Benjamin Schwarz

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Chambers and coatings for reducing backside damage
- Patent number 12,094,716
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Leonard M. Tedeschi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fast gas exchange apparatus, system, and method
- Patent number 12,068,135
- Issue date Aug 20, 2024
- Applied Materials, Inc.
- Ming Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber lid with integrated heater
- Patent number 11,264,252
- Issue date Mar 1, 2022
- Applied Materials, Inc.
- Michael D. Willwerth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer based corrosion and time dependent chemical effects
- Patent number 11,088,000
- Issue date Aug 10, 2021
- Applied Materials, Inc.
- Leonard Tedeschi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck with variable pixelated magnetic field
- Patent number 10,790,180
- Issue date Sep 29, 2020
- Applied Materials, Inc.
- Chih-Hsun Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer based corrosion and time dependent chemical effects
- Patent number 10,515,862
- Issue date Dec 24, 2019
- Applied Materials, Inc.
- Leonard Tedeschi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck with variable pixelated magnetic field
- Patent number 10,460,968
- Issue date Oct 29, 2019
- Applied Materials, Inc.
- Chih-Hsun Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic article with reduced surface defect density
- Patent number 10,336,656
- Issue date Jul 2, 2019
- Applied Materials, Inc.
- Ren-Guan Duan
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Methods for manufacturing a spacer with desired profile in an advan...
- Patent number 9,741,566
- Issue date Aug 22, 2017
- Applied Materials, Inc.
- Dai-Wen Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic article with reduced surface defect density and process for...
- Patent number 9,034,199
- Issue date May 19, 2015
- Applied Materials, Inc.
- Ren-Guan Duan
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Method for removing halogen-containing residues from substrate
- Patent number 8,992,689
- Issue date Mar 31, 2015
- Applied Materials, Inc.
- Adauto Diaz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method extending the service interval of a gas distribution plate
- Patent number 8,845,816
- Issue date Sep 30, 2014
- Applied Materials, Inc.
- Adauto Diaz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for processing substrates in process systems having shared...
- Patent number 8,721,798
- Issue date May 13, 2014
- Applied Materials, Inc.
- James P. Cruse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of patterning of magnetic tunnel junctions
- Patent number 8,546,263
- Issue date Oct 1, 2013
- Applied Materials, Inc.
- Olivier Joubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for processing substrates in process systems having shared...
- Patent number 8,496,756
- Issue date Jul 30, 2013
- Applied Materials, Inc.
- James P. Cruse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of processing substrates having metal materials
- Patent number 8,435,419
- Issue date May 7, 2013
- Applied Materials, Inc.
- Guowen Ding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for processing substrates in a dual chamber processing syst...
- Patent number 8,097,088
- Issue date Jan 17, 2012
- Applied Materials, Inc.
- Eu Jin Lim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for fabricating magnetic cell junctions and a structure res...
- Patent number 7,205,164
- Issue date Apr 17, 2007
- Silicon Magnetic Systems
- Sam Geha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reducing defect formation within an etched semiconductor topography
- Patent number 7,129,178
- Issue date Oct 31, 2006
- Cypress Semiconductor Corp.
- Benjamin C. E. Schwarz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gate etch process
- Patent number 7,112,834
- Issue date Sep 26, 2006
- Cypress Semiconductor Corporation
- Benjamin Schwarz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal etch process selective to metallic insulating materials
- Patent number 6,972,265
- Issue date Dec 6, 2005
- Silicon Magnetic Systems
- Benjamin C. E. Schwarz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic tunneling junction configuration and a method for making t...
- Patent number 6,897,532
- Issue date May 24, 2005
- Cypress Semiconductor Corp.
- Benjamin C. E. Schwarz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MRAM field-inducing layer configuration
- Patent number 6,891,193
- Issue date May 10, 2005
- Silicon Magnetic Systems
- Benjamin C. E. Schwarz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for plasma etching a microelectronic topography using a puls...
- Patent number 6,759,339
- Issue date Jul 6, 2004
- Silicon Magnetic Systems
- Chang Ju Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gate etch process
- Patent number 6,699,795
- Issue date Mar 2, 2004
- Cypress Semiconductor Corp.
- Benjamin Schwarz
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHAMBERS AND COATINGS FOR REDUCING BACKSIDE DAMAGE
- Publication number 20230077578
- Publication date Mar 16, 2023
- Applied Materials, Inc.
- Leonard M. Tedeschi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FAST GAS EXCHANGE APPARATUS, SYSTEM, AND METHOD
- Publication number 20220262600
- Publication date Aug 18, 2022
- Applied Materials, Inc.
- Ming XU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RING FOR SUBSTRATE EXTREME EDGE PROTECTION
- Publication number 20220157574
- Publication date May 19, 2022
- Applied Materials, Inc.
- Benjamin SCHWARZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER BASED CORROSION & TIME DEPENDENT CHEMICAL EFFECTS
- Publication number 20200118896
- Publication date Apr 16, 2020
- Applied Materials, Inc.
- Leonard Tedeschi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER LID WITH INTEGRATED HEATER
- Publication number 20200118844
- Publication date Apr 16, 2020
- Applied Materials, Inc.
- Michael D. WILLWERTH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH VARIABLE PIXELATED MAGNETIC FIELD
- Publication number 20200013661
- Publication date Jan 9, 2020
- Applied Materials, Inc.
- Chih-Hsun Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER BASED CORROSION & TIME DEPENDENT CHEMICAL EFFECTS
- Publication number 20180294200
- Publication date Oct 11, 2018
- Applied Materials, Inc.
- Leonard TEDESCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR MANUFACTURING A SPACER WITH DESIRED PROFILE IN AN ADVAN...
- Publication number 20160293420
- Publication date Oct 6, 2016
- Applied Materials, Inc.
- Dai-Wen TANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR EXTENDING CHAMBER COMPONENT LIFE FOR PLASMA PROCESSING...
- Publication number 20150294843
- Publication date Oct 15, 2015
- Applied Materials, Inc.
- Feng CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC ARTICLE WITH REDUCED SURFACE DEFECT DENSITY
- Publication number 20150218057
- Publication date Aug 6, 2015
- Applied Materials, Inc.
- Ren-Guan Duan
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
ELECTROSTATIC CHUCK WITH VARIABLE PIXELATED MAGNETIC FIELD
- Publication number 20150155193
- Publication date Jun 4, 2015
- Chih-Hsun Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA SPRAY COATING PROCESS ENHANCEMENT FOR CRITICAL CHAMBER COMPO...
- Publication number 20130288037
- Publication date Oct 31, 2013
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CERAMIC ARTICLE WITH REDUCED SURFACE DEFECT DENSITY AND PROCESS FOR...
- Publication number 20130216783
- Publication date Aug 22, 2013
- Applied Materials, Inc.
- Ren-Guan Duan
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
METHOD OF PATTERNING OF MAGNETIC TUNNEL JUNCTIONS
- Publication number 20120276657
- Publication date Nov 1, 2012
- Olivier Joubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD EXTENDING THE SERVICE INTERVAL OF A GAS DISTRIBUTION PLATE
- Publication number 20120222752
- Publication date Sep 6, 2012
- Applied Materials, Inc.
- Adauto Diaz
- B08 - CLEANING
Information Patent Application
METHOD FOR REMOVING HALOGEN-CONTAINING RESIDUES FROM SUBSTRATE
- Publication number 20120222699
- Publication date Sep 6, 2012
- Applied Materials, Inc.
- Adauto Diaz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PERFORMING AN IN SITU CHAMBER CLEAN
- Publication number 20120094499
- Publication date Apr 19, 2012
- Siu Tang Ng
- B08 - CLEANING
Information Patent Application
METHODS FOR PROCESSING SUBSTRATES HAVING METAL HARD MASKS
- Publication number 20110303639
- Publication date Dec 15, 2011
- Applied Materials, Inc.
- HERRICK NG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS FOR REMOVING BYPRODUCTS FROM LOAD LOCK CHAMBERS
- Publication number 20110304078
- Publication date Dec 15, 2011
- Applied Materials, Inc.
- JARED AHMAD LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF PROCESSING SUBSTRATES HAVING METAL MATERIALS
- Publication number 20110306215
- Publication date Dec 15, 2011
- Applied Materials, Inc.
- GUOWEN DING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR PROCESSING SUBSTRATES IN PROCESS SYSTEMS HAVING SHARED...
- Publication number 20110265814
- Publication date Nov 3, 2011
- Applied Materials, Inc.
- JAMES P. CRUSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR PROCESSING SUBSTRATES IN PROCESS SYSTEMS HAVING SHARED...
- Publication number 20110266256
- Publication date Nov 3, 2011
- Applied Materials, Inc.
- JAMES P. CRUSE
- H01 - BASIC ELECTRIC ELEMENTS

Benjamin Schwarz

Person

Patents Grantslast 30 patents

Chambers and coatings for reducing backside damage

Fast gas exchange apparatus, system, and method

Chamber lid with integrated heater

Wafer based corrosion and time dependent chemical effects

Electrostatic chuck with variable pixelated magnetic field

Wafer based corrosion and time dependent chemical effects

Electrostatic chuck with variable pixelated magnetic field

Ceramic article with reduced surface defect density

Methods for manufacturing a spacer with desired profile in an advan...

Ceramic article with reduced surface defect density and process for...

Method for removing halogen-containing residues from substrate

Method extending the service interval of a gas distribution plate

Methods for processing substrates in process systems having shared...

Method of patterning of magnetic tunnel junctions

Methods for processing substrates in process systems having shared...

Methods of processing substrates having metal materials

Methods for processing substrates in a dual chamber processing syst...

Methods for fabricating magnetic cell junctions and a structure res...

Reducing defect formation within an etched semiconductor topography

Gate etch process

Metal etch process selective to metallic insulating materials

Magnetic tunneling junction configuration and a method for making t...

MRAM field-inducing layer configuration

Method for plasma etching a microelectronic topography using a puls...

Gate etch process

Patents Applicationslast 30 patents

CHAMBERS AND COATINGS FOR REDUCING BACKSIDE DAMAGE

FAST GAS EXCHANGE APPARATUS, SYSTEM, AND METHOD

RING FOR SUBSTRATE EXTREME EDGE PROTECTION

WAFER BASED CORROSION & TIME DEPENDENT CHEMICAL EFFECTS

CHAMBER LID WITH INTEGRATED HEATER

ELECTROSTATIC CHUCK WITH VARIABLE PIXELATED MAGNETIC FIELD

WAFER BASED CORROSION & TIME DEPENDENT CHEMICAL EFFECTS

METHODS FOR MANUFACTURING A SPACER WITH DESIRED PROFILE IN AN ADVAN...

METHODS FOR EXTENDING CHAMBER COMPONENT LIFE FOR PLASMA PROCESSING...

CERAMIC ARTICLE WITH REDUCED SURFACE DEFECT DENSITY

ELECTROSTATIC CHUCK WITH VARIABLE PIXELATED MAGNETIC FIELD

PLASMA SPRAY COATING PROCESS ENHANCEMENT FOR CRITICAL CHAMBER COMPO...

CERAMIC ARTICLE WITH REDUCED SURFACE DEFECT DENSITY AND PROCESS FOR...

METHOD OF PATTERNING OF MAGNETIC TUNNEL JUNCTIONS

METHOD EXTENDING THE SERVICE INTERVAL OF A GAS DISTRIBUTION PLATE

METHOD FOR REMOVING HALOGEN-CONTAINING RESIDUES FROM SUBSTRATE

METHOD OF PERFORMING AN IN SITU CHAMBER CLEAN

METHODS FOR PROCESSING SUBSTRATES HAVING METAL HARD MASKS

METHODS FOR REMOVING BYPRODUCTS FROM LOAD LOCK CHAMBERS

METHODS OF PROCESSING SUBSTRATES HAVING METAL MATERIALS

METHODS FOR PROCESSING SUBSTRATES IN PROCESS SYSTEMS HAVING SHARED...

METHODS FOR PROCESSING SUBSTRATES IN PROCESS SYSTEMS HAVING SHARED...