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Bart van Schravendijk
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Palo Alto, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Minimizing radical recombination using ALD silicon oxide surface co...
Patent number
11,920,239
Issue date
Mar 5, 2024
Lam Research Corporation
Bhadri N. Varadarajan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Tin oxide thin film spacers in semiconductor device manufacturing
Patent number
11,784,047
Issue date
Oct 10, 2023
Lam Research Corporation
David Charles Smith
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method to create air gaps
Patent number
11,637,037
Issue date
Apr 25, 2023
Lam Research Corporation
Patrick van Cleemput
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dielectric gapfill using atomic layer deposition (ALD), inhibitor p...
Patent number
11,293,098
Issue date
Apr 5, 2022
Lam Research Corporation
Joseph Abel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Tin oxide thin film spacers in semiconductor device manufacturing
Patent number
11,183,383
Issue date
Nov 23, 2021
Lam Research Corporation
David Charles Smith
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gapfill of variable aspect ratio features with a composite PEALD an...
Patent number
11,133,180
Issue date
Sep 28, 2021
Lam Research Corporation
Hu Kang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method to create air gaps
Patent number
11,088,019
Issue date
Aug 10, 2021
Lam Research Corporation
Patrick A. Van Cleemput
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Radical source design for remote plasma atomic layer deposition
Patent number
11,053,587
Issue date
Jul 6, 2021
Novellus Systems, Inc.
Bart J. van Schravendijk
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gap fill using carbon-based films
Patent number
11,049,716
Issue date
Jun 29, 2021
Lam Research Corporation
Wei Tang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Tin oxide thin film spacers in semiconductor device manufacturing
Patent number
11,031,245
Issue date
Jun 8, 2021
Lan Research Corporation
David Charles Smith
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for deposition and etch in gap fill
Patent number
10,957,514
Issue date
Mar 23, 2021
Lam Research Corporation
Akhil Singhal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective inhibition in atomic layer deposition of silicon-containi...
Patent number
10,804,099
Issue date
Oct 13, 2020
Lam Research Corporation
Jon Henri
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of encapsulation
Patent number
10,763,107
Issue date
Sep 1, 2020
Lam Research Corporation
Bart J. van Schravendijk
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Geometrically selective deposition of a dielectric film
Patent number
10,763,108
Issue date
Sep 1, 2020
Lam Research Corporation
Dennis M. Hausmann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective atomic layer deposition with post-dose treatment
Patent number
10,679,848
Issue date
Jun 9, 2020
Lam Research Corporation
Purushottam Kumar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Selective deposition of SiN on horizontal surfaces
Patent number
10,615,169
Issue date
Apr 7, 2020
Lam Research Corporation
Bart J. van Schravendijk
G11 - INFORMATION STORAGE
Information
Patent Grant
Staircase encapsulation in 3D NAND fabrication
Patent number
10,580,690
Issue date
Mar 3, 2020
Lam Research Corporation
Yongsik Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of encapsulation
Patent number
10,566,186
Issue date
Feb 18, 2020
Lam Research Corporation
Bart J. van Schravendijk
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for deposition and etch in gap fill
Patent number
10,373,806
Issue date
Aug 6, 2019
Lam Research Corporation
Akhil Singhal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gapfill of variable aspect ratio features with a composite PEALD an...
Patent number
10,361,076
Issue date
Jul 23, 2019
Lam Research Corporation
Hu Kang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor substrate processing apparatus including uniformity b...
Patent number
10,351,955
Issue date
Jul 16, 2019
Lam Research Corporation
Arun Keshavamurthy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Radical source design for remote plasma atomic layer deposition
Patent number
10,316,409
Issue date
Jun 11, 2019
Novellus Systems, Inc.
Bart J. van Schravendijk
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Systems and methods for creating airgap seals using atomic layer de...
Patent number
10,224,235
Issue date
Mar 5, 2019
Lam Research Corporation
Jason Daejin Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
PECVD apparatus for in-situ deposition of film stacks
Patent number
10,214,816
Issue date
Feb 26, 2019
Novellus Systems, Inc.
Jason Dirk Haverkamp
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Image reversal with AHM gap fill for multiple patterning
Patent number
10,192,759
Issue date
Jan 29, 2019
Lam Research Corporation
Nader Shamma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of encapsulation
Patent number
10,157,736
Issue date
Dec 18, 2018
Lam Research Corporation
Bart J. van Schravendijk
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ultra-high vacuum transport and storage
Patent number
10,153,282
Issue date
Dec 11, 2018
Lam Research Corporation
Theodoros Panagopoulos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated direct dielectric and metal deposition
Patent number
10,128,116
Issue date
Nov 13, 2018
Lam Research Corporation
William T. Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective atomic layer deposition with post-dose treatment
Patent number
10,062,563
Issue date
Aug 28, 2018
Lam Research Corporation
Purushottam Kumar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for selectively sealing ultra low-k porous dielectric layer...
Patent number
10,049,921
Issue date
Aug 14, 2018
Lam Research Corporation
Nerissa Sue Draeger
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
GRAPHENE-CAPPED COPPER IN DUAL DAMASCENE INTERCONNECT
Publication number
20240213159
Publication date
Jun 27, 2024
LAM RESEARCH CORPORATION
Asish Parbatani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
IN-SITU FILM ANNEALING IN SUBSTRATE PROCESSING
Publication number
20240167153
Publication date
May 23, 2024
LAM RESEARCH CORPORATION
Awnish Gupta
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING
Publication number
20240030031
Publication date
Jan 25, 2024
LAM RESEARCH CORPORATION
David Charles Smith
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS
Publication number
20230366094
Publication date
Nov 16, 2023
Novellus Systems, Inc.
Jason Dirk Haverkamp
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
IMPURITY REDUCTION IN SILICON-CONTAINING FILMS
Publication number
20230317449
Publication date
Oct 5, 2023
LAM RESEARCH CORPORATION
Awnish Gupta
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
REDUCING INTRALEVEL CAPACITANCE IN SEMICONDUCTOR DEVICES
Publication number
20230307290
Publication date
Sep 28, 2023
LAM RESEARCH CORPORATION
Joseph R. ABEL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONFORMAL THERMAL CVD WITH CONTROLLED FILM PROPERTIES AND HIGH DEPO...
Publication number
20230245896
Publication date
Aug 3, 2023
LAM RESEARCH CORPORATION
Awnish Gupta
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEAM MITIGATION AND INTEGRATED LINER FOR GAP FILL
Publication number
20230175117
Publication date
Jun 8, 2023
LAM RESEARCH CORPORATION
Dustin Zachary AUSTIN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MODULATION OF OXIDATION PROFILE FOR SUBSTRATE PROCESSING
Publication number
20230005740
Publication date
Jan 5, 2023
LAM RESEARCH CORPORATION
Gerald Joseph Brady
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SELECTIVE CARBON DEPOSITION
Publication number
20220235464
Publication date
Jul 28, 2022
LAM RESEARCH CORPORATION
Awnish GUPTA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DIELECTRIC GAPFILL USING ATOMIC LAYER DEPOSITION (ALD), INHIBITOR P...
Publication number
20220205096
Publication date
Jun 30, 2022
LAM RESEARCH CORPORATION
Joseph ABEL
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MODULATED ATOMIC LAYER DEPOSITION
Publication number
20220208543
Publication date
Jun 30, 2022
LAM RESEARCH CORPORATION
Chan Myae Myae Soe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ETCH STOP LAYER
Publication number
20220181141
Publication date
Jun 9, 2022
LAM RESEARCH CORPORATION
Bart J. van Schravendijk
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PROVIDING DOPED SILICON
Publication number
20220165563
Publication date
May 26, 2022
LAM RESEARCH CORPORATION
Purushottam KUMAR
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE CO...
Publication number
20220145459
Publication date
May 12, 2022
LAM RESEARCH CORPORATION
Bhadri N. Varadarajan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LOW STRESS FILMS FOR ADVANCED SEMICONDUCTOR APPLICATIONS
Publication number
20220068636
Publication date
Mar 3, 2022
LAM RESEARCH CORPORATION
Reza Bayati
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAPFILL OF VARIABLE ASPECT RATIO FEATURES WITH A COMPOSITE PEALD AN...
Publication number
20220059348
Publication date
Feb 24, 2022
LAM RESEARCH CORPORATION
Hu Kang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM STACK SIMPLIFICATION FOR HIGH ASPECT RATIO PATTERNING AND VERT...
Publication number
20220051938
Publication date
Feb 17, 2022
LAM RESEARCH CORPORATION
Hui-Jung Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING
Publication number
20220005694
Publication date
Jan 6, 2022
LAM RESEARCH CORPORATION
David Charles Smith
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BUBBLE DEFECT REDUCTION
Publication number
20220004103
Publication date
Jan 6, 2022
LAM RESEARCH CORPORATION
Akhil N. Singhal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD TO CREATE AIR GAPS
Publication number
20210343579
Publication date
Nov 4, 2021
LAM RESEARCH CORPORATION
Patrick A. Van Cleemput
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NITRIDE FILMS WITH IMPROVED ETCH SELECTIVITY FOR 3D NAND INTEGRATION
Publication number
20210320004
Publication date
Oct 14, 2021
LAM RESEARCH CORPORATION
Pramod Subramonium
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OXIDATIVE CONVERSION IN ATOMIC LAYER DEPOSITION PROCESSES
Publication number
20210272801
Publication date
Sep 2, 2021
LAM RESEARCH CORPORATION
Douglas Walter Agnew
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING
Publication number
20210242019
Publication date
Aug 5, 2021
LAM RESEARCH CORPORATION
David Charles Smith
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING
Publication number
20200219725
Publication date
Jul 9, 2020
LAM RESEARCH CORPORATION
David Charles Smith
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD TO CREATE AIR GAPS
Publication number
20200219758
Publication date
Jul 9, 2020
LAM RESEARCH CORPORATION
Patrick van Cleemput
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF ENCAPSULATION
Publication number
20200152452
Publication date
May 14, 2020
LAM RESEARCH CORPORATION
Bart J. van Schravendijk
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DIELECTRIC GAPFILL USING ATOMIC LAYER DEPOSITION (ALD), INHIBITOR P...
Publication number
20200017967
Publication date
Jan 16, 2020
LAM RESEARCH CORPORATION
Joseph ABEL
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND METHOD FOR DEPOSITION AND ETCH IN GAP FILL
Publication number
20190385820
Publication date
Dec 19, 2019
LAM RESEARCH CORPORATION
Akhil Singhal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS
Publication number
20190376186
Publication date
Dec 12, 2019
Novellus Systems, Inc.
Jason Dirk Haverkamp
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...