Boris Fishkin

Person

San Carlos, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Single wafer dryer and drying methods
- Patent number 7,980,255
- Issue date Jul 19, 2011
- Applied Materials, Inc.
- Younes Achkire
- B08 - CLEANING
Information Patent Grant
Apparatus for cleaning and drying substrates
- Patent number 7,718,011
- Issue date May 18, 2010
- Applied Materials, Inc.
- Boris Fishkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single wafer dryer and drying methods
- Patent number 7,513,062
- Issue date Apr 7, 2009
- Applied Materials, Inc.
- Younes Achkire
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for cleaning and drying substrates
- Patent number 7,252,098
- Issue date Aug 7, 2007
- Applied Materials, Inc.
- Boris Fishkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single wafer dryer and drying methods
- Patent number 6,955,516
- Issue date Oct 18, 2005
- Applied Materials, Inc.
- Younes Achkire
- B08 - CLEANING
Information Patent Grant
Apparatus for cleaning and drying substrates
- Patent number 6,746,544
- Issue date Jun 8, 2004
- Applied Materials Inc.
- Boris Fishkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for cleaning/drying hydrophobic wafers
- Patent number 6,468,362
- Issue date Oct 22, 2002
- Applied Materials, Inc.
- Youfel Chen
- B08 - CLEANING
Information Patent Grant
Method for managing a fluid level associated with a substrate proce...
- Patent number 6,464,799
- Issue date Oct 15, 2002
- Applied Materials, Inc.
- Alexander Lerner
- B08 - CLEANING
Information Patent Grant
Megasonic resonator for disk cleaning and method for use thereof
- Patent number 6,460,551
- Issue date Oct 8, 2002
- Applied Materials, Inc.
- Boris Fishkin
- B08 - CLEANING
Information Patent Grant
Continuous cleaning megasonic tank with reduced duty cycle transducers
- Patent number 6,412,499
- Issue date Jul 2, 2002
- Applied Materials, Inc.
- Jianshe Tang
- B08 - CLEANING
Information Patent Grant
Pad conditioner cleaning apparatus
- Patent number 6,358,124
- Issue date Mar 19, 2002
- Applied Materials, Inc.
- Raijiro Koga
- B08 - CLEANING
Information Patent Grant
Controlled environment enclosure and mechanical interface
- Patent number 6,352,403
- Issue date Mar 5, 2002
- Applied Materials, Inc.
- Boris Fishkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for cleaning the edge of a thin disc
- Patent number 6,345,630
- Issue date Feb 12, 2002
- Applied Materials, Inc.
- Boris Fishkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aerosol substrate cleaner
- Patent number 6,332,470
- Issue date Dec 25, 2001
- Boris Fishkin
- B08 - CLEANING
Information Patent Grant
Apparatus for cleaning and drying substrates
- Patent number 6,328,814
- Issue date Dec 11, 2001
- Applied Materials, Inc.
- Boris Fishkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Megasonic cleaner
- Patent number 6,311,702
- Issue date Nov 6, 2001
- Applied Materials, Inc.
- Boris Fishkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Combined slurry dispenser and rinse arm
- Patent number 6,280,299
- Issue date Aug 28, 2001
- Applied Materials, Inc.
- Daniel Kennedy
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for cleaning the edge of a thin disc
- Patent number 6,276,371
- Issue date Aug 21, 2001
- Applied Materials, Inc.
- Boris Fishkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cavitational polishing pad conditioner
- Patent number 6,241,588
- Issue date Jun 5, 2001
- Applied Materials, Inc.
- Kyle A. Brown
- B24 - GRINDING POLISHING
Information Patent Grant
Tank design for sonic wafer cleaning
- Patent number 6,220,259
- Issue date Apr 24, 2001
- Applied Materials, Inc.
- Brian J. Brown
- B08 - CLEANING
Information Patent Grant
Method of post CMP defect stability improvement
- Patent number 6,220,941
- Issue date Apr 24, 2001
- Applied Materials, Inc.
- Boris Fishkin
- B24 - GRINDING POLISHING
Information Patent Grant
Method of chemical mechanical polishing a metal layer
- Patent number 6,218,306
- Issue date Apr 17, 2001
- Applied Materials, Inc.
- Boris Fishkin
- B24 - GRINDING POLISHING
Information Patent Grant
Pad conditioner cleaning apparatus
- Patent number 6,217,430
- Issue date Apr 17, 2001
- Applied Materials, Inc.
- Raijiro Koga
- B08 - CLEANING
Information Patent Grant
Method and apparatus for cleaning the edge of a thin disc
- Patent number 6,202,658
- Issue date Mar 20, 2001
- Applied Materials, Inc.
- Boris Fishkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cavitational polishing pad conditioner
- Patent number 6,149,505
- Issue date Nov 21, 2000
- Applied Materials, Inc.
- Kyle A. Brown
- B24 - GRINDING POLISHING
Information Patent Grant
Continuous cleaning megasonic tank with reduced duty cycle transducers
- Patent number 6,148,833
- Issue date Nov 21, 2000
- Applied Materials, Inc.
- Jianshe Tang
- B08 - CLEANING
Information Patent Grant
Combined slurry dispenser and rinse arm and method of operation
- Patent number 6,139,406
- Issue date Oct 31, 2000
- Applied Materials, Inc.
- Daniel Kennedy
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for cleaning the edge of a thin disc
- Patent number 6,119,708
- Issue date Sep 19, 2000
- Applied Materials, Inc.
- Boris Fishkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Controlled environment enclosure and mechanical interface
- Patent number 6,082,948
- Issue date Jul 4, 2000
- Applied Materials, Inc.
- Boris Fishkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of drying a substrate by lowering a fluid surface level
- Patent number 6,027,574
- Issue date Feb 22, 2000
- Applied Materials, Inc.
- Boris Fishkin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SINGLE WAFER DRYER AND DRYING METHODS
- Publication number 20100006124
- Publication date Jan 14, 2010
- APPLIED MATERIALS, INC.
- Younes Achkire
- B08 - CLEANING
Information Patent Application
SINGLE WAFER DRYER AND DRYING METHODS
- Publication number 20090241996
- Publication date Oct 1, 2009
- Younes Achkire
- B08 - CLEANING
Information Patent Application
SINGLE WAFER DRYER AND DRYING METHODS
- Publication number 20070295371
- Publication date Dec 27, 2007
- APPLIED MATERIALS, INC.
- Younes Achkire
- B08 - CLEANING
Information Patent Application
APPARATUS FOR CLEANING AND DRYING SUBSTRATES
- Publication number 20070272278
- Publication date Nov 29, 2007
- APPLIED MATERIALS, INC.
- Boris Fishkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for cleaning and drying substrates
- Publication number 20060260653
- Publication date Nov 23, 2006
- APPLIED MATERIALS, INC.
- Boris Fishkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Single wafer dryer and drying methods
- Publication number 20060174921
- Publication date Aug 10, 2006
- APPLIED MATERIALS, INC.
- Younes Achkire
- B08 - CLEANING
Information Patent Application
Single wafer dryer and drying methods
- Publication number 20050241684
- Publication date Nov 3, 2005
- APPLIED MATERIALS, INC.
- Younes Achkire
- B08 - CLEANING
Information Patent Application
Single wafer dryer and drying methods
- Publication number 20050229426
- Publication date Oct 20, 2005
- APPLIED MATERIALS, INC.
- Younes Achkire
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for cleaning and drying substrates
- Publication number 20040055625
- Publication date Mar 25, 2004
- APPLIED MATERIALS, INC.
- Boris Fishkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Single wafer dryer and drying methods
- Publication number 20030121170
- Publication date Jul 3, 2003
- APPLIED MATERIALS, INC.
- Younes Achkire
- B08 - CLEANING
Information Patent Application
Apparatus for fluid control with a substrate processing tank
- Publication number 20030010364
- Publication date Jan 16, 2003
- Alexander Lerner
- G05 - CONTROLLING REGULATING
Information Patent Application
Method and apparatus for cleaning/drying hydrophobic wafers
- Publication number 20020189643
- Publication date Dec 19, 2002
- Yufei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for cleaning and drying substrates
- Publication number 20020074023
- Publication date Jun 20, 2002
- Boris Fishkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for cleaning the edge of a thin disc
- Publication number 20010002593
- Publication date Jun 7, 2001
- Boris Fishkin
- H01 - BASIC ELECTRIC ELEMENTS

Boris Fishkin

Person

Patents Grantslast 30 patents

Single wafer dryer and drying methods

Apparatus for cleaning and drying substrates

Single wafer dryer and drying methods

Apparatus for cleaning and drying substrates

Single wafer dryer and drying methods

Apparatus for cleaning and drying substrates

Method and apparatus for cleaning/drying hydrophobic wafers

Method for managing a fluid level associated with a substrate proce...

Megasonic resonator for disk cleaning and method for use thereof

Continuous cleaning megasonic tank with reduced duty cycle transducers

Pad conditioner cleaning apparatus

Controlled environment enclosure and mechanical interface

Method and apparatus for cleaning the edge of a thin disc

Aerosol substrate cleaner

Apparatus for cleaning and drying substrates

Megasonic cleaner

Combined slurry dispenser and rinse arm

Method and apparatus for cleaning the edge of a thin disc

Cavitational polishing pad conditioner

Tank design for sonic wafer cleaning

Method of post CMP defect stability improvement

Method of chemical mechanical polishing a metal layer

Pad conditioner cleaning apparatus

Method and apparatus for cleaning the edge of a thin disc

Cavitational polishing pad conditioner

Continuous cleaning megasonic tank with reduced duty cycle transducers

Combined slurry dispenser and rinse arm and method of operation

Method and apparatus for cleaning the edge of a thin disc

Controlled environment enclosure and mechanical interface

Method of drying a substrate by lowering a fluid surface level

Patents Applicationslast 30 patents

SINGLE WAFER DRYER AND DRYING METHODS

SINGLE WAFER DRYER AND DRYING METHODS

SINGLE WAFER DRYER AND DRYING METHODS

APPARATUS FOR CLEANING AND DRYING SUBSTRATES

Apparatus for cleaning and drying substrates

Single wafer dryer and drying methods

Single wafer dryer and drying methods

Single wafer dryer and drying methods

Apparatus for cleaning and drying substrates

Single wafer dryer and drying methods

Apparatus for fluid control with a substrate processing tank

Method and apparatus for cleaning/drying hydrophobic wafers

Apparatus for cleaning and drying substrates

Method and apparatus for cleaning the edge of a thin disc