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Jhudong Township, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Method of inhibiting photoresist pattern collapse
Patent number
8,101,340
Issue date
Jan 24, 2012
Taiwan Semiconductor Manufacturing Co., Ltd.
Ching-Yu Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of making openings in a layer of a semiconductor device
Patent number
7,972,957
Issue date
Jul 5, 2011
Taiwan Semiconductor Manufacturing Company
Bang-Chein Ho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor using specific contact angle for immersion lithography
Patent number
7,948,096
Issue date
May 24, 2011
Taiwan Semiconductor Manufacturing Company, Ltd.
Bang-Ching Ho
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Scatterometric method of monitoring hot plate temperature and facil...
Patent number
7,751,025
Issue date
Jul 6, 2010
Taiwan Semiconductor Manufacturing Co., Ltd.
Li-Jui Chen
G01 - MEASURING TESTING
Information
Patent Grant
Method of forming a dual damascene structure
Patent number
7,749,904
Issue date
Jul 6, 2010
Taiwan Semiconductor Manufacturing Co., Ltd.
Bang-Chein Ho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photolithography method to prevent photoresist pattern collapse
Patent number
7,611,825
Issue date
Nov 3, 2009
Taiwan Semiconductor Manufacturing Company, Ltd.
Ching-Yu Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Water soluble negative tone photoresist
Patent number
7,524,607
Issue date
Apr 28, 2009
Taiwan Semiconductor Manufacturing Co., Ltd.
Bang-Chien Ho
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Via plug formation in dual damascene process
Patent number
7,452,822
Issue date
Nov 18, 2008
Taiwan Semiconductor Manufacturing Co., Ltd
Jen-Chieh Shih
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming a finely patterned resist
Patent number
7,419,771
Issue date
Sep 2, 2008
Taiwan Semiconductor Manufacturing Co., Ltd
Bang-Chein Ho
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Complementary replacement of material
Patent number
7,399,709
Issue date
Jul 15, 2008
Taiwan Semiconductor Manufacturing Co., Ltd.
Burn-Jeng Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for patterning micro features by using developable bottom an...
Patent number
7,341,939
Issue date
Mar 11, 2008
Taiwan Semiconductor Maunfacturing Co., Ltd.
Dah-Chung Oweyang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for manufacturing semiconductor devices using an...
Patent number
7,279,793
Issue date
Oct 9, 2007
Taiwan Semiconductor Manufacturing Company, Ltd.
Bang-Ching Ho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dual damascene process
Patent number
7,253,112
Issue date
Aug 7, 2007
Taiwan Semiconductor Manufacturing Co., Ltd.
Bang-Chien Ho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming a dual damascene structure
Patent number
7,241,682
Issue date
Jul 10, 2007
Taiwan Seminconductor Manufacturing Co., Ltd.
Bang-Chein Ho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Water soluble negative tone photoresist
Patent number
7,235,348
Issue date
Jun 26, 2007
Taiwan Semiconductor Manufacturing Co., Ltd
Bang-Chein Ho
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Dual damascene process with dummy features
Patent number
7,196,005
Issue date
Mar 27, 2007
Taiwan Semiconductor Manufacturing Company, Ltd.
Bang-Ching Ho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scatterometric method of monitoring hot plate temperature and facil...
Patent number
7,135,259
Issue date
Nov 14, 2006
Taiwan Semiconductor Manufacturing Co., Ltd.
Li-Jui Chen
G01 - MEASURING TESTING
Information
Patent Grant
Method using specific contact angle for immersion lithography
Patent number
7,119,035
Issue date
Oct 10, 2006
Taiwan Semiconductor Manufacturing Company, Ltd.
Bang-Ching Ho
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Contact hole printing by packing and unpacking
Patent number
7,094,686
Issue date
Aug 22, 2006
Taiwan Semiconductor Manufacturing Co., Ltd.
Dahchung Oweyang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Water soluble negative tone photoresist
Patent number
7,033,735
Issue date
Apr 25, 2006
Taiwan Semiconductor Manufacturing Co., Ltd
Bang-Chien Ho
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Contact hole printing by packing and unpacking
Patent number
6,998,198
Issue date
Feb 14, 2006
Taiwan Semiconductor Manufacturing Co., Ltd
Burn J. Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern compensation for stitching
Patent number
6,982,135
Issue date
Jan 3, 2006
Taiwan Semiconductor Manufacturing Co., Ltd.
Chung-Hsing Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Automatic schematic diagram generation using topology information
Patent number
6,980,211
Issue date
Dec 27, 2005
Springsoft, Inc.
Shyh-Chang Lin
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for preventing the etch transfer of sidelobes in contact hol...
Patent number
6,905,621
Issue date
Jun 14, 2005
Taiwan Semiconductor Manufacturing Co., Ltd
Bang-Chein Ho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming openings in a substrate using bottom antireflect...
Patent number
6,900,134
Issue date
May 31, 2005
Taiwan Semiconductor Manufacturing Co., Ltd.
Jen-Chieh Shih
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hole printing by packing and unpacking using alternating phase-shif...
Patent number
6,664,011
Issue date
Dec 16, 2003
Taiwan Semiconductor Manufacturing Company
Burn-Jeng Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Active trace debugging for hardware description languages
Patent number
6,546,526
Issue date
Apr 8, 2003
Springsoft, Inc.
Ming-Chih Lai
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Polymer with a pericyclic protective group and resist composition c...
Patent number
6,538,086
Issue date
Mar 25, 2003
Industrial Technology Research Institute
Sheng-Yueh Chang
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Plug filling for dual-damascene process
Patent number
6,488,509
Issue date
Dec 3, 2002
Taiwan Semiconductor Manufacturing Company
Bang-Chein Ho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cyclic dione polymer
Patent number
6,303,725
Issue date
Oct 16, 2001
Industrial Technology Research Institute
Sheng-Yueh Chang
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Patents Applications
last 30 patents
Information
Patent Application
Method of Inhibiting Photoresist Pattern Collapse
Publication number
20070264594
Publication date
Nov 15, 2007
Ching-Yu Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF FORMING A DUAL DAMASCENE STRUCTURE
Publication number
20070212877
Publication date
Sep 13, 2007
Taiwan Semiconductor Manufacturing Co., LTD
Bang-Chein Ho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of making openings in a layer of a semiconductor device
Publication number
20070202690
Publication date
Aug 30, 2007
Taiwan Semiconductor Manufacturing Co., Ltd.,
Bang-Chein Ho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Via plug formation in dual damascene process
Publication number
20070190778
Publication date
Aug 16, 2007
Taiwan Semiconductor Manufacturing Co., Ltd.
Jen-Chieh Shih
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Scatterometric method of monitoring hot plate temperature and facil...
Publication number
20070068453
Publication date
Mar 29, 2007
Taiwan Semiconductor Manufacturing Co., LTD
Li-Jui Chen
G01 - MEASURING TESTING
Information
Patent Application
Method for semiconductor manufacturing using a negative photoresist...
Publication number
20060228894
Publication date
Oct 12, 2006
Taiwan Semiconductor Manufacturing Company, Ltd.
Bang-Ching Ho
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Dual-damascene process for manufacturing semiconductor devices
Publication number
20060223309
Publication date
Oct 5, 2006
Taiwan Semiconductor Manufacturing Company, Ltd.
Bang-Ching Ho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for patterning micro features by using developable bottom an...
Publication number
20060189146
Publication date
Aug 24, 2006
Taiwan Semiconductor Manufacturing Co., Ltd.
Dah-Chung Oweyang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method using specific contact angle for immersion lithography
Publication number
20060189172
Publication date
Aug 24, 2006
Taiwan Semiconductor Manufacturing Company, Ltd.
Bang-Ching Ho
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Water soluble negative tone photoresist
Publication number
20060154177
Publication date
Jul 13, 2006
Taiwan Semiconductor Manufacturing Co., Ltd.
Bang-Chien Ho
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for forming a finely patterned resist
Publication number
20060154185
Publication date
Jul 13, 2006
Taiwan Semiconductor Manufacturing Co., Ltd.
Bang-Chein Ho
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
System and method for manufacturing semiconductor devices using an...
Publication number
20060118956
Publication date
Jun 8, 2006
Taiwan Semiconductor Manufacturing Company, Ltd.
Bang-Ching Ho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method using specific contact angle for immersion lithography
Publication number
20060110945
Publication date
May 25, 2006
Taiwan Semiconductor Manufacturing Company, Ltd.
Bang-Ching Ho
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Photolithography method to prevent photoresist pattern collapse
Publication number
20060057507
Publication date
Mar 16, 2006
Taiwan Semiconductor Manufacturing Company, Ltd.
Ching-Yu Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Dual damascene process with dummy features
Publication number
20060051958
Publication date
Mar 9, 2006
Taiwan Semiconductor Manufacturing Company, Ltd.
Bang-Ching Ho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of forming a dual damascene structure
Publication number
20050191840
Publication date
Sep 1, 2005
Bang-Chein Ho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for forming openings in a substrate using a packing and unpa...
Publication number
20050181313
Publication date
Aug 18, 2005
Jen-Chieh Shih
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for forming dual damascene interconnect structure
Publication number
20050170638
Publication date
Aug 4, 2005
Bang-Ching Ho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTACT HOLE PRINTING BY PACKING AND UNPACKING
Publication number
20050130410
Publication date
Jun 16, 2005
Dahchung Oweyang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Water soluble negative tone photoresist
Publication number
20050106493
Publication date
May 19, 2005
Taiwan Semiconductor Manufacturing Co.
Bang-Chien Ho
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Dual damascene process
Publication number
20050014362
Publication date
Jan 20, 2005
Bang-Chien Ho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Scatterometric method of monitoring hot plate temperature and facil...
Publication number
20040241561
Publication date
Dec 2, 2004
Li-Jui Chen
G01 - MEASURING TESTING
Information
Patent Application
Water soluble negative tone photoresist
Publication number
20040234897
Publication date
Nov 25, 2004
Taiwan Semicondutor Manufacturing Co.
Bang-Chein Ho
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Pattern compensation for stitching
Publication number
20040191643
Publication date
Sep 30, 2004
Chung-Hsing Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for preventing the etch transfer of sidelobes in contact hol...
Publication number
20040069745
Publication date
Apr 15, 2004
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Bang-Chein Ho
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Automatic schematic diagram generation using topology information
Publication number
20030222872
Publication date
Dec 4, 2003
Shyh-Chang Lin
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Contact hole printing by packing and unpacking
Publication number
20030104319
Publication date
Jun 5, 2003
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Burn J. Lin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Hole printing by packing and unpacking using alternating phase-shif...
Publication number
20030104286
Publication date
Jun 5, 2003
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Burn-Jeng Lin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Active trace debugging for hardware description languages
Publication number
20020100001
Publication date
Jul 25, 2002
Ming-Chih Lai
G06 - COMPUTING CALCULATING COUNTING