Number | Name | Date | Kind |
---|---|---|---|
4396704 | Taylor | Aug 1983 | |
4426247 | Tamamura et al. | Jan 1984 | |
4433044 | Meyer et al. | Feb 1984 | |
4481279 | Maito | Nov 1984 | |
4491628 | Ito et al. | Jan 1985 | |
4507331 | Hiraoka | Mar 1985 | |
4596761 | Brault | Jun 1986 | |
4613398 | Chiong et al. | Sep 1986 |
Entry |
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IBM Technical Disclosure Bulletin, vol. 27, No. 4A, Sep. 1984, "Positive-Tone Polymer Pattern Fabrication by Gas Phase Surface Modification," p. 2197. |