Avi Tepman

Person

Cupertino, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for sputtering onto large flat panels
- Patent number 8,500,975
- Issue date Aug 6, 2013
- Applied Materials, Inc.
- Hien Minh Huu Le
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coils for generating a plasma and for sputtering
- Patent number 8,398,832
- Issue date Mar 19, 2013
- Applied Materials Inc.
- Jaim Nulman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Scrubber box and methods for using the same
- Patent number 7,774,887
- Issue date Aug 17, 2010
- Applied Materials, Inc.
- Joseph Yudovsky
- B08 - CLEANING
Information Patent Grant
Staggered target tiles
- Patent number 7,550,066
- Issue date Jun 23, 2009
- Applied Materials, Inc.
- Avi Tepman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Two dimensional magnetron scanning for flat panel sputtering
- Patent number 7,513,982
- Issue date Apr 7, 2009
- Applied Materials, Inc.
- Avi Tepman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electro-chemical deposition system
- Patent number 7,497,932
- Issue date Mar 3, 2009
- Applied Materials, Inc.
- Yezdi Dordi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Pad conditioning head for CMP process
- Patent number 7,459,056
- Issue date Dec 2, 2008
- Applied Materials, Inc.
- Alexander S Polyak
- B24 - GRINDING POLISHING
Information Patent Grant
Scrubber box
- Patent number 7,377,002
- Issue date May 27, 2008
- Applied Materials, Inc.
- Joseph Yudovsky
- B08 - CLEANING
Information Patent Grant
Pad conditioning head for CMP process
- Patent number 7,288,165
- Issue date Oct 30, 2007
- Applied Materials, Inc.
- Alexander S Polyak
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate centering apparatus and method
- Patent number 7,256,132
- Issue date Aug 14, 2007
- Applied Materials, Inc.
- Alexander Lerner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stable cell platform
- Patent number 7,114,693
- Issue date Oct 3, 2006
- Applied Materials, Inc.
- Donald J. K. Olgado
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Slurry delivery arm
- Patent number 6,939,210
- Issue date Sep 6, 2005
- Applied Materials, Inc.
- Alexander S. Polyak
- B24 - GRINDING POLISHING
Information Patent Grant
Lift pin alignment and operation methods and apparatus
- Patent number 6,935,466
- Issue date Aug 30, 2005
- Applied Materials, Inc.
- Dmitry Lubomirsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cooling system for magnetron sputtering apparatus
- Patent number 6,881,310
- Issue date Apr 19, 2005
- Applied Materials, Inc.
- Avi Tepman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Clamshell and small volume chamber with fixed substrate support
- Patent number 6,866,746
- Issue date Mar 15, 2005
- Applied Materials, Inc.
- Lawrence C. Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coils for generating a plasma and for sputtering
- Patent number 6,783,639
- Issue date Aug 31, 2004
- Applied Materials
- Jaim Nulman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Variable flow deposition apparatus and method in semiconductor subs...
- Patent number 6,777,352
- Issue date Aug 17, 2004
- Applied Materials, Inc.
- Avi Tepman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System for planarizing metal conductive layers
- Patent number 6,770,565
- Issue date Aug 3, 2004
- Applied Materials Inc.
- Donald J. K. Olgado
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Robot blade with dual offset wafer supports
- Patent number 6,722,834
- Issue date Apr 20, 2004
- Applied Materials, Inc.
- Avi Tepman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for wafer rinse and clean and edge etching
- Patent number 6,689,418
- Issue date Feb 10, 2004
- Applied Materials Inc.
- Donald J. K. Olgado
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Cooling system for magnetron sputtering apparatus
- Patent number 6,641,701
- Issue date Nov 4, 2003
- Applied Materials, Inc.
- Avi Tepman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electro-chemical deposition system
- Patent number 6,635,157
- Issue date Oct 21, 2003
- Applied Materials, Inc.
- Yezdi Dordi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Resonant chamber applicator for remote plasma source
- Patent number 6,603,269
- Issue date Aug 5, 2003
- Applied Materials, Inc.
- Be Van Vo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple blade robot adjustment apparatus and associated method
- Patent number 6,571,657
- Issue date Jun 3, 2003
- Applied Materials Inc.
- Donald J. Olgado
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of reducing the cleaning requirements of a dielectric chuck...
- Patent number 6,509,069
- Issue date Jan 21, 2003
- Applied Materials, Inc.
- Robert E. Davenport
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual buffer chamber cluster tool for semiconductor wafer processing
- Patent number 6,440,261
- Issue date Aug 27, 2002
- Applied Materials, Inc.
- Avi Tepman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for accurate placement of semiconductor wafers...
- Patent number 6,430,468
- Issue date Aug 6, 2002
- Applied Materials, Inc.
- Avi Tepman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature controlled gas distribution plate
- Patent number 6,379,466
- Issue date Apr 30, 2002
- Applied Materials, Inc.
- Turgut Sahin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coils for generating a plasma and for sputtering
- Patent number 6,368,469
- Issue date Apr 9, 2002
- Applied Materials, Inc.
- Jaim Nulman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alternate steps of IMP and sputtering process to improve sidewall c...
- Patent number 6,350,353
- Issue date Feb 26, 2002
- Applied Materials, Inc.
- Praburam Gopalraja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
COILS FOR GENERATING A PLASMA AND FOR SPUTTERING
- Publication number 20130168232
- Publication date Jul 4, 2013
- Jaim NULMAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLOW CONTROL MODULE FOR A FLUID DELIVERY SYSTEM
- Publication number 20100084023
- Publication date Apr 8, 2010
- Chris Melcer
- B24 - GRINDING POLISHING
Information Patent Application
BATCH EQUIPMENT ROBOTS AND METHODS OF ARRAY TO ARRAY WORK-PIECE TRA...
- Publication number 20080292433
- Publication date Nov 27, 2008
- Robert Z. Bachrach
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATCH EQUIPMENT ROBOTS AND METHODS OF STACK TO ARRAY WORK-PIECE TRA...
- Publication number 20080279672
- Publication date Nov 13, 2008
- Robert Z. Bachrach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BATCH EQUIPMENT ROBOTS AND METHODS WITHIN EQUIPMENT WORK-PIECE TRAN...
- Publication number 20080279658
- Publication date Nov 13, 2008
- Robert Z. Bachrach
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SCRUBBER BOX AND METHODS FOR USING THE SAME
- Publication number 20080210258
- Publication date Sep 4, 2008
- APPLIED MATERIALS, INC.
- Joseph Yudovsky
- B08 - CLEANING
Information Patent Application
PAD CONDITIONING HEAD FOR CMP PROCESS
- Publication number 20080057836
- Publication date Mar 6, 2008
- APPLIED MATERIALS, INC.
- Alexander S. Polyak
- B24 - GRINDING POLISHING
Information Patent Application
METHOD FOR PROCESSING A SUBSTRATE USING MULTIPLE FLUID DISTRIBTUION...
- Publication number 20080038998
- Publication date Feb 14, 2008
- Alexander S. Polyak
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for sputtering onto large flat panels
- Publication number 20070012562
- Publication date Jan 18, 2007
- Applied Materials, Inc.
- Hien Minh Huu Le
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electro-chemical deposition system
- Publication number 20060246690
- Publication date Nov 2, 2006
- APPLIED MATERIALS, INC.
- Yezdi Dordi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method for processing a substrate using multiple fluid distribution...
- Publication number 20060079156
- Publication date Apr 13, 2006
- APPLIED MATERIALS, INC.
- Alexander S. Polyak
- B24 - GRINDING POLISHING
Information Patent Application
Coils for generating a plasma and for sputtering
- Publication number 20060070875
- Publication date Apr 6, 2006
- APPLIED MATERIALS, INC.
- Jaim Nulman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method for two dimensional magnetron scanning for spu...
- Publication number 20060049040
- Publication date Mar 9, 2006
- APPLIED MATERIALS, INC.
- Avi Tepman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Staggered target tiles
- Publication number 20060006058
- Publication date Jan 12, 2006
- APPLIED MATERIALS, INC.
- Avi Tepman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Target tiles in a staggered array
- Publication number 20060006064
- Publication date Jan 12, 2006
- Avi Tepman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Slurry delivery arm
- Publication number 20050272352
- Publication date Dec 8, 2005
- APPLIED MATERIALS, INC.
- Alexander S. Polyak
- B24 - GRINDING POLISHING
Information Patent Application
Lift pin alignment and operation methods and apparatus
- Publication number 20050217586
- Publication date Oct 6, 2005
- APPLIED MATERIALS, INC.
- Dmitry Lubomirsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pad conditioning head for CMP process
- Publication number 20050167048
- Publication date Aug 4, 2005
- APPLIED MATERIALS, INC.
- Alexander S. Polyak
- B24 - GRINDING POLISHING
Information Patent Application
Two dimensional magnetron scanning for flat panel sputtering
- Publication number 20050145478
- Publication date Jul 7, 2005
- APPLIED MATERIALS, INC.
- Avi Tepman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Clamshell and small volume chamber with fixed substrate support
- Publication number 20050139160
- Publication date Jun 30, 2005
- APPLIED MATERIALS, INC.
- Lawrence C. Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Scrubber box and methods for using the same
- Publication number 20050087212
- Publication date Apr 28, 2005
- Joseph Yudovsky
- B08 - CLEANING
Information Patent Application
Coils for generating a plasma and for sputtering
- Publication number 20040256217
- Publication date Dec 23, 2004
- Jaim Nulman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Slurry delivery arm
- Publication number 20040229549
- Publication date Nov 18, 2004
- APPLIED MATERIALS, INC.
- Alexander S. Polyak
- B24 - GRINDING POLISHING
Information Patent Application
Electro-chemical deposition system
- Publication number 20040084301
- Publication date May 6, 2004
- APPLIED MATERIALS, INC.
- Yezdi Dordi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Apparatus for electro chemical deposition of copper metallization w...
- Publication number 20040079633
- Publication date Apr 29, 2004
- APPLIED MATERIALS, INC.
- Robin Cheung
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Cooling system for magnetron sputtering apparatus
- Publication number 20040045670
- Publication date Mar 11, 2004
- APPLIED MATERIALS, INC.
- Avi Tepman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Compact and high throughput semiconductor fabrication system
- Publication number 20040018070
- Publication date Jan 29, 2004
- Applied Materials, Inc.
- Jun Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Clamshell and small volume chamber with fixed substrate support
- Publication number 20030221780
- Publication date Dec 4, 2003
- Lawrence C. Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Variable flow deposition apparatus and method in semiconductor subs...
- Publication number 20030153177
- Publication date Aug 14, 2003
- APPLIED MATERIALS, INC.
- Avi Tepman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System for planarizing metal conductive layers
- Publication number 20030129850
- Publication date Jul 10, 2003
- Applied Materials,Inc
- Donald J.K. Olgado
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Method and apparatus for sputtering onto large flat panels

Coils for generating a plasma and for sputtering

Scrubber box and methods for using the same

Staggered target tiles

Two dimensional magnetron scanning for flat panel sputtering

Electro-chemical deposition system

Pad conditioning head for CMP process

Scrubber box

Pad conditioning head for CMP process

Substrate centering apparatus and method

Stable cell platform

Slurry delivery arm

Lift pin alignment and operation methods and apparatus

Cooling system for magnetron sputtering apparatus

Clamshell and small volume chamber with fixed substrate support

Coils for generating a plasma and for sputtering

Variable flow deposition apparatus and method in semiconductor subs...

System for planarizing metal conductive layers

Robot blade with dual offset wafer supports

Apparatus for wafer rinse and clean and edge etching

Cooling system for magnetron sputtering apparatus

Electro-chemical deposition system

Resonant chamber applicator for remote plasma source

Multiple blade robot adjustment apparatus and associated method

Method of reducing the cleaning requirements of a dielectric chuck...

Dual buffer chamber cluster tool for semiconductor wafer processing

Method and apparatus for accurate placement of semiconductor wafers...

Temperature controlled gas distribution plate

Coils for generating a plasma and for sputtering

Alternate steps of IMP and sputtering process to improve sidewall c...

Patents Applicationslast 30 patents

COILS FOR GENERATING A PLASMA AND FOR SPUTTERING

FLOW CONTROL MODULE FOR A FLUID DELIVERY SYSTEM

BATCH EQUIPMENT ROBOTS AND METHODS OF ARRAY TO ARRAY WORK-PIECE TRA...

BATCH EQUIPMENT ROBOTS AND METHODS OF STACK TO ARRAY WORK-PIECE TRA...

BATCH EQUIPMENT ROBOTS AND METHODS WITHIN EQUIPMENT WORK-PIECE TRAN...

SCRUBBER BOX AND METHODS FOR USING THE SAME

PAD CONDITIONING HEAD FOR CMP PROCESS

METHOD FOR PROCESSING A SUBSTRATE USING MULTIPLE FLUID DISTRIBTUION...

Method and apparatus for sputtering onto large flat panels

Electro-chemical deposition system

Method for processing a substrate using multiple fluid distribution...

Coils for generating a plasma and for sputtering

Apparatus and method for two dimensional magnetron scanning for spu...

Staggered target tiles

Target tiles in a staggered array

Slurry delivery arm

Lift pin alignment and operation methods and apparatus

Pad conditioning head for CMP process

Two dimensional magnetron scanning for flat panel sputtering

Clamshell and small volume chamber with fixed substrate support

Scrubber box and methods for using the same

Coils for generating a plasma and for sputtering

Slurry delivery arm

Electro-chemical deposition system

Apparatus for electro chemical deposition of copper metallization w...

Cooling system for magnetron sputtering apparatus

Compact and high throughput semiconductor fabrication system

Clamshell and small volume chamber with fixed substrate support

Variable flow deposition apparatus and method in semiconductor subs...

System for planarizing metal conductive layers