Bausan Yuan

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Fluid synthesis system
- Patent number 11,401,450
- Issue date Aug 2, 2022
- NIKON CORPORATION
- Takashi Nagata
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Motor with force constant modeling and identification for flexible...
- Patent number 11,223,303
- Issue date Jan 11, 2022
- Nikon Research Corporation of America
- Pai-Hsueh Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Neighborhood haze density estimation for single-image dehaze
- Patent number 10,477,128
- Issue date Nov 12, 2019
- Nikon Corporation
- Ripul Bhutani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for determining a commutation offset and for determining a c...
- Patent number 9,465,305
- Issue date Oct 11, 2016
- Nikon Corporation
- Pai-Hsueh Yang
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Method for determing a commutation offset and for determining a com...
- Patent number 9,013,134
- Issue date Apr 21, 2015
- Nikon Corporation
- Pai-Hsueh Yang
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Linearized control of piezoelectric actuator to reduce hysteresis
- Patent number 8,836,252
- Issue date Sep 16, 2014
- Nikon Corporation
- Yi-Ping Hsin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Projection optical device and exposure apparatus
- Patent number 8,767,172
- Issue date Jul 1, 2014
- Nikon Corporation
- Akimitsu Ebihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Direct derivative feedforward vibration compensation system
- Patent number 8,619,361
- Issue date Dec 31, 2013
- Nikon Corporation
- Yi-Ping Hsin
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Stage assembly with measurement system initialization, vibration co...
- Patent number 8,582,080
- Issue date Nov 12, 2013
- Nikon Corporation
- Michael Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
On-machine methods for identifying and compensating force-ripple an...
- Patent number 8,140,288
- Issue date Mar 20, 2012
- Nikon Corporation
- Pai-Hsueh Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Active-isolation mounts for optical elements
- Patent number 7,989,756
- Issue date Aug 2, 2011
- Nikon Corporation
- Shiang-Lung Koo
- G02 - OPTICS
Information Patent Grant
Interferometric position-measuring devices and methods
- Patent number 7,876,452
- Issue date Jan 25, 2011
- Nikon Corporation
- Michael R. Sogard
- G01 - MEASURING TESTING
Information Patent Grant
System for controlling a dual mover assembly for an exposure apparatus
- Patent number 7,583,361
- Issue date Sep 1, 2009
- Nikon Corporation
- Yi-Ping Hsin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage assembly with measurement system initialization, vibration co...
- Patent number 7,417,714
- Issue date Aug 26, 2008
- Nikon Corporation
- Michael Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Minimum force output control method for counter-mass with cable
- Patent number 7,366,642
- Issue date Apr 29, 2008
- Nikon Corporation
- Yi-Ping Hsin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Moving mechanism with high bandwidth response and low force transmi...
- Patent number 7,333,179
- Issue date Feb 19, 2008
- Nikon Corporation
- Bausan Yuan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
E/I core actuator commutation formula and control method
- Patent number 7,253,576
- Issue date Aug 7, 2007
- Nikon Corporation
- Pai-Hsueh Yang
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Fine force actuator assembly for chemical mechanical polishing appa...
- Patent number 7,172,493
- Issue date Feb 6, 2007
- Nikon Corporation
- W. Thomas Novak
- B24 - GRINDING POLISHING
Information Patent Grant
Image adjustor including damping assembly
- Patent number 7,061,577
- Issue date Jun 13, 2006
- Nikon Corporation
- Bausan Yuan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Auto-calibration of attraction-only type actuator commutations
- Patent number 7,034,474
- Issue date Apr 25, 2006
- Nikon Corporation
- Pai Hsueh Yang
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Reaction mass for a stage device
- Patent number 6,987,558
- Issue date Jan 17, 2006
- Nikon Corporation
- Bausan Yuan
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Stage counter mass system
- Patent number 6,963,821
- Issue date Nov 8, 2005
- Nikon Corporation
- Michael Binnard
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Following stage planar motor
- Patent number 6,927,505
- Issue date Aug 9, 2005
- Nikon Corporation
- Michael Binnard
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Fine force control of actuators for chemical mechanical polishing a...
- Patent number 6,855,032
- Issue date Feb 15, 2005
- Nikon Corporation
- Pai-Hsueh Yang
- B24 - GRINDING POLISHING
Information Patent Grant
Scanning exposure method with reduced time between scans
- Patent number 6,686,990
- Issue date Feb 3, 2004
- Nikon Corporation, Inc.
- Andrew J. Hazelton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Support assembly for an exposure apparatus
- Patent number 6,646,719
- Issue date Nov 11, 2003
- Nikon Corporation
- Martin E. Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Active vibration isolation system having pressure control
- Patent number 6,590,639
- Issue date Jul 8, 2003
- Nikon Corporation
- Bausan Yuan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for exposing a pattern onto an object with controlled sca...
- Patent number 6,509,953
- Issue date Jan 21, 2003
- Nikon Corporation
- Kazuaki Saiki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Guideless stage
- Patent number 6,486,941
- Issue date Nov 26, 2002
- Nikon Corporation
- Andrew J. Hazelton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Capacitive sensor calibration method and apparatus for opposing ele...
- Patent number 6,472,777
- Issue date Oct 29, 2002
- Nikon Corporation
- Ting-Chien Teng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND SYSTEMS FOR FORMING THREE-DIIMENSIONAL 3D MODELS OF OBJ...
- Publication number 20240161395
- Publication date May 16, 2024
- Nikon Corporation
- Chuanmao Fan
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FLUID SYNTHESIS SYSTEM
- Publication number 20190338174
- Publication date Nov 7, 2019
- Nikon Corporation
- Takashi Nagata
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
NEIGHBORHOOD HAZE DENSITY ESTIMATION FOR SINGLE-IMAGE DEHAZE
- Publication number 20180198998
- Publication date Jul 12, 2018
- Nikon Corporation
- Ripul Bhutani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LINEARIZED CONTROL OF PIEZOELECTRIC ACTUATOR TO REDUCE HYSTERESIS
- Publication number 20140055060
- Publication date Feb 27, 2014
- Nikon Corporation
- Yi-Ping Hsin
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
MEASUREMENT SYSTEM THAT INCLUDES AN ENCODER AND AN INTERFEROMETER
- Publication number 20130182235
- Publication date Jul 18, 2013
- Nikon Corporation
- Ping-Wei Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ISOLATION SYSTEM FOR AN OPTICAL ELEMENT OF AN EXPOSURE APPARATUS
- Publication number 20120127445
- Publication date May 24, 2012
- Akimitsu Ebihara
- G02 - OPTICS
Information Patent Application
METHOD FOR DETERMING A COMMUTATION OFFSET AND FOR DETERMINING A COM...
- Publication number 20120127447
- Publication date May 24, 2012
- Pai-Hsueh Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR DETERMINING A COMMUTATION OFFSET AND FOR DETERMINING A C...
- Publication number 20120113405
- Publication date May 10, 2012
- Pai-Hsueh Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DIRECT DERIVATIVE FEEDFORWARD VIBRATION COMPENSATION SYSTEM
- Publication number 20110242660
- Publication date Oct 6, 2011
- Yi-Ping Hsin
- G02 - OPTICS
Information Patent Application
Projection optical device and exposure apparatus
- Publication number 20110043781
- Publication date Feb 24, 2011
- Nikon Corporation
- Akimitsu Ebihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ACTIVE-ISOLATION MOUNTS FOR OPTICAL ELEMENTS
- Publication number 20090237793
- Publication date Sep 24, 2009
- NIKON CORPORATION
- Shiang-Lung Koo
- G02 - OPTICS
Information Patent Application
INTERFEROMETRIC POSITION-MEASURING DEVICES AND METHODS
- Publication number 20080291464
- Publication date Nov 27, 2008
- NIKON CORPORATION
- Michael R. Sogard
- G01 - MEASURING TESTING
Information Patent Application
STAGE ASSEMBLY WITH MEASUREMENT SYSTEM INITIALIZATION, VIBRATION CO...
- Publication number 20080278705
- Publication date Nov 13, 2008
- Michael Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
On-machine methods for identifying and compensating force-ripple an...
- Publication number 20080275661
- Publication date Nov 6, 2008
- NIKON CORPORATION
- Pai-Hsueh Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and system for predicting and correcting signal fluctuations...
- Publication number 20080109178
- Publication date May 8, 2008
- Nikon Corporation
- Michael R. Sogard
- G01 - MEASURING TESTING
Information Patent Application
Projection Optical Device And Exposure Apparatus
- Publication number 20080068568
- Publication date Mar 20, 2008
- Nikon Corporation
- Akimitsu Ebihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Hexapod kinematic mountings for optical elements, and optical syste...
- Publication number 20070284502
- Publication date Dec 13, 2007
- NIKON CORPORATION
- Yi-Ping Hsin
- G02 - OPTICS
Information Patent Application
Anti-Gravity Device for Supporting Weight and Reducing Transmissibi...
- Publication number 20070236854
- Publication date Oct 11, 2007
- Martin E. Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System for controlling a dual mover assembly for an exposure apparatus
- Publication number 20070211237
- Publication date Sep 13, 2007
- NIKON CORPORATION
- Yi-Ping Hsin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic System with Separated Isolation Structures
- Publication number 20070115451
- Publication date May 24, 2007
- Nikon Corporation
- Bausan Yuan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Active damper with counter mass to compensate for structural vibrat...
- Publication number 20070097340
- Publication date May 3, 2007
- Nikon Corporation
- Bausan Yuan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Low spring constant, pneumatic suspension with vacuum chamber, air...
- Publication number 20070030462
- Publication date Feb 8, 2007
- Nikon Corporation
- Bausan Yuan
- G02 - OPTICS
Information Patent Application
Minimum force output control method for counter-mass with cable
- Publication number 20060241873
- Publication date Oct 26, 2006
- Nikon Corporation
- Yi-Ping Hsin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Linear motor force ripple identification and compensation with iter...
- Publication number 20060170382
- Publication date Aug 3, 2006
- Nikon Corporation
- Pai-Hsueh Yang
- G05 - CONTROLLING REGULATING
Information Patent Application
Stage assembly with measurement system initialization, vibration co...
- Publication number 20060101928
- Publication date May 18, 2006
- Michael Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage assembly including a stage having increased vertical stroke
- Publication number 20060061751
- Publication date Mar 23, 2006
- Ting-Chien Teng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic system with separated isolation structures
- Publication number 20060038972
- Publication date Feb 23, 2006
- Nikon Corporation
- Bausan Yuan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Fine force actuator assembly for chemical mechanical polishing appa...
- Publication number 20060035564
- Publication date Feb 16, 2006
- NIKON CORPORATION
- W. Thomas Novak
- B24 - GRINDING POLISHING
Information Patent Application
Moving mechanism with high bandwidth response and low force transmi...
- Publication number 20060033903
- Publication date Feb 16, 2006
- Nikon Corporation
- Bausan Yuan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Real-time through lens image measurement system and method
- Publication number 20050286050
- Publication date Dec 29, 2005
- Nikon Corporation
- Bausan Yuan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Bausan Yuan

Person

Patents Grantslast 30 patents

Fluid synthesis system

Motor with force constant modeling and identification for flexible...

Neighborhood haze density estimation for single-image dehaze

Method for determining a commutation offset and for determining a c...

Method for determing a commutation offset and for determining a com...

Linearized control of piezoelectric actuator to reduce hysteresis

Projection optical device and exposure apparatus

Direct derivative feedforward vibration compensation system

Stage assembly with measurement system initialization, vibration co...

On-machine methods for identifying and compensating force-ripple an...

Active-isolation mounts for optical elements

Interferometric position-measuring devices and methods

System for controlling a dual mover assembly for an exposure apparatus

Stage assembly with measurement system initialization, vibration co...

Minimum force output control method for counter-mass with cable

Moving mechanism with high bandwidth response and low force transmi...

E/I core actuator commutation formula and control method

Fine force actuator assembly for chemical mechanical polishing appa...

Image adjustor including damping assembly

Auto-calibration of attraction-only type actuator commutations

Reaction mass for a stage device

Stage counter mass system

Following stage planar motor

Fine force control of actuators for chemical mechanical polishing a...

Scanning exposure method with reduced time between scans

Support assembly for an exposure apparatus

Active vibration isolation system having pressure control

Apparatus for exposing a pattern onto an object with controlled sca...

Guideless stage

Capacitive sensor calibration method and apparatus for opposing ele...

Patents Applicationslast 30 patents

METHODS AND SYSTEMS FOR FORMING THREE-DIIMENSIONAL 3D MODELS OF OBJ...

FLUID SYNTHESIS SYSTEM

NEIGHBORHOOD HAZE DENSITY ESTIMATION FOR SINGLE-IMAGE DEHAZE

LINEARIZED CONTROL OF PIEZOELECTRIC ACTUATOR TO REDUCE HYSTERESIS

MEASUREMENT SYSTEM THAT INCLUDES AN ENCODER AND AN INTERFEROMETER

ISOLATION SYSTEM FOR AN OPTICAL ELEMENT OF AN EXPOSURE APPARATUS

METHOD FOR DETERMING A COMMUTATION OFFSET AND FOR DETERMINING A COM...

METHOD FOR DETERMINING A COMMUTATION OFFSET AND FOR DETERMINING A C...

DIRECT DERIVATIVE FEEDFORWARD VIBRATION COMPENSATION SYSTEM

Projection optical device and exposure apparatus

ACTIVE-ISOLATION MOUNTS FOR OPTICAL ELEMENTS

INTERFEROMETRIC POSITION-MEASURING DEVICES AND METHODS

STAGE ASSEMBLY WITH MEASUREMENT SYSTEM INITIALIZATION, VIBRATION CO...

On-machine methods for identifying and compensating force-ripple an...

Method and system for predicting and correcting signal fluctuations...

Projection Optical Device And Exposure Apparatus

Hexapod kinematic mountings for optical elements, and optical syste...

Anti-Gravity Device for Supporting Weight and Reducing Transmissibi...

System for controlling a dual mover assembly for an exposure apparatus

Lithographic System with Separated Isolation Structures

Active damper with counter mass to compensate for structural vibrat...

Low spring constant, pneumatic suspension with vacuum chamber, air...

Minimum force output control method for counter-mass with cable

Linear motor force ripple identification and compensation with iter...

Stage assembly with measurement system initialization, vibration co...

Stage assembly including a stage having increased vertical stroke

Lithographic system with separated isolation structures

Fine force actuator assembly for chemical mechanical polishing appa...

Moving mechanism with high bandwidth response and low force transmi...

Real-time through lens image measurement system and method