

Aseem K. Srivastava

Person

Patents Grantslast 30 patents

System and method for hi-precision ion implantation

Method for isolating gates in transistors

Method for implementing low dose implant in a plasma system

RF coupled plasma abatement system comprising an integrated power o...

Tuning hardware for plasma ashing apparatus and methods of use thereof

Plasma apparatus, gas distribution assembly for a plasma apparatus...

Plasma ashing apparatus and endpoint detection process

Gas distribution plate assembly for plasma reactors

Wide area radio frequency plasma apparatus for processing multiple...

Method and apparatus for micro-jet enabled, low energy ion generati...

Method and apparatus for micro-jet enabled, low-energy ion generati...

Dual plasma source for plasma process chamber

Plasma discharge device with dynamic tuning by a movable microwave...

Device for cooling electrodeless lamp with supersonic outlet jets a...

Patents Applicationslast 30 patents

METHOD FOR ISOLATING GATES IN TRANSISTORS

Method For Implementing Low Dose Implant In A Plasma System

METHOD AND APPARATUS FOR CLEANING RESIDUE FROM AN ION SOURCE COMPONENT

SUBSTANTIALLY NON-OXIDIZING PLASMA TREATMENT DEVICES AND PROCESSES

PLASMA GENERATING APPARATUS AND PROCESS FOR SIMULTANEOUS EXPOSURE O...

RF Coupled Plasma Abatement System Comprising an Integrated Power O...

Substantially Non-Oxidizing Plasma Treatment Devices and Processes

TUNING HARDWARE FOR PLASMA ASHING APPARATUS AND METHODS OF USE THEREOF

METHOD AND APPARATUS FOR CLEANING RESIDUE FROM AN ION SOURCE COMPONENT

WIDE AREA RADIO FREQUENCY PLASMA APPARATUS FOR PROCESSING MULTIPLE...

PLASMA ASHING APPARATUS AND ENDPOINT DETECTION PROCESS

Wide area radio frequency plasma apparatus for processing multiple...

Medium pressure plasma system for removal of surface layers without...

Multi-piece baffle plate assembly for a plasma processing system

Gas distribution plate assembly for plasma reactors

PLASMA APPARATUS, GAS DISTRIBUTION ASSEMBLY FOR A PLASMA APPARATUS...

PLASMA ASHING APPARATUS AND ENDPOINT DETECTION PROCESS

Method and apparatus for micro-jet enabled, low-energy ion generati...

Method and apparatus for micro-jet enabled, low-energy ion generati...