Ashok Sinha

Person

Foster City, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for growing thin oxide films on silicon while...
- Patent number 8,236,706
- Issue date Aug 7, 2012
- Mattson Technology, Inc.
- Bruce W. Peuse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Removal of process residues on the backside of a substrate
- Patent number 8,083,963
- Issue date Dec 27, 2011
- Applied Materials, Inc.
- Gerardo A. Delgadino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low-cost multi-junction solar cells and methods for their production
- Patent number 8,084,683
- Issue date Dec 27, 2011
- Ashok Sinha
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Methods to avoid unstable plasma states during a process transition
- Patent number 8,048,806
- Issue date Nov 1, 2011
- Applied Materials, Inc.
- Michael C. Kutney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for depositing tungsten-containing layers by vapor depositio...
- Patent number 7,709,385
- Issue date May 4, 2010
- Applied Materials, Inc.
- Ming Xi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming tungsten materials during vapor deposition proce...
- Patent number 7,674,715
- Issue date Mar 9, 2010
- Applied Materials, Inc.
- Moris Kori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Formation of composite tungsten films
- Patent number 7,605,083
- Issue date Oct 20, 2009
- Applied Materials, Inc.
- Ken K. Lai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electro-chemical deposition system
- Patent number 7,497,932
- Issue date Mar 3, 2009
- Applied Materials, Inc.
- Yezdi Dordi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for forming tungsten materials during vapor deposition proce...
- Patent number 7,465,666
- Issue date Dec 16, 2008
- Applied Materials, Inc.
- Moris Kori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing tungsten-containing layers by vapor depositio...
- Patent number 7,465,665
- Issue date Dec 16, 2008
- Applied Materials, Inc.
- Ming Xi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Formation of composite tungsten films
- Patent number 7,384,867
- Issue date Jun 10, 2008
- Applied Materials, Inc.
- Ken K. Lai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device interconnect fabricating techniques
- Patent number 7,312,146
- Issue date Dec 25, 2007
- Applied Materials, Inc.
- Robin W. Cheung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma dielectric etch process including ex-situ backside polymer r...
- Patent number 7,276,447
- Issue date Oct 2, 2007
- Applied Materials, Inc.
- Gerardo A. Delgadino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming tungsten materials during vapor deposition proce...
- Patent number 7,235,486
- Issue date Jun 26, 2007
- Applied Materials, Inc.
- Moris Kori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing tungsten-containing layers by vapor depositio...
- Patent number 7,220,673
- Issue date May 22, 2007
- Applied Materials, Inc.
- Ming Xi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing dielectric materials including oxygen-doped si...
- Patent number 7,151,053
- Issue date Dec 19, 2006
- Applied Materials, Inc.
- Ju-Hyung Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for controlling the presence of fluorine in refra...
- Patent number 7,115,494
- Issue date Oct 3, 2006
- Applied Materials, Inc.
- Ashok Sinha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for depositing refractory metal layers employi...
- Patent number 7,101,795
- Issue date Sep 5, 2006
- Applied Materials, Inc.
- Ming Xi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for controlling the presence of fluorine in refra...
- Patent number 7,033,922
- Issue date Apr 25, 2006
- Applied Materials Inc.
- Moris Kori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-step magnetron sputtering process
- Patent number 6,991,709
- Issue date Jan 31, 2006
- Applied Materials, Inc.
- Praburam Gopalraja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Formation of composite tungsten films
- Patent number 6,939,804
- Issue date Sep 6, 2005
- Applied Materials, Inc.
- Ken K. Lai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of delivering activated species for rapid cyclical deposition
- Patent number 6,905,737
- Issue date Jun 14, 2005
- Applied Materials, Inc.
- Donald J. Verplancken
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of conditioning electrochemical baths in plating technology
- Patent number 6,893,548
- Issue date May 17, 2005
- Applied Materials Inc.
- Robin Cheung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing dielectric materials in damascene applications
- Patent number 6,890,850
- Issue date May 10, 2005
- Applied Materials, Inc.
- Ju-Hyung Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method to form a composite film stack utilizing sequenti...
- Patent number 6,849,545
- Issue date Feb 1, 2005
- Applied Materials, Inc.
- Alfred W. Mak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Monitoring dimensions of features at different locations in the pro...
- Patent number 6,829,056
- Issue date Dec 7, 2004
- Michael Barnes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Operating a magnetron sputter reactor in two modes
- Patent number 6,787,006
- Issue date Sep 7, 2004
- Applied Materials, Inc.
- Praburam Gopalraja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electro-chemical deposition system
- Patent number 6,635,157
- Issue date Oct 21, 2003
- Applied Materials, Inc.
- Yezdi Dordi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Bifurcated deposition process for depositing refractory metal layer...
- Patent number 6,551,929
- Issue date Apr 22, 2003
- Applied Materials, Inc.
- Moris Kori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electroplating apparatus using a perforated phosphorus doped consum...
- Patent number 6,503,375
- Issue date Jan 7, 2003
- Applied Materials, Inc.
- Dan Maydan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR GROWING THIN OXIDE FILMS ON SILICON WHILE...
- Publication number 20120298039
- Publication date Nov 29, 2012
- Mattson Technology, Inc.
- Bruce W. Peuse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR GROWING THIN OXIDE FILMS ON SILICON WHILE...
- Publication number 20100151694
- Publication date Jun 17, 2010
- Mattson Technology, Inc.
- Bruce W. Peuse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DEPOSITING TUNGSTEN-CONTAINING LAYERS BY VAPOR DEPOSITIO...
- Publication number 20090156003
- Publication date Jun 18, 2009
- MING XI
- C30 - CRYSTAL GROWTH
Information Patent Application
LOW-COST SOLAR CELLS AND METHODS FOR THEIR PRODUCTION
- Publication number 20090120492
- Publication date May 14, 2009
- Ashok Sinha
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
LOW-COST MULTI-JUNCTION SOLAR CELLS AND METHODS FOR THEIR PRODUCTION
- Publication number 20090120493
- Publication date May 14, 2009
- Ashok Sinha
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
FORMATION OF COMPOSITE TUNGSTEN FILMS
- Publication number 20080227291
- Publication date Sep 18, 2008
- KEN K. LAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOVAL OF PROCESS RESIDUES ON THE BACKSIDE OF A SUBSTRATE
- Publication number 20080194111
- Publication date Aug 14, 2008
- APPLIED MATERIALS, INC.
- Gerardo A. Delgadino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING TUNGSTEN MATERIALS DURING VAPOR DEPOSITION PROCE...
- Publication number 20070254481
- Publication date Nov 1, 2007
- Moris Kori
- C30 - CRYSTAL GROWTH
Information Patent Application
PLASMA DIELECTRIC ETCH PROCESS INCLUDING EX-SITU BACKSIDE POLYMER R...
- Publication number 20070238305
- Publication date Oct 11, 2007
- APPLIED MATERIALS, INC.
- Gerardo A. Delgadino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR DEPOSITING TUNGSTEN-CONTAINING LAYERS BY VAPOR DEPOSITIO...
- Publication number 20070218688
- Publication date Sep 20, 2007
- Ming Xi
- C30 - CRYSTAL GROWTH
Information Patent Application
Controlled multi-step magnetron sputtering process
- Publication number 20070095654
- Publication date May 3, 2007
- Applied Materials, Inc.
- Praburam Gopalraja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods to avoid unstable plasma states during a process transition
- Publication number 20070066064
- Publication date Mar 22, 2007
- Applied Materials, Inc.
- Michael C. Kutney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method to reduce plasma-induced charging damage
- Publication number 20070048882
- Publication date Mar 1, 2007
- APPLIED MATERIALS, INC.
- Michael C. Kutney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-FREQUENCY PLASMA ENHANCED PROCESS CHAMBER HAVING A TOROIDAL P...
- Publication number 20070017897
- Publication date Jan 25, 2007
- Applied Materials, Inc.
- Ashok K. Sinha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING TUNGSTEN MATERIALS DURING VAPOR DEPOSITION PROCE...
- Publication number 20060292874
- Publication date Dec 28, 2006
- Moris Kori
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR DEPOSITING TUNGSTEN-CONTAINING LAYERS BY VAPOR DEPOSITIO...
- Publication number 20060264031
- Publication date Nov 23, 2006
- Ming Xi
- C30 - CRYSTAL GROWTH
Information Patent Application
Electro-chemical deposition system
- Publication number 20060246690
- Publication date Nov 2, 2006
- APPLIED MATERIALS, INC.
- Yezdi Dordi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method and system for controlling the presence of fluorine in refra...
- Publication number 20060128132
- Publication date Jun 15, 2006
- APPLIED MATERIALS, INC.
- Ashok Sinha
- C30 - CRYSTAL GROWTH
Information Patent Application
Semiconductor device interconnect fabricating techniques
- Publication number 20060063370
- Publication date Mar 23, 2006
- APPLIED MATERIALS, INC.
- Robin W. Cheung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Activated species generator for rapid cycle deposition processes
- Publication number 20060035025
- Publication date Feb 16, 2006
- APPLIED MATERIALS, INC.
- Donald J. Verplancken
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi-frequency plasma enhanced process chamber having a torroidal...
- Publication number 20060027329
- Publication date Feb 9, 2006
- Ashok K. Sinha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Formation of composite tungsten films
- Publication number 20050287807
- Publication date Dec 29, 2005
- APPLIED MATERIALS, INC.
- Ken K. Lai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Controlled multi-step magnetron sputtering process
- Publication number 20050255700
- Publication date Nov 17, 2005
- Praburam Gopalraja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of depositing dielectric materials in damascene applications
- Publication number 20050233576
- Publication date Oct 20, 2005
- Ju-Hyung Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi-step magnetron sputtering process
- Publication number 20050056536
- Publication date Mar 17, 2005
- Praburam Gopalraja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and system for controlling the presence of fluorine in refra...
- Publication number 20050059241
- Publication date Mar 17, 2005
- Moris Kori
- C30 - CRYSTAL GROWTH
Information Patent Application
Method and apparatus for depositing refractory metal layers employi...
- Publication number 20040209465
- Publication date Oct 21, 2004
- APPLIED MATERIALS, INC.
- Ming Xi
- C30 - CRYSTAL GROWTH
Information Patent Application
Electro-chemical deposition system
- Publication number 20040084301
- Publication date May 6, 2004
- APPLIED MATERIALS, INC.
- Yezdi Dordi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Apparatus for electro chemical deposition of copper metallization w...
- Publication number 20040079633
- Publication date Apr 29, 2004
- APPLIED MATERIALS, INC.
- Robin Cheung
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Activated species generator for rapid cycle deposition processes
- Publication number 20040071897
- Publication date Apr 15, 2004
- APPLIED MATERIALS, INC.
- Donald J. Verplancken
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Ashok Sinha

Person

Patents Grantslast 30 patents

Method and apparatus for growing thin oxide films on silicon while...

Removal of process residues on the backside of a substrate

Low-cost multi-junction solar cells and methods for their production

Methods to avoid unstable plasma states during a process transition

Method for depositing tungsten-containing layers by vapor depositio...

Method for forming tungsten materials during vapor deposition proce...

Formation of composite tungsten films

Electro-chemical deposition system

Method for forming tungsten materials during vapor deposition proce...

Method for depositing tungsten-containing layers by vapor depositio...

Formation of composite tungsten films

Semiconductor device interconnect fabricating techniques

Plasma dielectric etch process including ex-situ backside polymer r...

Method for forming tungsten materials during vapor deposition proce...

Method for depositing tungsten-containing layers by vapor depositio...

Method of depositing dielectric materials including oxygen-doped si...

Method and system for controlling the presence of fluorine in refra...

Method and apparatus for depositing refractory metal layers employi...

Method and system for controlling the presence of fluorine in refra...

Multi-step magnetron sputtering process

Formation of composite tungsten films

Method of delivering activated species for rapid cyclical deposition

Method of conditioning electrochemical baths in plating technology

Method of depositing dielectric materials in damascene applications

System and method to form a composite film stack utilizing sequenti...

Monitoring dimensions of features at different locations in the pro...

Operating a magnetron sputter reactor in two modes

Electro-chemical deposition system

Bifurcated deposition process for depositing refractory metal layer...

Electroplating apparatus using a perforated phosphorus doped consum...

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR GROWING THIN OXIDE FILMS ON SILICON WHILE...

METHOD AND APPARATUS FOR GROWING THIN OXIDE FILMS ON SILICON WHILE...

METHOD FOR DEPOSITING TUNGSTEN-CONTAINING LAYERS BY VAPOR DEPOSITIO...

LOW-COST SOLAR CELLS AND METHODS FOR THEIR PRODUCTION

LOW-COST MULTI-JUNCTION SOLAR CELLS AND METHODS FOR THEIR PRODUCTION

FORMATION OF COMPOSITE TUNGSTEN FILMS

REMOVAL OF PROCESS RESIDUES ON THE BACKSIDE OF A SUBSTRATE

METHOD FOR FORMING TUNGSTEN MATERIALS DURING VAPOR DEPOSITION PROCE...

PLASMA DIELECTRIC ETCH PROCESS INCLUDING EX-SITU BACKSIDE POLYMER R...

METHOD FOR DEPOSITING TUNGSTEN-CONTAINING LAYERS BY VAPOR DEPOSITIO...

Controlled multi-step magnetron sputtering process

Methods to avoid unstable plasma states during a process transition

Method to reduce plasma-induced charging damage

MULTI-FREQUENCY PLASMA ENHANCED PROCESS CHAMBER HAVING A TOROIDAL P...

METHOD FOR FORMING TUNGSTEN MATERIALS DURING VAPOR DEPOSITION PROCE...

METHOD FOR DEPOSITING TUNGSTEN-CONTAINING LAYERS BY VAPOR DEPOSITIO...

Electro-chemical deposition system

Method and system for controlling the presence of fluorine in refra...

Semiconductor device interconnect fabricating techniques

Activated species generator for rapid cycle deposition processes

Multi-frequency plasma enhanced process chamber having a torroidal...

Formation of composite tungsten films

Controlled multi-step magnetron sputtering process

Method of depositing dielectric materials in damascene applications

Multi-step magnetron sputtering process

Method and system for controlling the presence of fluorine in refra...

Method and apparatus for depositing refractory metal layers employi...

Electro-chemical deposition system

Apparatus for electro chemical deposition of copper metallization w...

Activated species generator for rapid cycle deposition processes