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Spin on oxygen reactive ion etch barrier
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Patent number 5,270,151
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Issue date Dec 14, 1993
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International Business Machines Corporation
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Peter A. Agostino
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Top imaged resists
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Patent number 4,810,601
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Issue date Mar 7, 1989
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International Business Machines Corporation
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Robert D. Allen
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Negative resist compositions
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Patent number 4,800,152
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Issue date Jan 24, 1989
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International Business Machines Corporation
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Robert D. Allen
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Positive resist compositions
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Patent number 4,397,937
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Issue date Aug 9, 1983
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International Business Machines Corporation
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Nicholas J. Clecak
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Terpolymer resist compositions
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Patent number 4,398,001
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Issue date Aug 9, 1983
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International Business Machines Corporation
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Ying Y. Cheng
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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