Beom Soo Park

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Gas confiner assembly for eliminating shadow frame
- Patent number 11,773,489
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- Lai Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment on metal-oxide TFT
- Patent number 10,854,737
- Issue date Dec 1, 2020
- Applied Materials, Inc.
- Soo Young Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Corner spoiler for improving profile uniformity
- Patent number 10,697,063
- Issue date Jun 30, 2020
- Applied Materials, Inc.
- Lai Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flip edge shadow frame
- Patent number 10,676,817
- Issue date Jun 9, 2020
- Applied Materials, Inc.
- Qunhua Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Roughened substrate support
- Patent number 10,434,629
- Issue date Oct 8, 2019
- Applied Materials, Inc.
- Dongsuh Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma uniformity control by gas diffuser hole design
- Patent number 10,312,058
- Issue date Jun 4, 2019
- Applied Materials, Inc.
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma uniformity control by gas diffuser hole design
- Patent number 10,262,837
- Issue date Apr 16, 2019
- Applied Materials, Inc.
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support with quadrants
- Patent number 10,123,379
- Issue date Nov 6, 2018
- Applied Materials, Inc.
- Robin L. Tiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature multilayer dielectric film for passivation and capa...
- Patent number 10,002,711
- Issue date Jun 19, 2018
- Applied Materials, Inc.
- Dapeng Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma treatment on metal-oxide TFT
- Patent number 9,887,277
- Issue date Feb 6, 2018
- Applied Materials, Inc.
- Soo Young Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Anodized showerhead
- Patent number 9,758,869
- Issue date Sep 12, 2017
- Applied Materials, Inc.
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support with quadrants
- Patent number 9,677,177
- Issue date Jun 13, 2017
- Applied Materials, Inc.
- Robin L. Tiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Interface adhesion improvement method
- Patent number 9,449,809
- Issue date Sep 20, 2016
- Applied Materials, Inc.
- Young Jin Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas diffuser assembly
- Patent number D756502
- Issue date May 17, 2016
- Applied Materials, Inc.
- Dongsuh Lee
- D23 - Environmental heating and cooling
Information Patent Grant
Methods for depositing a silicon containing layer with argon gas di...
- Patent number 9,287,137
- Issue date Mar 15, 2016
- Applied Materials, Inc.
- Qunhua Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Barrier films for thin film encapsulation
- Patent number 9,269,923
- Issue date Feb 23, 2016
- Applied Materials, Inc.
- Young Jin Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
A-Si seasoning effect to improve SiN run-to-run uniformity
- Patent number 9,230,796
- Issue date Jan 5, 2016
- Applied Materials, Inc.
- Gaku Furuta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma uniformity control by gas diffuser hole design
- Patent number 9,200,368
- Issue date Dec 1, 2015
- Applied Materials, Inc.
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Off-center ground return for RF-powered showerhead
- Patent number 9,039,864
- Issue date May 26, 2015
- Applied Materials, Inc.
- Jonghoon Baek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
a-Si seasoning effect to improve SiN run-to-run uniformity
- Patent number 8,999,847
- Issue date Apr 7, 2015
- Applied Materials, Inc.
- Gaku Furuta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SiOx process chemistry development using microwave plasma CVD
- Patent number 8,906,813
- Issue date Dec 9, 2014
- Applied Materials, Inc.
- Tae Kyung Won
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing an inorganic encapsulating film
- Patent number 8,901,015
- Issue date Dec 2, 2014
- Applied Materials, Inc.
- Jrjyan Jerry Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film deposition using microwave plasma
- Patent number 8,883,269
- Issue date Nov 11, 2014
- Applied Materials, Inc.
- Tae Kyung Won
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Balancing RF bridge assembly
- Patent number 8,875,657
- Issue date Nov 4, 2014
- Applied Materials, Inc.
- Jonghoon Baek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support with gas introduction openings
- Patent number 8,853,098
- Issue date Oct 7, 2014
- Applied Materials, Inc.
- Sam H. Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detecting plasma chamber malfunction
- Patent number 8,674,844
- Issue date Mar 18, 2014
- Applied Materials, Inc.
- Beom Soo Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Flexible process condition monitoring
- Patent number 8,670,857
- Issue date Mar 11, 2014
- Applied Materials, Inc.
- Hong Soon Kim
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Source gas flow path control in PECVD system to control a by-produc...
- Patent number 8,430,961
- Issue date Apr 30, 2013
- Applied Materials, Inc.
- Beom Soo Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Prevention of film deposition on PECVD process chamber wall
- Patent number 8,381,677
- Issue date Feb 26, 2013
- Applied Materials, Inc.
- Beom Soo Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reducing electrostatic charge by roughening the susceptor
- Patent number 8,372,205
- Issue date Feb 12, 2013
- Applied Materials, Inc.
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE SENSOR FOR END POINT DETECTION DURING PLASMA ENHANCED C...
- Publication number 20210292894
- Publication date Sep 23, 2021
- Applied Materials, Inc.
- Fei PENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA TREATMENT ON METAL-OXIDE TFT
- Publication number 20210043757
- Publication date Feb 11, 2021
- Applied Materials, Inc.
- Soo Young CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT CONDUCTIVE SPACER FOR PLASMA PROCESSING CHAMBER
- Publication number 20200098549
- Publication date Mar 26, 2020
- Applied Materials, Inc.
- Beom Soo PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER CLEANING PROCESS
- Publication number 20200020512
- Publication date Jan 16, 2020
- Applied Materials, Inc.
- Weiting CHEN
- B08 - CLEANING
Information Patent Application
APPLYING EQUALIZED PLASMA COUPLING DESIGN FOR MURA FREE SUSCEPTOR
- Publication number 20180218905
- Publication date Aug 2, 2018
- Applied Materials, Inc.
- Beom Soo PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA TREATMENT ON METAL-OXIDE TFT
- Publication number 20180145157
- Publication date May 24, 2018
- Applied Materials, Inc.
- Soo Young CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Diffuser With Corner HCG
- Publication number 20180090300
- Publication date Mar 29, 2018
- Applied Materials, Inc.
- Lai ZHAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENDPOINT DETECTION FOR A CHAMBER CLEANING PROCESS
- Publication number 20180057935
- Publication date Mar 1, 2018
- Applied Materials, Inc.
- Edward BUDIARTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA UNIFORMITY CONTROL BY GAS DIFFUSER HOLE DESIGN
- Publication number 20180025890
- Publication date Jan 25, 2018
- Applied Materials, Inc.
- Soo Young CHOI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RF RETURN STRAP SHIELDING COVER
- Publication number 20170365449
- Publication date Dec 21, 2017
- Applied Materials, Inc.
- Yi CUI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NON-SHADOW FRAME PLASMA PROCESSING CHAMBER
- Publication number 20170335459
- Publication date Nov 23, 2017
- Applied Materials, Inc.
- Young-jin CHOI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT WITH QUADRANTS
- Publication number 20170231033
- Publication date Aug 10, 2017
- Applied Materials, Inc.
- Robin L. TINER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE MULTILAYER DIELECTRIC FILM FOR PASSIVATION AND CAPA...
- Publication number 20160240312
- Publication date Aug 18, 2016
- Applied Materials, Inc.
- Dapeng WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA TREATMENT ON METAL-OXIDE TFT
- Publication number 20160218000
- Publication date Jul 28, 2016
- Applied Materials, Inc.
- Soo Young CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DELIVERY AND DISTRIBUTION FOR UNIFORM PROCESS IN LINEAR-TYPE LA...
- Publication number 20160208380
- Publication date Jul 21, 2016
- Applied Materials, Inc.
- John M. WHITE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA UNIFORMITY CONTROL BY GAS DIFFUSER HOLE DESIGN
- Publication number 20160056019
- Publication date Feb 25, 2016
- Applied Materials, Inc.
- Soo Young CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL OXIDE TFT STABILITY IMPROVEMENT
- Publication number 20150380561
- Publication date Dec 31, 2015
- Applied Materials, Inc.
- Tae K. WON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CORNER SPOILER FOR IMPROVING PROFILE UNIFORMITY
- Publication number 20150211120
- Publication date Jul 30, 2015
- Applied Materials, Inc.
- Lai ZHAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS CONFINER ASSEMBLY FOR ELIMINATING SHADOW FRAME
- Publication number 20150211121
- Publication date Jul 30, 2015
- Applied Materials, Inc.
- Lai ZHAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROUGHENED SUBSTRATE SUPPORT
- Publication number 20150202739
- Publication date Jul 23, 2015
- Applied Materials, Inc.
- Dongsuh LEE
- B24 - GRINDING POLISHING
Information Patent Application
A-SI SEASONING EFFECT TO IMPROVE SIN RUN-TO-RUN UNIFORMITY
- Publication number 20150179426
- Publication date Jun 25, 2015
- Applied Materials, Inc.
- Gaku FURUTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH QUADRANTS
- Publication number 20150114948
- Publication date Apr 30, 2015
- Applied Materials, Inc.
- Robin L. TINER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADHESION IMPROVEMENT BETWEEN CVD DIELECTRIC FILM AND CU SUBSTRATE
- Publication number 20140272187
- Publication date Sep 18, 2014
- Tae Kyung WON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BARRIER FILM PERFORMANCE WITH N2O DILUTION PROCESS FOR THIN FILM EN...
- Publication number 20140264296
- Publication date Sep 18, 2014
- Young Jin CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLIP EDGE SHADOW FRAME
- Publication number 20140251216
- Publication date Sep 11, 2014
- Qunhua WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATED BACKING PLATE
- Publication number 20140174361
- Publication date Jun 26, 2014
- Applied Materials, Inc.
- Jrjyan Jerry CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS GAS FLOW GUIDES FOR LARGE AREA PLASMA ENHANCED CHEMICAL VAP...
- Publication number 20140030056
- Publication date Jan 30, 2014
- Dongsuh Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROUGHENED SUBSTRATE SUPPORT
- Publication number 20140027289
- Publication date Jan 30, 2014
- Applied Materials, Inc.
- Dongsuh LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTERFACE ADHESION IMPROVEMENT METHOD
- Publication number 20140024180
- Publication date Jan 23, 2014
- Applied Materials, Inc.
- Young Jin CHOI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SIOX PROCESS CHEMISTRY DEVELOPMENT USING MICROWAVE PLASMA CVD
- Publication number 20130302999
- Publication date Nov 14, 2013
- Tae Kyung WON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Beom Soo Park

Person

Patents Grantslast 30 patents

Gas confiner assembly for eliminating shadow frame

Plasma treatment on metal-oxide TFT

Corner spoiler for improving profile uniformity

Flip edge shadow frame

Roughened substrate support

Plasma uniformity control by gas diffuser hole design

Plasma uniformity control by gas diffuser hole design

Substrate support with quadrants

Low temperature multilayer dielectric film for passivation and capa...

Plasma treatment on metal-oxide TFT

Anodized showerhead

Substrate support with quadrants

Interface adhesion improvement method

Gas diffuser assembly

Methods for depositing a silicon containing layer with argon gas di...

Barrier films for thin film encapsulation

A-Si seasoning effect to improve SiN run-to-run uniformity

Plasma uniformity control by gas diffuser hole design

Off-center ground return for RF-powered showerhead

a-Si seasoning effect to improve SiN run-to-run uniformity

SiOx process chemistry development using microwave plasma CVD

Method for depositing an inorganic encapsulating film

Thin film deposition using microwave plasma

Balancing RF bridge assembly

Substrate support with gas introduction openings

Detecting plasma chamber malfunction

Flexible process condition monitoring

Source gas flow path control in PECVD system to control a by-produc...

Prevention of film deposition on PECVD process chamber wall

Reducing electrostatic charge by roughening the susceptor

Patents Applicationslast 30 patents

TEMPERATURE SENSOR FOR END POINT DETECTION DURING PLASMA ENHANCED C...

PLASMA TREATMENT ON METAL-OXIDE TFT

HEAT CONDUCTIVE SPACER FOR PLASMA PROCESSING CHAMBER

CHAMBER CLEANING PROCESS

APPLYING EQUALIZED PLASMA COUPLING DESIGN FOR MURA FREE SUSCEPTOR

PLASMA TREATMENT ON METAL-OXIDE TFT

Diffuser With Corner HCG

ENDPOINT DETECTION FOR A CHAMBER CLEANING PROCESS

PLASMA UNIFORMITY CONTROL BY GAS DIFFUSER HOLE DESIGN

RF RETURN STRAP SHIELDING COVER

NON-SHADOW FRAME PLASMA PROCESSING CHAMBER

SUBSTRATE SUPPORT WITH QUADRANTS

LOW TEMPERATURE MULTILAYER DIELECTRIC FILM FOR PASSIVATION AND CAPA...

PLASMA TREATMENT ON METAL-OXIDE TFT

GAS DELIVERY AND DISTRIBUTION FOR UNIFORM PROCESS IN LINEAR-TYPE LA...

PLASMA UNIFORMITY CONTROL BY GAS DIFFUSER HOLE DESIGN

METAL OXIDE TFT STABILITY IMPROVEMENT

CORNER SPOILER FOR IMPROVING PROFILE UNIFORMITY

GAS CONFINER ASSEMBLY FOR ELIMINATING SHADOW FRAME

ROUGHENED SUBSTRATE SUPPORT

A-SI SEASONING EFFECT TO IMPROVE SIN RUN-TO-RUN UNIFORMITY

SUBSTRATE SUPPORT WITH QUADRANTS

ADHESION IMPROVEMENT BETWEEN CVD DIELECTRIC FILM AND CU SUBSTRATE

BARRIER FILM PERFORMANCE WITH N2O DILUTION PROCESS FOR THIN FILM EN...

FLIP EDGE SHADOW FRAME

HEATED BACKING PLATE

PROCESS GAS FLOW GUIDES FOR LARGE AREA PLASMA ENHANCED CHEMICAL VAP...

ROUGHENED SUBSTRATE SUPPORT

INTERFACE ADHESION IMPROVEMENT METHOD

SIOX PROCESS CHEMISTRY DEVELOPMENT USING MICROWAVE PLASMA CVD