Atsushi Shiokawa

Person

  • Tokyo, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Control device, control system, control method, recording medium an...

    • Patent number 11,396,876
    • Issue date Jul 26, 2022
    • Ebara Corporation
    • Keiji Maishigi
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Vacuum evacuation system

    • Patent number 10,978,315
    • Issue date Apr 13, 2021
    • Ebara Corporation
    • Atsushi Shiokawa
    • G05 - CONTROLLING REGULATING
  • Information Patent Grant

    Turbo-molecular pump

    • Patent number 6,589,009
    • Issue date Jul 8, 2003
    • Ebara Corporation
    • Atsushi Shiokawa
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Magnetic suspending device controlled by temperature of controlled...

    • Patent number 6,307,294
    • Issue date Oct 23, 2001
    • Ebara Corporation
    • Atsusi Ooyama
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Turbomolecular pump

    • Patent number 6,220,831
    • Issue date Apr 24, 2001
    • Ebara Corporation
    • Atsushi Shiokawa
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Turbomolecular pump

    • Patent number 6,217,278
    • Issue date Apr 17, 2001
    • Ebara Corporation
    • Atsushi Shiokawa
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Turbomolecular pump

    • Patent number 6,062,810
    • Issue date May 16, 2000
    • Ebara Corporation
    • Matsutaro Miyamoto
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...

Patents Applicationslast 30 patents

  • Information Patent Application

    VACUUM EVACUATION SYSTEM

    • Publication number 20200109470
    • Publication date Apr 9, 2020
    • EBARA CORPORATION
    • Masanobu SAITO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CONTROL DEVICE, CONTROL SYSTEM, CONTROL METHOD, RECORDING MEDIUM AN...

    • Publication number 20190368490
    • Publication date Dec 5, 2019
    • EBARA CORPORATION
    • Keiji Maishigi
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    VACUUM EVACUATION SYSTEM

    • Publication number 20170200622
    • Publication date Jul 13, 2017
    • EBARA CORPORATION
    • Atsushi SHIOKAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VACUUM PUMP

    • Publication number 20160265532
    • Publication date Sep 15, 2016
    • EBARA CORPORATION
    • Atsushi SHIOKAWA
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Turbo-molecular pump

    • Publication number 20030017047
    • Publication date Jan 23, 2003
    • EBARA CORPORATION
    • Atsushi Shiokawa
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...