Birol Kuyel

Person

Austin, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Mask and reticle protection with atomic layer deposition (ALD)
- Patent number 12,197,125
- Issue date Jan 14, 2025
- Nano-Master, Inc.
- Birol Kuyel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for roll-to-roll (R2R) plasma enhanced/activa...
- Patent number 12,195,850
- Issue date Jan 14, 2025
- Nano-Master, Inc.
- Birol Kuyel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for roll-to-roll (R2R) plasma enhanced/activa...
- Patent number 12,180,586
- Issue date Dec 31, 2024
- NanoMaster, Inc.
- Birol Kuyel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron cyclotron rotation (ECR)-enhanced hollow cathode plasma so...
- Patent number 11,640,900
- Issue date May 2, 2023
- Nano-Master, Inc.
- Birol Kuyel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for a hybrid design for efficient and economical plasma...
- Patent number 11,087,959
- Issue date Aug 10, 2021
- Nano-Master, Inc.
- Birol Kuyel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques and systems for continuous-flow plasma enhanced atomic l...
- Patent number 10,366,898
- Issue date Jul 30, 2019
- Nano-Master, Inc.
- Birol Kuyel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques and systems for continuous-flow plasma enhanced atomic l...
- Patent number 10,361,088
- Issue date Jul 23, 2019
- Nano-Master, Inc.
- Birol Kuyel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques and systems for continuous-flow plasma enhanced atomic l...
- Patent number 9,972,501
- Issue date May 15, 2018
- Nano-Master, Inc.
- Birol Kuyel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single wafer megasonic cleaner method, system, and apparatus
- Patent number 6,730,176
- Issue date May 4, 2004
- Birol Kuyel
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Apparatus and Methods for Roll-to-Roll (R2R) Plasma Enhanced/Activa...
- Publication number 20230047633
- Publication date Feb 16, 2023
- Nano-Master, Inc.
- Birol Kuyel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and Methods for Roll-to-Roll (R2R) Plasma Enhanced/Activa...
- Publication number 20230047186
- Publication date Feb 16, 2023
- Nano-Master, Inc.
- Birol Kuyel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Mask and Reticle Protection with Atomic Layer Deposition (ALD)
- Publication number 20220197131
- Publication date Jun 23, 2022
- Nano-Master, Inc.
- Birol Kuyel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Cyclotron Rotation (ECR)-Enhanced Hollow Cathode Plasma So...
- Publication number 20210249234
- Publication date Aug 12, 2021
- Nano-Master, Inc.
- Birol Kuyel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Techniques for a hybrid design for efficient and economical plasma...
- Publication number 20210217584
- Publication date Jul 15, 2021
- Nano-Master, Inc.
- Birol Kuyel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Techniques and systems for continuous-flow plasma enhanced atomic l...
- Publication number 20180269066
- Publication date Sep 20, 2018
- Nano-Master, Inc.
- Birol Kuyel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Techniques and systems for continuous-flow plasma enhanced atomic l...
- Publication number 20180269067
- Publication date Sep 20, 2018
- Nano-Master, Inc.
- Birol Kuyel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Single wafer megasonic cleaner method, system, and apparatus
- Publication number 20030010356
- Publication date Jan 16, 2003
- Birol Kuyel
- H01 - BASIC ELECTRIC ELEMENTS

Birol Kuyel

Person

Patents Grantslast 30 patents

Mask and reticle protection with atomic layer deposition (ALD)

Apparatus and methods for roll-to-roll (R2R) plasma enhanced/activa...

Apparatus and methods for roll-to-roll (R2R) plasma enhanced/activa...

Electron cyclotron rotation (ECR)-enhanced hollow cathode plasma so...

Techniques for a hybrid design for efficient and economical plasma...

Techniques and systems for continuous-flow plasma enhanced atomic l...

Techniques and systems for continuous-flow plasma enhanced atomic l...

Techniques and systems for continuous-flow plasma enhanced atomic l...

Single wafer megasonic cleaner method, system, and apparatus

Patents Applicationslast 30 patents

Apparatus and Methods for Roll-to-Roll (R2R) Plasma Enhanced/Activa...

Apparatus and Methods for Roll-to-Roll (R2R) Plasma Enhanced/Activa...

Mask and Reticle Protection with Atomic Layer Deposition (ALD)

Electron Cyclotron Rotation (ECR)-Enhanced Hollow Cathode Plasma So...

Techniques for a hybrid design for efficient and economical plasma...

Techniques and systems for continuous-flow plasma enhanced atomic l...

Techniques and systems for continuous-flow plasma enhanced atomic l...

Single wafer megasonic cleaner method, system, and apparatus